DE69107162T2 - Elektronenquelle mit teilchenhaltender Anordnung. - Google Patents

Elektronenquelle mit teilchenhaltender Anordnung.

Info

Publication number
DE69107162T2
DE69107162T2 DE69107162T DE69107162T DE69107162T2 DE 69107162 T2 DE69107162 T2 DE 69107162T2 DE 69107162 T DE69107162 T DE 69107162T DE 69107162 T DE69107162 T DE 69107162T DE 69107162 T2 DE69107162 T2 DE 69107162T2
Authority
DE
Germany
Prior art keywords
particle
electron source
holding arrangement
holding
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69107162T
Other languages
English (en)
Other versions
DE69107162D1 (de
Inventor
Henri Bernardet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronics NV filed Critical Philips Electronics NV
Publication of DE69107162D1 publication Critical patent/DE69107162D1/de
Application granted granted Critical
Publication of DE69107162T2 publication Critical patent/DE69107162T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/025—Electron guns using a discharge in a gas or a vapour as electron source
DE69107162T 1990-10-12 1991-10-03 Elektronenquelle mit teilchenhaltender Anordnung. Expired - Fee Related DE69107162T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9012613A FR2667980A1 (fr) 1990-10-12 1990-10-12 Source d'electrons presentant un dispositif de retention de matieres.

Publications (2)

Publication Number Publication Date
DE69107162D1 DE69107162D1 (de) 1995-03-16
DE69107162T2 true DE69107162T2 (de) 1995-08-31

Family

ID=9401171

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69107162T Expired - Fee Related DE69107162T2 (de) 1990-10-12 1991-10-03 Elektronenquelle mit teilchenhaltender Anordnung.

Country Status (5)

Country Link
US (1) US5256931A (de)
EP (1) EP0480518B1 (de)
JP (1) JPH04274149A (de)
DE (1) DE69107162T2 (de)
FR (1) FR2667980A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19621874C2 (de) * 1996-05-31 2000-10-12 Karlsruhe Forschzent Quelle zur Erzeugung von großflächigen, gepulsten Ionen- und Elektronenstrahlen
US8617351B2 (en) 2002-07-09 2013-12-31 Applied Materials, Inc. Plasma reactor with minimal D.C. coils for cusp, solenoid and mirror fields for plasma uniformity and device damage reduction
US7220937B2 (en) * 2000-03-17 2007-05-22 Applied Materials, Inc. Plasma reactor with overhead RF source power electrode with low loss, low arcing tendency and low contamination
US7141757B2 (en) * 2000-03-17 2006-11-28 Applied Materials, Inc. Plasma reactor with overhead RF source power electrode having a resonance that is virtually pressure independent
US7196283B2 (en) 2000-03-17 2007-03-27 Applied Materials, Inc. Plasma reactor overhead source power electrode with low arcing tendency, cylindrical gas outlets and shaped surface
US8048806B2 (en) 2000-03-17 2011-11-01 Applied Materials, Inc. Methods to avoid unstable plasma states during a process transition
US6894245B2 (en) * 2000-03-17 2005-05-17 Applied Materials, Inc. Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression
US6586886B1 (en) 2001-12-19 2003-07-01 Applied Materials, Inc. Gas distribution plate electrode for a plasma reactor
TWI283899B (en) 2002-07-09 2007-07-11 Applied Materials Inc Capacitively coupled plasma reactor with magnetic plasma control
US7247218B2 (en) 2003-05-16 2007-07-24 Applied Materials, Inc. Plasma density, energy and etch rate measurements at bias power input and real time feedback control of plasma source and bias power
US7452824B2 (en) 2003-05-16 2008-11-18 Applied Materials, Inc. Method of characterizing a chamber based upon concurrent behavior of selected plasma parameters as a function of plural chamber parameters
US7901952B2 (en) 2003-05-16 2011-03-08 Applied Materials, Inc. Plasma reactor control by translating desired values of M plasma parameters to values of N chamber parameters
US7470626B2 (en) 2003-05-16 2008-12-30 Applied Materials, Inc. Method of characterizing a chamber based upon concurrent behavior of selected plasma parameters as a function of source power, bias power and chamber pressure
US7795153B2 (en) 2003-05-16 2010-09-14 Applied Materials, Inc. Method of controlling a chamber based upon predetermined concurrent behavior of selected plasma parameters as a function of selected chamber parameters
US7910013B2 (en) 2003-05-16 2011-03-22 Applied Materials, Inc. Method of controlling a chamber based upon predetermined concurrent behavior of selected plasma parameters as a function of source power, bias power and chamber pressure
US7359177B2 (en) * 2005-05-10 2008-04-15 Applied Materials, Inc. Dual bias frequency plasma reactor with feedback control of E.S.C. voltage using wafer voltage measurement at the bias supply output
US8513619B1 (en) 2012-05-10 2013-08-20 Kla-Tencor Corporation Non-planar extractor structure for electron source

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2926393C2 (de) * 1979-06-29 1982-10-07 Siemens AG, 1000 Berlin und 8000 München Gasentladungsanzeigevorrichtung
US4507588A (en) * 1983-02-28 1985-03-26 Board Of Trustees Operating Michigan State University Ion generating apparatus and method for the use thereof
FR2613897B1 (fr) * 1987-04-10 1990-11-09 Realisations Nucleaires Et Dispositif de suppression des micro-projections dans une source d'ions a arc sous vide
FR2616587B1 (fr) * 1987-06-12 1989-11-24 Realisations Nucleaires Et Source d'ions a quatre electrodes
US5107170A (en) * 1988-10-18 1992-04-21 Nissin Electric Co., Ltd. Ion source having auxillary ion chamber

Also Published As

Publication number Publication date
DE69107162D1 (de) 1995-03-16
EP0480518B1 (de) 1995-02-01
JPH04274149A (ja) 1992-09-30
FR2667980A1 (fr) 1992-04-17
EP0480518A1 (de) 1992-04-15
US5256931A (en) 1993-10-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee