DE69029206T2 - Verbesserte kapazitive Sonde - Google Patents

Verbesserte kapazitive Sonde

Info

Publication number
DE69029206T2
DE69029206T2 DE69029206T DE69029206T DE69029206T2 DE 69029206 T2 DE69029206 T2 DE 69029206T2 DE 69029206 T DE69029206 T DE 69029206T DE 69029206 T DE69029206 T DE 69029206T DE 69029206 T2 DE69029206 T2 DE 69029206T2
Authority
DE
Germany
Prior art keywords
capacitive probe
improved capacitive
improved
probe
capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69029206T
Other languages
English (en)
Other versions
DE69029206D1 (de
Inventor
Michael Alan Marcus
Ernest Arthur Graff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eastman Kodak Co
Original Assignee
Eastman Kodak Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eastman Kodak Co filed Critical Eastman Kodak Co
Publication of DE69029206D1 publication Critical patent/DE69029206D1/de
Application granted granted Critical
Publication of DE69029206T2 publication Critical patent/DE69029206T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
DE69029206T 1989-09-05 1990-09-04 Verbesserte kapazitive Sonde Expired - Fee Related DE69029206T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/402,285 US5070302A (en) 1989-09-05 1989-09-05 Capacitance probe for measuring a width of a clearance between parts

Publications (2)

Publication Number Publication Date
DE69029206D1 DE69029206D1 (de) 1997-01-02
DE69029206T2 true DE69029206T2 (de) 1997-05-28

Family

ID=23591295

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69014643T Expired - Fee Related DE69014643T2 (de) 1989-09-05 1990-09-04 Kapazitätssonde.
DE69029206T Expired - Fee Related DE69029206T2 (de) 1989-09-05 1990-09-04 Verbesserte kapazitive Sonde

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69014643T Expired - Fee Related DE69014643T2 (de) 1989-09-05 1990-09-04 Kapazitätssonde.

Country Status (5)

Country Link
US (1) US5070302A (de)
EP (3) EP0599818A3 (de)
JP (1) JPH05500113A (de)
DE (2) DE69014643T2 (de)
WO (1) WO1991003701A2 (de)

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US5281921A (en) * 1990-04-24 1994-01-25 Novak James L Non-contact capacitance based image sensing method and system
DE69114492T2 (de) * 1991-09-05 1996-06-20 Ibm Einheit mit mehreren Spitzen für ein Rastertunnelmikroskop, Verfahren für deren Herstellung und Anwendung derselben in einer Speichereinheit mit direktem Zugriff.
US5237285A (en) * 1991-10-18 1993-08-17 Rosemount Inc. Method and apparatus for capacitance temperature compensation and manufacturability in a dual plate capacitive pressure transmitter
US5546008A (en) * 1994-08-11 1996-08-13 General Electric Co. Inflatable capacitance measuring device
CA2235683C (en) 1997-06-09 2007-02-13 General Electric Company Method and apparatus for in situ field stator bar insulation capacitance mapping
JP3356043B2 (ja) * 1997-12-26 2002-12-09 三菱電機株式会社 レーザ加工装置用距離検出器
US6181142B1 (en) * 1998-07-21 2001-01-30 Ade Corporation Nonlinear current mirror for loop-gain control
US6261927B1 (en) * 1999-04-30 2001-07-17 International Business Machines Corporation Method of forming defect-free ceramic structures using thermally depolymerizable surface layer
US6828806B1 (en) * 1999-07-22 2004-12-07 Sumitomo Metal Industries, Ltd. Electrostatic capacitance sensor, electrostatic capacitance sensor component, object mounting body and object mounting apparatus
US6400387B1 (en) * 2000-08-23 2002-06-04 Eastman Kodak Company Lathe bed scanning engine with adjustable bearing rods mounted therein
US6552667B1 (en) * 2000-11-16 2003-04-22 Hydro-Quebec Non-contact measuring method and apparatus for producing a signal representative of a distance between facing surfaces
US6677975B1 (en) 2002-06-19 2004-01-13 Eastman Kodak Company System and process for magnetic alignment of an imaging subsystem
US7256588B2 (en) * 2004-04-16 2007-08-14 General Electric Company Capacitive sensor and method for non-contacting gap and dielectric medium measurement
US6989679B2 (en) * 2004-06-03 2006-01-24 General Electric Company Non-contact capacitive sensor and cable with dual layer active shield
US7722310B2 (en) * 2004-12-17 2010-05-25 General Electric Company System and method for measuring clearance between two objects
US7333913B2 (en) * 2005-06-27 2008-02-19 General Electric Company Clearance measurement system and method of operation
US7466143B2 (en) * 2005-09-16 2008-12-16 General Electric Company Clearance measurement systems and methods of operation
US7652489B2 (en) * 2005-12-06 2010-01-26 General Electric Company Multi-range clearance measurement system and method of operation
US8177474B2 (en) * 2007-06-26 2012-05-15 General Electric Company System and method for turbine engine clearance control with rub detection
US7994800B2 (en) * 2008-03-25 2011-08-09 General Electric Company Systems and methods for online phase calibration
US9037434B2 (en) 2012-01-03 2015-05-19 General Electric Company Method and apparatus for obtaining discrete axial clearance data using radial clearance sensors
US8611035B1 (en) 2012-02-06 2013-12-17 Western Digital (Fremont), Llc Capacitance sensor for determining a distance between a head and a magnetic storage medium
US9042208B1 (en) 2013-03-11 2015-05-26 Western Digital Technologies, Inc. Disk drive measuring fly height by applying a bias voltage to an electrically insulated write component of a head
JP6452140B2 (ja) * 2014-02-19 2019-01-16 本田技研工業株式会社 距離センサ及び計測方法
JP6718622B2 (ja) 2017-05-26 2020-07-08 株式会社京岡 隙間センサおよび隙間測定方法
US10556346B2 (en) 2017-05-30 2020-02-11 International Business Machines Corporation Inspecting clearance size between mechanical parts
US10641595B2 (en) * 2018-04-09 2020-05-05 United Technologies Corporation Low profile triaxial blade tip clearance probe assembly with driven guard

Family Cites Families (29)

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Publication number Priority date Publication date Assignee Title
GB941645A (en) * 1961-03-28 1963-11-13 Dag Schreiber Improvements in or relating to flow measurement devices
US3706980A (en) * 1970-04-27 1972-12-19 Drexelbrook Controls Rf system for measuring the level of materials
US3781672A (en) * 1971-05-10 1973-12-25 Drexelbrook Controls Continuous condition measuring system
DE2158320B2 (de) * 1971-11-24 1980-04-10 Ferdy Dr. Grenoble Mayer (Frankreich) Vorrichtung zur berührungsfreien relativen Abstandsmessung
US3784897A (en) * 1972-02-17 1974-01-08 Landis Tool Co Capacitor transducer
US4064753A (en) * 1974-12-12 1977-12-27 Drexelbrook Controls, Inc. RF admittance measuring method and apparatus for determining the level of a conductive liquid
US4008433A (en) * 1976-01-14 1977-02-15 General Electric Company Capacitance displacement type measuring probe
US4103226A (en) * 1976-09-15 1978-07-25 Westinghouse Electric Corp. Apparatus for gauging the texture of a conducting surface
US4182981A (en) * 1977-12-08 1980-01-08 Westinghouse Electric Corp. Apparatus for gauging the shape of a conducting surface
US4439725A (en) * 1978-10-20 1984-03-27 Ogasawara Hiromi Microdisplacement detector
JPS55114962A (en) * 1979-02-28 1980-09-04 Ricoh Co Ltd Surface potentiometer
DE2948660A1 (de) * 1979-12-04 1981-06-11 Philips Patentverwaltung Gmbh, 2000 Hamburg Influenzsondenanordnung und verfahren zu ihrer herstellung
DE3020411C2 (de) * 1980-05-27 1983-09-22 Hans Ulrich St.Sulpice Waadt Meyer Vorrichtung zum Messen der Verschiebung zweier Körper
JPS5759101A (en) * 1980-09-26 1982-04-09 Hiromi Ogasawara Noncontacting infinitesimal displacement gauge
US4482860A (en) * 1981-12-11 1984-11-13 Extrude Hone Corporation Capacitance measurement probe
GB2131176B (en) * 1982-10-07 1986-02-19 Rolls Royce Method of manufacturing a capacitance distance measuring probe
IT1161033B (it) * 1983-03-24 1987-03-11 Hesa Spa Perfezionamento ai dispositivi sensori in particolare ma non esclusivamente interrati ed operanti in base a variazioni di stato capacitivo in genere per segnalazioni di allarme al passaggio di masse pesanti, e relativi sistemi operanti il dispositivo
US4625176A (en) * 1983-09-13 1986-11-25 International Business Machines Corporation Electrostatic probe
CA1191261A (fr) * 1983-12-14 1985-07-30 Francois Lalonde Appareil de mesure dynamique et sans contact de faibles distances
JPS60228995A (ja) * 1984-04-27 1985-11-14 株式会社日立製作所 原子炉圧力容器用ノズル
DE3433351C1 (de) * 1984-09-11 1986-01-02 MTU Motoren- und Turbinen-Union München GmbH, 8000 München Kapazitives Messsystem zur Messung des Abstandes zwischen zwei relativ zueinander beweglichen Teilen
DE3505615A1 (de) * 1985-02-19 1986-08-21 Philips Patentverwaltung Gmbh, 2000 Hamburg Influenzsondenanordnung mit mehreren influenzsonden
US4935700A (en) * 1985-08-09 1990-06-19 Washington Research Foundation Fringe field capacitive sensor for measuring the size of an opening
US4818945A (en) * 1986-04-22 1989-04-04 Voyager Technologies, Inc. Non contacting volt meter
US4766368A (en) * 1986-09-30 1988-08-23 Cox Harold A Capacitive sensor
DE8706280U1 (de) * 1987-05-01 1987-06-19 Sie Sensorik Industrie-Elektronik Gmbh, 6806 Viernheim, De
US4841224A (en) * 1987-11-10 1989-06-20 Washington Technology Center Gap width probe and method
US4931887A (en) * 1988-02-01 1990-06-05 International Business Machines Corporation Capacitive measurement and control of the fly height of a recording slider
US4924172A (en) * 1988-08-25 1990-05-08 Kaman Instrumentation Corporation Capacitive sensor and electronic circuit for non-contact distance measurement

Also Published As

Publication number Publication date
EP0598707A3 (en) 1994-08-10
EP0598707A2 (de) 1994-05-25
EP0599818A3 (en) 1994-08-10
US5070302A (en) 1991-12-03
EP0490963A1 (de) 1992-06-24
EP0599818A2 (de) 1994-06-01
EP0598707B1 (de) 1996-11-20
WO1991003701A3 (en) 1991-08-22
DE69014643D1 (de) 1995-01-12
EP0490963B1 (de) 1994-11-30
DE69029206D1 (de) 1997-01-02
JPH05500113A (ja) 1993-01-14
WO1991003701A2 (en) 1991-03-21
DE69014643T2 (de) 1995-07-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee