DE69111736D1 - Röntgenstrahlabbildungssystem. - Google Patents
Röntgenstrahlabbildungssystem.Info
- Publication number
- DE69111736D1 DE69111736D1 DE69111736T DE69111736T DE69111736D1 DE 69111736 D1 DE69111736 D1 DE 69111736D1 DE 69111736 T DE69111736 T DE 69111736T DE 69111736 T DE69111736 T DE 69111736T DE 69111736 D1 DE69111736 D1 DE 69111736D1
- Authority
- DE
- Germany
- Prior art keywords
- imaging system
- ray imaging
- ray
- imaging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2037—Exposure with X-ray radiation or corpuscular radiation, through a mask with a pattern opaque to that radiation
- G03F7/2039—X-ray radiation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70316—Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Theoretical Computer Science (AREA)
- Mathematical Physics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Analytical Chemistry (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/516,401 US5022061A (en) | 1990-04-30 | 1990-04-30 | An image focusing means by using an opaque object to diffract x-rays |
PCT/US1991/001717 WO1991017549A1 (en) | 1990-04-30 | 1991-03-14 | X-ray imaging system |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69111736D1 true DE69111736D1 (de) | 1995-09-07 |
DE69111736T2 DE69111736T2 (de) | 1996-01-18 |
Family
ID=24055409
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69111736T Expired - Fee Related DE69111736T2 (de) | 1990-04-30 | 1991-03-14 | Röntgenstrahlabbildungssystem. |
Country Status (7)
Country | Link |
---|---|
US (1) | US5022061A (de) |
EP (1) | EP0479968B1 (de) |
JP (1) | JPH04506870A (de) |
KR (1) | KR920702793A (de) |
CA (1) | CA2049946A1 (de) |
DE (1) | DE69111736T2 (de) |
WO (1) | WO1991017549A1 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2526409B2 (ja) * | 1994-02-18 | 1996-08-21 | 工業技術院長 | X線レンズ |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2735018A (en) * | 1956-02-14 | Mclachlan | ||
US1626306A (en) * | 1923-07-18 | 1927-04-26 | Union Carbide & Carbon Res Lab | Method of producing homogeneous x-rays and apparatus therefor |
DE2735245A1 (de) * | 1977-08-04 | 1979-02-15 | Siemens Ag | Anordnung zur erzeugung einer konstanten signalamplitude bei einem optoelektronischen abtastsystem |
US4426719A (en) * | 1981-02-12 | 1984-01-17 | Yissum Research Development Co. Of The Hebrew University Of Jerusalem | Production of monochromatic x-ray images of x-ray sources and space resolving x-ray spectra |
US4429411A (en) * | 1981-04-20 | 1984-01-31 | The United States Of America As Represented By The United States Department Of Energy | Instrument and method for focusing X-rays, gamma rays and neutrons |
JPS61138150A (ja) * | 1984-12-11 | 1986-06-25 | Hamamatsu Photonics Kk | 時間分解シヤドウグラフ装置 |
DE3790178T1 (de) * | 1986-03-28 | 1988-04-21 | ||
DE3639346A1 (de) * | 1986-11-18 | 1988-05-26 | Siemens Ag | Verfahren und anordnung zur aenderung des abbildungsmassstabes in der roentgenlithografie |
DE3642457A1 (de) * | 1986-12-12 | 1988-06-30 | Zeiss Carl Fa | Roentgen-mikroskop |
-
1990
- 1990-04-30 US US07/516,401 patent/US5022061A/en not_active Expired - Fee Related
-
1991
- 1991-03-14 EP EP91906798A patent/EP0479968B1/de not_active Expired - Lifetime
- 1991-03-14 JP JP3507235A patent/JPH04506870A/ja active Pending
- 1991-03-14 DE DE69111736T patent/DE69111736T2/de not_active Expired - Fee Related
- 1991-03-14 CA CA002049946A patent/CA2049946A1/en not_active Abandoned
- 1991-03-14 WO PCT/US1991/001717 patent/WO1991017549A1/en active IP Right Grant
- 1991-03-14 KR KR1019910701962A patent/KR920702793A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
KR920702793A (ko) | 1992-10-06 |
JPH04506870A (ja) | 1992-11-26 |
EP0479968A4 (en) | 1992-07-08 |
US5022061A (en) | 1991-06-04 |
EP0479968A1 (de) | 1992-04-15 |
EP0479968B1 (de) | 1995-08-02 |
CA2049946A1 (en) | 1991-10-31 |
DE69111736T2 (de) | 1996-01-18 |
WO1991017549A1 (en) | 1991-11-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |