DE69027335D1 - Servo-geführte trägertischeinrichtung - Google Patents

Servo-geführte trägertischeinrichtung

Info

Publication number
DE69027335D1
DE69027335D1 DE69027335T DE69027335T DE69027335D1 DE 69027335 D1 DE69027335 D1 DE 69027335D1 DE 69027335 T DE69027335 T DE 69027335T DE 69027335 T DE69027335 T DE 69027335T DE 69027335 D1 DE69027335 D1 DE 69027335D1
Authority
DE
Germany
Prior art keywords
servo
table device
guided carriage
carriage table
guided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69027335T
Other languages
English (en)
Other versions
DE69027335T2 (de
Inventor
Samuel Doran
Robert Kendall
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE69027335D1 publication Critical patent/DE69027335D1/de
Publication of DE69027335T2 publication Critical patent/DE69027335T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Machine Tool Units (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DE69027335T 1990-04-30 1990-10-12 Servo-geführte trägertischeinrichtung Expired - Fee Related DE69027335T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/516,844 US5140242A (en) 1990-04-30 1990-04-30 Servo guided stage system
PCT/US1990/005877 WO1991017564A1 (en) 1990-04-30 1990-10-12 Servo guided stage system

Publications (2)

Publication Number Publication Date
DE69027335D1 true DE69027335D1 (de) 1996-07-11
DE69027335T2 DE69027335T2 (de) 1996-12-12

Family

ID=24057321

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69027335T Expired - Fee Related DE69027335T2 (de) 1990-04-30 1990-10-12 Servo-geführte trägertischeinrichtung

Country Status (5)

Country Link
US (1) US5140242A (de)
EP (1) EP0527739B1 (de)
JP (1) JPH07106516B2 (de)
DE (1) DE69027335T2 (de)
WO (1) WO1991017564A1 (de)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5180955A (en) * 1990-10-11 1993-01-19 International Business Machines Corporation Positioning apparatus
DE4123323C2 (de) * 1991-07-13 1994-02-10 Andreas Ehlerding Werkzeugträger
US5660381A (en) * 1994-02-07 1997-08-26 Ushiodenki Kabushiki Kaisha Carrier device
US5874820A (en) 1995-04-04 1999-02-23 Nikon Corporation Window frame-guided stage mechanism
US6989647B1 (en) 1994-04-01 2006-01-24 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
US5528118A (en) 1994-04-01 1996-06-18 Nikon Precision, Inc. Guideless stage with isolated reaction stage
US7365513B1 (en) 1994-04-01 2008-04-29 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
US5739654A (en) * 1994-12-19 1998-04-14 International Business Machines Corporation Precision tool control system for a workpiece positioning apparatus
US5548195A (en) * 1994-12-22 1996-08-20 International Business Machines Corporation Compensated servo control stage positioning apparatus
TW318255B (de) 1995-05-30 1997-10-21 Philips Electronics Nv
WO1997038357A1 (en) * 1996-04-11 1997-10-16 Mrs Technology, Inc. Lithography system using dual substrate stages
US5757160A (en) * 1996-12-23 1998-05-26 Svg Lithography Systems, Inc. Moving interferometer wafer stage
US6346710B1 (en) * 1998-08-31 2002-02-12 Olympus Optical Co., Ltd. Stage apparatus including displacement amplifying mechanism
US6324933B1 (en) * 1999-10-06 2001-12-04 Agere Systems Guardian Corp. Planar movable stage mechanism
US6355994B1 (en) 1999-11-05 2002-03-12 Multibeam Systems, Inc. Precision stage
US6466324B1 (en) * 2000-06-30 2002-10-15 International Business Machines Corporation Servo guided stage system with yaw sensor
US6666611B2 (en) 2000-08-18 2003-12-23 Nikon Corporation Three degree of freedom joint
US6814096B2 (en) * 2000-12-15 2004-11-09 Nor-Cal Products, Inc. Pressure controller and method
US20030017446A1 (en) * 2001-07-20 2003-01-23 Ardais Corporation Instruments and methods for creating a tissue microarray
GB2381947B (en) * 2001-11-09 2004-01-07 Leica Microsys Lithography Ltd Electron beam lithography machine
US6840886B2 (en) * 2002-03-29 2005-01-11 Matsushita Electric Industrial Co., Ltd. Method and apparatus for a low cost, high speed, and compact nanometer precision motion stage using friction drive and flexure hinge
DE10236239B4 (de) * 2002-08-07 2012-05-16 Vistec Semiconductor Systems Gmbh Koordinaten-Messtisch
US7499767B2 (en) * 2003-02-20 2009-03-03 Applied Materials, Inc. Methods and apparatus for positioning a substrate relative to a support stage
US7151981B2 (en) * 2003-02-20 2006-12-19 Applied Materials, Inc. Methods and apparatus for positioning a substrate relative to a support stage
US7221463B2 (en) * 2003-03-14 2007-05-22 Canon Kabushiki Kaisha Positioning apparatus, exposure apparatus, and method for producing device
US7665946B2 (en) * 2003-11-04 2010-02-23 Advanced Display Process Engineering Co., Ltd. Transfer chamber for flat display device manufacturing apparatus
DE10359273A1 (de) * 2003-12-17 2005-07-21 Erich Thallner Justiervorrichtung
US7239107B1 (en) * 2006-02-24 2007-07-03 The Board Of Trustees Of The University Of Illinois Flexure stage
JP4884050B2 (ja) * 2006-03-30 2012-02-22 富士フイルム株式会社 駆動装置
GB2443644B (en) * 2006-11-09 2010-01-20 Vistec Lithography Ltd Component mounting in movement sensitive equipment
US7898204B2 (en) * 2007-01-05 2011-03-01 Active Precision, Inc. High-speed substrate manipulator
WO2008151107A2 (en) * 2007-06-01 2008-12-11 Massachusetts Institute Of Technology High-resolution flexural stage for in-plane position and out-of-plane pitch/roll alignment
US7579721B2 (en) * 2007-07-13 2009-08-25 Hiwin Mikrosystem Corp. Chain support structure for a planar motor
US8310128B2 (en) * 2008-05-07 2012-11-13 The Board Of Trustees Of The University Of Illinois High precision silicon-on-insulator MEMS parallel kinematic stages
US8051699B2 (en) * 2008-11-14 2011-11-08 Linares Medical Devices, Llc Abrasive wear testing machine with cycle programmability and variable force application
DE102008058306B4 (de) 2008-11-17 2012-03-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Aerostatisch geführtes Tischsystem für die Vakuumanwendung
US8467126B2 (en) 2010-05-27 2013-06-18 Valley Precision, Inc. Stage driver for movable stages
US8575791B2 (en) * 2010-12-17 2013-11-05 National Formosa University Manufacturing-process equipment
JP2013157369A (ja) * 2012-01-27 2013-08-15 Dainippon Screen Mfg Co Ltd ステージ移動装置
EP3164882B1 (de) 2014-07-03 2020-02-26 Newport Corporation Mehrachsige positionierungsvorrichtung
US9703086B1 (en) * 2015-12-30 2017-07-11 Orangetek Corporation Beam splitter
DE202022106067U1 (de) 2022-10-28 2024-02-05 IDEEMA GmbH Positioniertisch zum Positionieren eines Objekts
DE102022128608A1 (de) 2022-10-28 2024-05-08 IDEEMA GmbH Positioniertisch und Verfahren zum Positionieren eines Objekts

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3466514A (en) * 1967-06-26 1969-09-09 Ibm Method and apparatus for positioning objects in preselected orientations
FR1587573A (de) * 1968-10-25 1970-03-20
US3786332A (en) * 1969-03-19 1974-01-15 Thomson Houston Comp Francaise Micro positioning apparatus
US3889164A (en) * 1973-01-24 1975-06-10 Handotai Kenkyu Shinkokai Position control system using magnetic forces for correcting the inclination of a controlled member including a torsional mounting
US4019109A (en) * 1974-05-13 1977-04-19 Hughes Aircraft Company Alignment system and method with micromovement stage
JPS51123565A (en) * 1975-04-21 1976-10-28 Nippon Telegr & Teleph Corp <Ntt> Three-dimention-position differential adjustment of processing article
US4203064A (en) * 1977-04-05 1980-05-13 Tokyo Shibaura Electric Co., Ltd. Method for automatically controlling the position of small objects
US4191916A (en) * 1977-11-23 1980-03-04 Fujitsu Limited Table positioning system including optical reference position measuring transducer
US4187051A (en) * 1978-05-26 1980-02-05 Jerry Kirsch Rotary video article centering, orienting and transfer device for computerized electronic operating systems
CH633740A5 (fr) * 1980-01-25 1982-12-31 Charmilles Sa Ateliers Machine-outil comprenant une table mobile.
US4528490A (en) * 1982-08-11 1985-07-09 Hughes Aircraft Company Two axis drive for stage
JPS6012550A (ja) * 1983-07-04 1985-01-22 Nippon Kogaku Kk <Nikon> 露光転写装置用マスク供給装置
US4654571A (en) * 1985-09-16 1987-03-31 Hinds Walter E Single plane orthogonally movable drive system
US4742286A (en) * 1985-10-29 1988-05-03 Micro-Stage, Inc. Gas bearing X-Y-θ stage assembly
NL8601095A (nl) * 1986-04-29 1987-11-16 Philips Nv Positioneerinrichting.
US4812725A (en) * 1987-10-16 1989-03-14 Anwar Chitayat Positioning device with dual linear motor
US4972574A (en) * 1988-06-08 1990-11-27 Mamiya Denshi Co., Ltd. Table driving apparatus
US4883357A (en) 1989-03-01 1989-11-28 Zygo Corporation Dual high stability interferometer

Also Published As

Publication number Publication date
US5140242A (en) 1992-08-18
WO1991017564A1 (en) 1991-11-14
EP0527739B1 (de) 1996-06-05
EP0527739A1 (de) 1993-02-24
DE69027335T2 (de) 1996-12-12
JPH05504731A (ja) 1993-07-22
JPH07106516B2 (ja) 1995-11-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee