FR1587573A - - Google Patents
Info
- Publication number
- FR1587573A FR1587573A FR1587573DA FR1587573A FR 1587573 A FR1587573 A FR 1587573A FR 1587573D A FR1587573D A FR 1587573DA FR 1587573 A FR1587573 A FR 1587573A
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
- G05D3/20—Control of position or direction using feedback using a digital comparing device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Automation & Control Theory (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR171342 | 1968-10-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1587573A true FR1587573A (de) | 1970-03-20 |
Family
ID=8656116
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1587573D Expired FR1587573A (de) | 1968-10-25 | 1968-10-25 |
Country Status (4)
Country | Link |
---|---|
DE (1) | DE1953712C3 (de) |
FR (1) | FR1587573A (de) |
GB (1) | GB1275577A (de) |
SE (1) | SE362987B (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1991017564A1 (en) * | 1990-04-30 | 1991-11-14 | International Business Machines Corporation | Servo guided stage system |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL8204450A (nl) * | 1982-11-17 | 1984-06-18 | Philips Nv | Verplaatsingsinrichting, in het bijzonder voor het stralingslithografisch behandelen van een substraat. |
JPS59129633A (ja) * | 1983-01-08 | 1984-07-26 | Canon Inc | ステージ装置 |
JPH07502924A (ja) * | 1992-11-16 | 1995-03-30 | ウインターハルター ガストロノーム ゲーエムベーハ | 食器洗浄機 |
US7298495B2 (en) | 2005-06-23 | 2007-11-20 | Lewis George C | System and method for positioning an object through use of a rotating laser metrology system |
CN107665827B (zh) * | 2016-07-29 | 2020-01-24 | 上海微电子装备(集团)股份有限公司 | 芯片键合装置和方法 |
-
1968
- 1968-10-25 FR FR1587573D patent/FR1587573A/fr not_active Expired
-
1969
- 1969-10-17 GB GB5122669A patent/GB1275577A/en not_active Expired
- 1969-10-23 SE SE1453669A patent/SE362987B/xx unknown
- 1969-10-24 DE DE19691953712 patent/DE1953712C3/de not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1991017564A1 (en) * | 1990-04-30 | 1991-11-14 | International Business Machines Corporation | Servo guided stage system |
Also Published As
Publication number | Publication date |
---|---|
GB1275577A (en) | 1972-05-24 |
DE1953712B2 (de) | 1979-09-06 |
DE1953712C3 (de) | 1980-06-26 |
DE1953712A1 (de) | 1970-06-18 |
SE362987B (de) | 1973-12-27 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |