DE69106537T2 - Elektrochemische Reparatur bei Hochfrequenz von offenen Stromkreisen. - Google Patents

Elektrochemische Reparatur bei Hochfrequenz von offenen Stromkreisen.

Info

Publication number
DE69106537T2
DE69106537T2 DE69106537T DE69106537T DE69106537T2 DE 69106537 T2 DE69106537 T2 DE 69106537T2 DE 69106537 T DE69106537 T DE 69106537T DE 69106537 T DE69106537 T DE 69106537T DE 69106537 T2 DE69106537 T2 DE 69106537T2
Authority
DE
Germany
Prior art keywords
high frequency
open circuits
electrochemical repair
electrochemical
repair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69106537T
Other languages
English (en)
Other versions
DE69106537D1 (de
Inventor
Chengjun Julian Chen
Gutfeld Robert Jacob Von
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE69106537D1 publication Critical patent/DE69106537D1/de
Publication of DE69106537T2 publication Critical patent/DE69106537T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814—Conductive parts
    • H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
    • H01L21/485—Adaptation of interconnections, e.g. engineering charges, repair techniques
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31—Coating with metals
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02—Electroplating of selected surface areas
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/225—Correcting or repairing of printed circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1115—Resistance heating, e.g. by current through the PCB conductors or through a metallic mask
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/17—Post-manufacturing processes
    • H05K2203/173—Adding connections between adjacent pads or conductors, e.g. for modifying or repairing
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
    • H05K3/182—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Electrochemistry (AREA)
  • Power Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Chemically Coating (AREA)
DE69106537T 1990-02-06 1991-01-18 Elektrochemische Reparatur bei Hochfrequenz von offenen Stromkreisen. Expired - Fee Related DE69106537T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/475,636 US4994154A (en) 1990-02-06 1990-02-06 High frequency electrochemical repair of open circuits

Publications (2)

Publication Number Publication Date
DE69106537D1 DE69106537D1 (de) 1995-02-23
DE69106537T2 true DE69106537T2 (de) 1995-07-06

Family

ID=23888458

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69106537T Expired - Fee Related DE69106537T2 (de) 1990-02-06 1991-01-18 Elektrochemische Reparatur bei Hochfrequenz von offenen Stromkreisen.

Country Status (4)

Country Link
US (1) US4994154A (de)
EP (1) EP0441143B1 (de)
JP (1) JPH0732302B2 (de)
DE (1) DE69106537T2 (de)

Families Citing this family (18)

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Publication number Priority date Publication date Assignee Title
US5141602A (en) * 1991-06-18 1992-08-25 International Business Machines Corporation High-productivity method and apparatus for making customized interconnections
US5686207A (en) * 1994-08-08 1997-11-11 Seiko Instruments Inc. Method of forming and repairing a mask for photolithography
US6120669A (en) * 1997-04-16 2000-09-19 Drexel University Bipolar electrochemical connection of materials
US6350363B1 (en) 1997-04-16 2002-02-26 Drexel University Electric field directed construction of diodes using free-standing three-dimensional components
DE19724595A1 (de) * 1997-06-11 1998-12-17 Micronas Semiconductor Holding Verfahren zum Herstellen einer Halbleiteranordnung mit strukturierter Metallisierung
US5972723A (en) * 1997-10-21 1999-10-26 International Business Machines Corporation Enhanced thin film wiring net repair process
US5937269A (en) * 1997-10-29 1999-08-10 International Business Machines Corporation Graphics assisted manufacturing process for thin-film devices
US6455331B2 (en) 1997-10-31 2002-09-24 International Business Machines Corporation Process of top-surface-metallurgy plate-up bonding and rewiring for multilayer devices
US6048741A (en) * 1997-10-31 2000-04-11 International Business Machines Corporation Top-surface-metallurgy plate-up bonding and rewiring for multilayer devices
US6248599B1 (en) 1999-10-13 2001-06-19 International Business Machines Corporation Top-surface-metallurgy plate-up bonding and rewiring for multilayer devices
US6447663B1 (en) * 2000-08-01 2002-09-10 Ut-Battelle, Llc Programmable nanometer-scale electrolytic metal deposition and depletion
US20030048619A1 (en) * 2001-06-15 2003-03-13 Kaler Eric W. Dielectrophoretic assembling of electrically functional microwires
US7034519B2 (en) * 2004-01-08 2006-04-25 International Business Machines Corporation High frequency measurement for current-in-plane-tunneling
WO2013021847A1 (ja) * 2011-08-11 2013-02-14 東京エレクトロン株式会社 半導体装置の製造方法、半導体装置及び配線形成用治具
CN104011890B (zh) * 2012-01-30 2016-08-24 株式会社村田制作所 电子部件的制造方法
JP6507148B2 (ja) * 2014-02-21 2019-04-24 学校法人早稲田大学 自己修復型配線及び伸縮デバイス
US9721856B2 (en) 2015-06-25 2017-08-01 International Business Machines Corporation Implementing resistance defect performance mitigation using test signature directed self heating and increased voltage
CN113207237B (zh) * 2021-03-15 2022-05-17 广东工业大学 一种纳米金属辅助定向电镀及电解的线路成型与修复方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2955959A (en) * 1958-09-22 1960-10-11 Rose Arthur H Du Chemical nickel plating
US3506545A (en) * 1967-02-14 1970-04-14 Ibm Method for plating conductive patterns with high resolution
US3645855A (en) * 1970-08-14 1972-02-29 Ibm Ultrasonic repair plating of microscopic interconnections
US3833375A (en) * 1972-03-09 1974-09-03 Rca Corp Method of repairing an imperfect pattern of metalized portions on a substrate
US3960674A (en) * 1974-12-20 1976-06-01 Western Electric Company, Inc. Method of depositing a metal on a surface comprising an electrically non-conductive ferrite
US4103043A (en) * 1976-02-06 1978-07-25 Ing. C. Olivetti & C., S.P.A. Thermographic printing method
US4239789A (en) * 1979-05-08 1980-12-16 International Business Machines Corporation Maskless method for electroless plating patterns
US4217183A (en) * 1979-05-08 1980-08-12 International Business Machines Corporation Method for locally enhancing electroplating rates
US4259367A (en) * 1979-07-30 1981-03-31 International Business Machines Corporation Fine line repair technique
GB2067845B (en) * 1980-01-23 1984-04-26 Int Computers Ltd Manufacture of printed circuit boards
US4340617A (en) * 1980-05-19 1982-07-20 Massachusetts Institute Of Technology Method and apparatus for depositing a material on a surface
DE3025875A1 (de) * 1980-07-08 1982-02-04 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur reparatur von leiterbahnunterbrechungen
US4349583A (en) * 1981-07-28 1982-09-14 International Business Machines Corporation Laser enhanced maskless method for plating and simultaneous plating and etching of patterns
US4383016A (en) * 1981-09-25 1983-05-10 Ppg Industries, Inc. Method for repairing glass photomasks
US4496900A (en) * 1982-04-30 1985-01-29 International Business Machines Corporation Nonlinearity detection using fault-generated second harmonic
US4615904A (en) * 1982-06-01 1986-10-07 Massachusetts Institute Of Technology Maskless growth of patterned films
US4608117A (en) * 1982-06-01 1986-08-26 Massachusetts Institute Of Technology Maskless growth of patterned films
US4611744A (en) * 1982-06-23 1986-09-16 Refurbished Turbine Components Ltd. Turbine blade repair
US4630355A (en) * 1985-03-08 1986-12-23 Energy Conversion Devices, Inc. Electric circuits having repairable circuit lines and method of making the same
US4704304A (en) * 1986-10-27 1987-11-03 International Business Machines Corporation Method for repair of opens in thin film lines on a substrate
US4919971A (en) * 1988-09-23 1990-04-24 International Business Machines Corporation Self-induced repairing of conductor lines

Also Published As

Publication number Publication date
EP0441143A1 (de) 1991-08-14
DE69106537D1 (de) 1995-02-23
JPH0732302B2 (ja) 1995-04-10
JPH04213890A (ja) 1992-08-04
EP0441143B1 (de) 1995-01-11
US4994154A (en) 1991-02-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee