DE69112903D1 - Verfahren und Vorrichtung zum Zerschneiden von Einkristallbarren mittels einer Innenlochsäge. - Google Patents

Verfahren und Vorrichtung zum Zerschneiden von Einkristallbarren mittels einer Innenlochsäge.

Info

Publication number
DE69112903D1
DE69112903D1 DE69112903T DE69112903T DE69112903D1 DE 69112903 D1 DE69112903 D1 DE 69112903D1 DE 69112903 T DE69112903 T DE 69112903T DE 69112903 T DE69112903 T DE 69112903T DE 69112903 D1 DE69112903 D1 DE 69112903D1
Authority
DE
Germany
Prior art keywords
single crystal
hole saw
internal hole
crystal ingots
cutting single
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69112903T
Other languages
English (en)
Other versions
DE69112903T2 (de
Inventor
Kohei Toyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Publication of DE69112903D1 publication Critical patent/DE69112903D1/de
Application granted granted Critical
Publication of DE69112903T2 publication Critical patent/DE69112903T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/024—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with the stock carried by a movable support for feeding stock into engagement with the cutting blade, e.g. stock carried by a pivoted arm or a carriage
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D59/00—Accessories specially designed for sawing machines or sawing devices
    • B23D59/001—Measuring or control devices, e.g. for automatic control of work feed pressure on band saw blade
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
    • B23Q15/013—Control or regulation of feed movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/028—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a ring blade having an inside cutting edge

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
DE69112903T 1990-05-18 1991-05-20 Verfahren und Vorrichtung zum Zerschneiden von Einkristallbarren mittels einer Innenlochsäge. Expired - Fee Related DE69112903T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2126609A JPH0612768B2 (ja) 1990-05-18 1990-05-18 内周刃スライサーによる単結晶インゴットの切断方法及び装置

Publications (2)

Publication Number Publication Date
DE69112903D1 true DE69112903D1 (de) 1995-10-19
DE69112903T2 DE69112903T2 (de) 1996-05-23

Family

ID=14939434

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69112903T Expired - Fee Related DE69112903T2 (de) 1990-05-18 1991-05-20 Verfahren und Vorrichtung zum Zerschneiden von Einkristallbarren mittels einer Innenlochsäge.

Country Status (4)

Country Link
US (1) US5226403A (de)
EP (1) EP0457626B1 (de)
JP (1) JPH0612768B2 (de)
DE (1) DE69112903T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5382551A (en) * 1993-04-09 1995-01-17 Micron Semiconductor, Inc. Method for reducing the effects of semiconductor substrate deformities
JP2891187B2 (ja) * 1995-06-22 1999-05-17 信越半導体株式会社 ワイヤーソー装置及び切断方法
US5832914A (en) * 1997-08-22 1998-11-10 Seh America, Inc. Ingot trimming method and apparatus
US6245184B1 (en) * 1997-11-26 2001-06-12 General Electric Company Method of fabricating scintillators for computed tomograph system
DE10103592B4 (de) * 2001-01-26 2006-07-13 Ernst Spielvogel Säge zum Zerteilen von Materialien in dünne Scheiben, insbesondere zum Zerteilen von Wafern aus Silizium
DE102012221904B4 (de) * 2012-11-29 2018-05-30 Siltronic Ag Verfahren zur Wiederaufnahme des Drahtsägeprozesses eines Werkstückes nach einer unplanmäßigen Unterbrechung
JP6887722B2 (ja) * 2016-10-25 2021-06-16 株式会社ディスコ ウェーハの加工方法及び切削装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2371085A (en) * 1942-10-01 1945-03-06 Western Electric Co Apparatus for handling articles
US3039235A (en) * 1961-01-31 1962-06-19 Hamco Mach & Elect Co Cutting apparatus
US3803768A (en) * 1971-09-17 1974-04-16 A Littwin Control for movement of a device through successive ranges
GB1600863A (en) * 1977-03-09 1981-10-21 Gersoran Sa Gem stone cutting machine
US4228782A (en) * 1978-09-08 1980-10-21 Rca Corporation System for regulating the applied blade-to-boule force during the slicing of wafers
JPS5822288B2 (ja) * 1979-06-18 1983-05-07 株式会社 アマダ 鋸盤の切込量制御方法及び制御装置
JPS60127917A (ja) * 1983-12-14 1985-07-08 Amada Co Ltd 鋸盤における切削制御方法及び装置
DE3469498D1 (en) * 1984-06-27 1988-04-07 Meyer & Burger Ag Maschf Cutting machine with measuring device and utilization of this measuring device
US4564000A (en) * 1984-07-06 1986-01-14 The United States Of America As Represented By The Secretary Of The Army Precision cutting of millimeter wave ferrite materials
EP0186201B1 (de) * 1984-12-27 1992-12-30 Disco Abrasive Systems, Ltd. Vorrichtung zum Abtrennen von Halbleiterscheiben
US4794736A (en) * 1985-12-27 1989-01-03 Citizen Watch Co., Ltd. Arrangement for mechanically and accurately processing a workpiece with a position detecting pattern or patterns
US4903681A (en) * 1987-02-24 1990-02-27 Tokyo Seimitus Co., Ltd. Method and apparatus for cutting a cylindrical material
JP2623604B2 (ja) * 1987-10-21 1997-06-25 三菱マテリアル株式会社 スライサの切断送り装置
US4949700A (en) * 1987-12-17 1990-08-21 Tokyou Seimitsu Co., Ltd. Ingot support device in slicing apparatus
US5025593A (en) * 1988-01-18 1991-06-25 Mazda Motor Corporation Slicing machine and control method thereof

Also Published As

Publication number Publication date
EP0457626A3 (en) 1992-03-25
JPH0612768B2 (ja) 1994-02-16
JPH0423432A (ja) 1992-01-27
DE69112903T2 (de) 1996-05-23
EP0457626A2 (de) 1991-11-21
EP0457626B1 (de) 1995-09-13
US5226403A (en) 1993-07-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee