DE69109320T2 - Zusammengehöriges Paar von Sensor- und Verstärkerschaltkreis. - Google Patents

Zusammengehöriges Paar von Sensor- und Verstärkerschaltkreis.

Info

Publication number
DE69109320T2
DE69109320T2 DE69109320T DE69109320T DE69109320T2 DE 69109320 T2 DE69109320 T2 DE 69109320T2 DE 69109320 T DE69109320 T DE 69109320T DE 69109320 T DE69109320 T DE 69109320T DE 69109320 T2 DE69109320 T2 DE 69109320T2
Authority
DE
Germany
Prior art keywords
sensor
amplifier circuit
associated pair
pair
amplifier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69109320T
Other languages
English (en)
Other versions
DE69109320D1 (de
Inventor
Ira E Baskett
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Application granted granted Critical
Publication of DE69109320D1 publication Critical patent/DE69109320D1/de
Publication of DE69109320T2 publication Critical patent/DE69109320T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2268—Arrangements for correcting or for compensating unwanted effects
    • G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49103—Strain gauge making

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Pressure Sensors (AREA)
  • Amplifiers (AREA)
  • Measurement Of Force In General (AREA)
DE69109320T 1990-02-05 1991-02-01 Zusammengehöriges Paar von Sensor- und Verstärkerschaltkreis. Expired - Fee Related DE69109320T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/474,882 US5031461A (en) 1990-02-05 1990-02-05 Matched pair of sensor and amplifier circuits

Publications (2)

Publication Number Publication Date
DE69109320D1 DE69109320D1 (de) 1995-06-08
DE69109320T2 true DE69109320T2 (de) 1995-12-07

Family

ID=23885331

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69109320T Expired - Fee Related DE69109320T2 (de) 1990-02-05 1991-02-01 Zusammengehöriges Paar von Sensor- und Verstärkerschaltkreis.

Country Status (4)

Country Link
US (1) US5031461A (de)
EP (1) EP0441549B1 (de)
JP (1) JPH04213020A (de)
DE (1) DE69109320T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NO954729L (no) * 1995-01-03 1996-07-04 Motorola Inc Fölerkrets og framgangsmåte for kompensasjon
US5759870A (en) * 1995-08-28 1998-06-02 Bei Electronics, Inc. Method of making a surface micro-machined silicon pressure sensor
US6581468B2 (en) 2001-03-22 2003-06-24 Kavlico Corporation Independent-excitation cross-coupled differential-pressure transducer
AT413921B (de) 2002-10-01 2006-07-15 Akg Acoustics Gmbh Mikrofone mit untereinander gleicher empfindlichkeit und verfahren zur herstellung derselben
US20050267664A1 (en) * 2004-05-14 2005-12-01 Jiyuan Ouyang Method for adjusting a control signal of an electronic sensor

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3368179A (en) * 1966-03-30 1968-02-06 Gen Electric Temperature compensated semiconductor strain gage
US4355537A (en) * 1980-11-06 1982-10-26 Combustion Engineering, Inc. Temperature compensation for transducer components
JPS59117271A (ja) * 1982-12-24 1984-07-06 Hitachi Ltd 圧力感知素子を有する半導体装置とその製造法
US4777826A (en) * 1985-06-20 1988-10-18 Rosemount Inc. Twin film strain gauge system
IT1183962B (it) * 1985-09-17 1987-10-22 Marelli Autronica Circuiti di interfaccia fra un sensore in particolare un sensore di pressione del tipo a film spesso ed uno strumento indicatore elettrodinamico e sensore incorporante tale circuito particolarmente per l'impiego a bordo di autoveicoli
JPH0797010B2 (ja) * 1986-03-26 1995-10-18 株式会社日立製作所 半導体歪ゲ−ジブリツジ回路
DE3736904A1 (de) * 1987-10-30 1989-05-11 Nord Micro Elektronik Feinmech Messeinrichtung mit sensorelementen
US4864463A (en) * 1988-04-19 1989-09-05 Allied-Signal Inc. Capacitive pressure sensor

Also Published As

Publication number Publication date
DE69109320D1 (de) 1995-06-08
JPH04213020A (ja) 1992-08-04
US5031461A (en) 1991-07-16
EP0441549A1 (de) 1991-08-14
EP0441549B1 (de) 1995-05-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee