DE69022621D1 - Integrierter ferro-elektrischer Kondensator. - Google Patents

Integrierter ferro-elektrischer Kondensator.

Info

Publication number
DE69022621D1
DE69022621D1 DE69022621T DE69022621T DE69022621D1 DE 69022621 D1 DE69022621 D1 DE 69022621D1 DE 69022621 T DE69022621 T DE 69022621T DE 69022621 T DE69022621 T DE 69022621T DE 69022621 D1 DE69022621 D1 DE 69022621D1
Authority
DE
Germany
Prior art keywords
ferro
integrated
electric capacitor
capacitor
electric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69022621T
Other languages
English (en)
Other versions
DE69022621T2 (de
Inventor
Alfred P Gnadinger
Richard L Horton
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ramtron International Corp
Original Assignee
Ramtron International Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ramtron International Corp filed Critical Ramtron International Corp
Publication of DE69022621D1 publication Critical patent/DE69022621D1/de
Application granted granted Critical
Publication of DE69022621T2 publication Critical patent/DE69022621T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/22—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B53/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Semiconductor Memories (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Non-Volatile Memory (AREA)
DE69022621T 1989-05-05 1990-02-06 Integrierter ferro-elektrischer Kondensator. Expired - Fee Related DE69022621T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US34782689A 1989-05-05 1989-05-05

Publications (2)

Publication Number Publication Date
DE69022621D1 true DE69022621D1 (de) 1995-11-02
DE69022621T2 DE69022621T2 (de) 1996-05-30

Family

ID=23365438

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69022621T Expired - Fee Related DE69022621T2 (de) 1989-05-05 1990-02-06 Integrierter ferro-elektrischer Kondensator.

Country Status (4)

Country Link
EP (1) EP0396221B1 (de)
JP (1) JP2918284B2 (de)
AU (1) AU622317B2 (de)
DE (1) DE69022621T2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5519234A (en) * 1991-02-25 1996-05-21 Symetrix Corporation Ferroelectric dielectric memory cell can switch at least giga cycles and has low fatigue - has high dielectric constant and low leakage current
JP2573384B2 (ja) * 1990-01-24 1997-01-22 株式会社東芝 半導体記憶装置とその製造方法
EP0490288A3 (en) * 1990-12-11 1992-09-02 Ramtron Corporation Process for fabricating pzt capacitors as integrated circuit memory elements and a capacitor storage element
JPH0575057A (ja) * 1991-07-17 1993-03-26 Sharp Corp 半導体記憶装置
EP0516031A1 (de) * 1991-05-29 1992-12-02 Ramtron International Corporation Ferroelektrische Stapelspeicherzelle und Herstellungsverfahren
US5291436A (en) * 1991-07-25 1994-03-01 Rohm Co., Ltd. Ferroelectric memory with multiple-value storage states
US5189594A (en) * 1991-09-20 1993-02-23 Rohm Co., Ltd. Capacitor in a semiconductor integrated circuit and non-volatile memory using same
JPH0582801A (ja) * 1991-09-20 1993-04-02 Rohm Co Ltd 半導体集積回路のキヤパシタおよびこれを用いた不揮発性メモリ
US5468684A (en) * 1991-12-13 1995-11-21 Symetrix Corporation Integrated circuit with layered superlattice material and method of fabricating same
US5719416A (en) * 1991-12-13 1998-02-17 Symetrix Corporation Integrated circuit with layered superlattice material compound
JP3407204B2 (ja) * 1992-07-23 2003-05-19 オリンパス光学工業株式会社 強誘電体集積回路及びその製造方法
US5439840A (en) * 1993-08-02 1995-08-08 Motorola, Inc. Method of forming a nonvolatile random access memory capacitor cell having a metal-oxide dielectric
DE69426208T2 (de) * 1993-08-05 2001-05-17 Matsushita Electronics Corp Halbleiterbauelement mit Kondensator und dessen Herstellungsverfahren
SG79200A1 (en) * 1995-08-21 2001-03-20 Matsushita Electric Ind Co Ltd Ferroelectric memory devices and method for testing them
JP2001168296A (ja) * 1999-12-14 2001-06-22 Matsushita Electronics Industry Corp 不揮発性記憶装置およびその駆動方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3602887A1 (de) * 1986-01-31 1987-08-06 Bayer Ag Nichtfluechtiger elektronischer speicher
DE3850567T2 (de) * 1988-04-22 1994-11-03 Ramtron Int Corp DRAM-Zelle mit verstärkter Ladung.

Also Published As

Publication number Publication date
EP0396221B1 (de) 1995-09-27
JP2918284B2 (ja) 1999-07-12
AU5457490A (en) 1990-11-08
AU622317B2 (en) 1992-04-02
DE69022621T2 (de) 1996-05-30
EP0396221A2 (de) 1990-11-07
EP0396221A3 (de) 1991-05-08
JPH02304796A (ja) 1990-12-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee