DE69024825D1 - Modulierende Absperrvorrichtung - Google Patents

Modulierende Absperrvorrichtung

Info

Publication number
DE69024825D1
DE69024825D1 DE69024825T DE69024825T DE69024825D1 DE 69024825 D1 DE69024825 D1 DE 69024825D1 DE 69024825 T DE69024825 T DE 69024825T DE 69024825 T DE69024825 T DE 69024825T DE 69024825 D1 DE69024825 D1 DE 69024825D1
Authority
DE
Germany
Prior art keywords
modulating shut
modulating
shut
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69024825T
Other languages
English (en)
Other versions
DE69024825T2 (de
Inventor
James H Ewing
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of DE69024825D1 publication Critical patent/DE69024825D1/de
Application granted granted Critical
Publication of DE69024825T2 publication Critical patent/DE69024825T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0644—One-way valve
    • F16K31/0655—Lift valves
    • F16K31/0665—Lift valves with valve member being at least partially ball-shaped
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
DE69024825T 1989-02-06 1990-02-01 Modulierende Absperrvorrichtung Expired - Fee Related DE69024825T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US30767689A 1989-02-06 1989-02-06

Publications (2)

Publication Number Publication Date
DE69024825D1 true DE69024825D1 (de) 1996-02-29
DE69024825T2 DE69024825T2 (de) 1996-09-05

Family

ID=23190750

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69024825T Expired - Fee Related DE69024825T2 (de) 1989-02-06 1990-02-01 Modulierende Absperrvorrichtung

Country Status (5)

Country Link
EP (1) EP0382406B1 (de)
JP (1) JP2779248B2 (de)
KR (1) KR0167760B1 (de)
CA (1) CA2009288C (de)
DE (1) DE69024825T2 (de)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1906625B2 (de) * 1969-02-11 1971-12-23 Fa C Heinrich Anton, 4100 Duisburg Elektromagnetische schnellschliesseinrichtung fuer ventile insbesondere regelventile mit elektrisch thermohydraulischem antrieb
DE2126977A1 (de) * 1971-05-29 1972-11-30 Leybold-Heraeus GmbH & Co KG, 5000 Köln Schnellschließendes Ventil
JPS50113851A (de) * 1974-02-20 1975-09-06
JPS61229109A (ja) * 1985-04-04 1986-10-13 Asahi Seisakusho:Kk 燃料ガスの圧力調整器

Also Published As

Publication number Publication date
EP0382406B1 (de) 1996-01-17
KR900013234A (ko) 1990-09-05
JPH02266181A (ja) 1990-10-30
KR0167760B1 (ko) 1998-12-01
DE69024825T2 (de) 1996-09-05
JP2779248B2 (ja) 1998-07-23
CA2009288A1 (en) 1990-08-06
EP0382406A2 (de) 1990-08-16
EP0382406A3 (de) 1991-05-02
CA2009288C (en) 1999-06-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee