DE69109901D1 - Vakuum-Kugellager und Turbomolekularpumpe, ausgerüstet mit einem solchen Lager. - Google Patents

Vakuum-Kugellager und Turbomolekularpumpe, ausgerüstet mit einem solchen Lager.

Info

Publication number
DE69109901D1
DE69109901D1 DE69109901T DE69109901T DE69109901D1 DE 69109901 D1 DE69109901 D1 DE 69109901D1 DE 69109901 T DE69109901 T DE 69109901T DE 69109901 T DE69109901 T DE 69109901T DE 69109901 D1 DE69109901 D1 DE 69109901D1
Authority
DE
Germany
Prior art keywords
bearing
turbomolecular pump
pump equipped
vacuum ball
ball bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69109901T
Other languages
English (en)
Other versions
DE69109901T2 (de
Inventor
Kazuya Suzuki
Hirokazu Takii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koyo Seiko Co Ltd
Original Assignee
Koyo Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Seiko Co Ltd filed Critical Koyo Seiko Co Ltd
Application granted granted Critical
Publication of DE69109901D1 publication Critical patent/DE69109901D1/de
Publication of DE69109901T2 publication Critical patent/DE69109901T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/303—Parts of ball or roller bearings of hybrid bearings, e.g. rolling bearings with steel races and ceramic rolling elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/32—Balls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/58—Raceways; Race rings
    • F16C33/62—Selection of substances
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/66—Special parts or details in view of lubrication
    • F16C33/6603—Special parts or details in view of lubrication with grease as lubricant
    • F16C33/6633—Grease properties or compositions, e.g. rheological properties
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/72—Sealings
    • F16C33/76—Sealings of ball or roller bearings
    • F16C33/78—Sealings of ball or roller bearings with a diaphragm, disc, or ring, with or without resilient members
    • F16C33/784—Sealings of ball or roller bearings with a diaphragm, disc, or ring, with or without resilient members mounted to a groove in the inner surface of the outer race and extending toward the inner race
    • F16C33/7843—Sealings of ball or roller bearings with a diaphragm, disc, or ring, with or without resilient members mounted to a groove in the inner surface of the outer race and extending toward the inner race with a single annular sealing disc
    • F16C33/7846—Sealings of ball or roller bearings with a diaphragm, disc, or ring, with or without resilient members mounted to a groove in the inner surface of the outer race and extending toward the inner race with a single annular sealing disc with a gap between the annular disc and the inner race
    • F16C33/785—Bearing shields made of sheet metal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2240/00—Specified values or numerical ranges of parameters; Relations between them
    • F16C2240/40—Linear dimensions, e.g. length, radius, thickness, gap
    • F16C2240/70—Diameters; Radii
    • F16C2240/80—Pitch circle diameters [PCD]
    • F16C2240/82—Degree of filling, i.e. sum of diameters of rolling elements in relation to PCD
    • F16C2240/84—Degree of filling, i.e. sum of diameters of rolling elements in relation to PCD with full complement of balls or rollers, i.e. sum of clearances less than diameter of one rolling element
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rolling Contact Bearings (AREA)
  • Lubricants (AREA)
DE69109901T 1990-03-05 1991-03-01 Vakuum-Kugellager und Turbomolekularpumpe, ausgerüstet mit einem solchen Lager. Expired - Fee Related DE69109901T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2054497A JP2913061B2 (ja) 1990-03-05 1990-03-05 真空用玉軸受およびそれを用いたターボ分子ポンプ

Publications (2)

Publication Number Publication Date
DE69109901D1 true DE69109901D1 (de) 1995-06-29
DE69109901T2 DE69109901T2 (de) 1996-02-22

Family

ID=12972273

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69109901T Expired - Fee Related DE69109901T2 (de) 1990-03-05 1991-03-01 Vakuum-Kugellager und Turbomolekularpumpe, ausgerüstet mit einem solchen Lager.

Country Status (4)

Country Link
US (1) US5139396A (de)
EP (1) EP0446723B1 (de)
JP (1) JP2913061B2 (de)
DE (1) DE69109901T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5368390A (en) * 1993-03-01 1994-11-29 General Signal Corporation Mixer systems
DE19729450C2 (de) * 1997-07-10 1999-12-09 Fag Aircraft Gmbh Wälzlager, insbesondere Notlager für magnetisch gelagerte Vakuumpumpen
US6135641A (en) * 1997-10-30 2000-10-24 Honeywell International Inc. Hybrid duplex bearing assembly having thermal compensation
US6318899B1 (en) 1998-12-14 2001-11-20 Ceramic Engineering Consulting, Inc. Non-lubricated rolling element ball bearing
DE29904410U1 (de) * 1999-03-10 2000-07-20 Ghh Rand Schraubenkompressoren Schraubenkompressor
DE19955517A1 (de) * 1999-11-18 2001-05-23 Leybold Vakuum Gmbh Schnelllaufende Turbopumpe
NL1019860C2 (nl) * 2002-01-30 2003-08-05 Skf Ab Wentellager met een keramisch wentelelement en stalen binnen- of buitenring.
GB0309830D0 (en) * 2003-04-29 2003-06-04 Boc Group Plc A vacuum pump
JP4897330B2 (ja) * 2006-03-30 2012-03-14 Ｊｘ日鉱日石エネルギー株式会社 グリース組成物
DE102006019982A1 (de) * 2006-04-29 2007-10-31 Schaeffler Kg Wälzlager-Drehverbindung
DE102007033905A1 (de) 2007-07-20 2009-01-22 Schaeffler Kg Vollkugeliges Schrägkugellager
US8529136B2 (en) * 2009-03-30 2013-09-10 Wafertech, Llc High temperature ball bearing
DE102011119907A1 (de) * 2011-12-01 2013-06-06 Pfeiffer Vacuum Gmbh Wälzlager für eine Vakuumpumpe
CN102937137B (zh) * 2012-11-20 2015-01-14 浙江大学 压电发电滚动轴承单元
JP2014134168A (ja) * 2013-01-11 2014-07-24 Shimadzu Corp 真空ポンプ
JP6476377B2 (ja) * 2013-12-01 2019-03-06 株式会社 空スペース 転がり装置、及びその使用方法
CN114576181B (zh) * 2022-05-05 2022-07-05 成都高真科技有限公司 一种高真空涡轮分子泵

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4183592A (en) * 1977-05-13 1980-01-15 Hisao Hasunuma Sealed rolling bearing
DE2853742A1 (de) * 1978-12-13 1980-10-02 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe
FR2446934A1 (fr) * 1979-01-19 1980-08-14 Cit Alcatel Pompe rotative a vide eleve
US4486319A (en) * 1982-09-27 1984-12-04 Armco, Inc. Microporous ionomer polymer lubricating composition
JPH0726358B2 (ja) * 1986-01-31 1995-03-22 ア−ス製薬株式会社 水解性不織布
JPS63317977A (ja) * 1987-06-22 1988-12-26 Shinano Totsuki Kk 磁気ディスク用モ−タの防塵シ−ル構造
JP2681182B2 (ja) * 1987-12-15 1997-11-26 光洋精工株式会社 玉軸受
JPH01275914A (ja) * 1988-04-28 1989-11-06 Ulvac Corp 真空中駆動機構
JPH01285696A (ja) * 1988-05-10 1989-11-16 Mitsubishi Electric Corp ターボ分子ポンプ
US4966552A (en) * 1989-05-08 1990-10-30 Den-Tal-Ez, Inc. Sterilizable non-lubricated rotary instrument for dental and medical use
US4957417A (en) * 1989-07-14 1990-09-18 Kabushiki Kaisha Kobe Seiko Sho Vertical oilless screw vacuum pump
DE3926577A1 (de) * 1989-08-11 1991-02-14 Leybold Ag Vakuumpumpe mit einem rotor und mit unter vakuum betriebenen rotorlagerungen

Also Published As

Publication number Publication date
DE69109901T2 (de) 1996-02-22
JPH03255215A (ja) 1991-11-14
EP0446723A1 (de) 1991-09-18
JP2913061B2 (ja) 1999-06-28
EP0446723B1 (de) 1995-05-24
US5139396A (en) 1992-08-18

Similar Documents

Publication Publication Date Title
DE69109901T2 (de) Vakuum-Kugellager und Turbomolekularpumpe, ausgerüstet mit einem solchen Lager.
DE68919168T2 (de) Kreiselpumpe mit magnetischem Lager.
DE492162T1 (de) Irrigationssaugkanuele.
FI894271A0 (fi) Turbomolekular vakuumpump.
DE69226870D1 (de) Karte mit 1,8" winchester-laufwerk
DE3782230T2 (de) Geschoss mit verringertem bodensog.
DE69018470D1 (de) Gebläse mit grosser förderleistung.
DE68924072T2 (de) Saugnapfzusammenbau.
DE69310993D1 (de) Turbomolekularvakuumpumpen
DE68900798D1 (de) Luftpumpe.
DE59100757D1 (de) Zweistufige Kryopumpe.
DE68903355T2 (de) Vakuumpumpen.
DE69104193D1 (de) Kugelventil.
DE69112160T2 (de) Mehrstufige Vakuumpumpe.
DE69105845D1 (de) Staubsaugergebläse mit Laufrad.
DE69103588T2 (de) Kugeldrehantrieb.
DE3780874D1 (de) Rotierender zerstaeuber mit luftlager.
DE69112176D1 (de) Drehzahlmessaufnehmer und Wälzlager, ausgerüstet mit einem solchen Aufnehmer.
DE3850633D1 (de) Bilderzeugungsgerät mit Luftsauger.
DE69204142T2 (de) Winkelig vorgespanntes, selbsteinstellendes Lager.
DE3860337D1 (de) Kugellager mit trennrollen.
IT8323405A0 (it) Supporto o cuscinetto a sfere a scorrimento lineare e produzione dello stesso e tavola a scorrimento lineare utilizzante questo supporto a sfere.
ITGE910086A1 (it) Sistema di aspirazione portatile.
FR2674917B1 (fr) Roulement a billes lineaire a collerette.
DE69103729D1 (de) Wälzlager mit Messaufnehmer.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee