DE69021786T2 - Optisches System zur Spektralanalyse. - Google Patents

Optisches System zur Spektralanalyse.

Info

Publication number
DE69021786T2
DE69021786T2 DE69021786T DE69021786T DE69021786T2 DE 69021786 T2 DE69021786 T2 DE 69021786T2 DE 69021786 T DE69021786 T DE 69021786T DE 69021786 T DE69021786 T DE 69021786T DE 69021786 T2 DE69021786 T2 DE 69021786T2
Authority
DE
Germany
Prior art keywords
spectrograph
dispersive element
collimator
classical
spectral analysis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69021786T
Other languages
English (en)
Other versions
DE69021786D1 (de
Inventor
Andre Baranne
Francis Pilloud
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fisons Ltd
Original Assignee
Fisons Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB898913897A external-priority patent/GB8913897D0/en
Priority claimed from FR8916347A external-priority patent/FR2655731A1/fr
Application filed by Fisons Ltd filed Critical Fisons Ltd
Publication of DE69021786D1 publication Critical patent/DE69021786D1/de
Application granted granted Critical
Publication of DE69021786T2 publication Critical patent/DE69021786T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1809—Echelle gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1278—Mask with spectral selection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J2003/1814—Double monochromator
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1804—Plane gratings

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Microscoopes, Condenser (AREA)
DE69021786T 1989-06-16 1990-06-12 Optisches System zur Spektralanalyse. Expired - Fee Related DE69021786T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB898913897A GB8913897D0 (en) 1989-06-16 1989-06-16 Optical apparatus
FR8916347A FR2655731A1 (fr) 1989-12-11 1989-12-11 Dispositif optique pour spectrographes, spectrometres ou colorimetres.

Publications (2)

Publication Number Publication Date
DE69021786D1 DE69021786D1 (de) 1995-09-28
DE69021786T2 true DE69021786T2 (de) 1996-01-11

Family

ID=26227720

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69021786T Expired - Fee Related DE69021786T2 (de) 1989-06-16 1990-06-12 Optisches System zur Spektralanalyse.

Country Status (5)

Country Link
US (1) US5285255A (de)
EP (1) EP0403228B1 (de)
JP (1) JPH0326926A (de)
AT (1) ATE126883T1 (de)
DE (1) DE69021786T2 (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD292078A5 (de) * 1990-02-15 1991-07-18 ���k���������������@����@�����@���@�������������k�� Fchelle-polychromator
JPH0563909A (ja) * 1991-08-28 1993-03-12 Canon Inc カラー画像読取装置
FR2687471B1 (fr) * 1992-02-18 1994-07-01 Centre Nat Rech Scient Dispositif de spectrographie.
US5608521A (en) * 1995-09-18 1997-03-04 Trw Inc. Polarization compensated imaging spectrometer
US5889588A (en) * 1996-09-24 1999-03-30 Photon Technology International Random wavelength access monochromator incorporating coaxial off-axis parabolic OAP reflectors
US6061129A (en) * 1999-01-22 2000-05-09 Cymer, Inc. Compact high resolution grating spectrometer
US6320663B1 (en) 1999-01-22 2001-11-20 Cymer, Inc. Method and device for spectral measurements of laser beam
US6359693B2 (en) 1999-02-04 2002-03-19 Cymer, Inc. Double pass double etalon spectrometer
JP2001108523A (ja) * 1999-10-14 2001-04-20 Matsushita Electric Ind Co Ltd 分光測定装置
US6480275B2 (en) * 2001-01-29 2002-11-12 Cymer, Inc. High resolution etalon-grating monochromator
EP1303788A4 (de) 2000-05-09 2006-05-31 Jon Oshima Gemultiplexte spielfilmkamera
DE60021556T2 (de) * 2000-06-05 2006-05-24 Galileo Avionica- S.P.A., Campi Bisenzio Spektrometer mit doppeltem ausseraxialen Schmidt-Teleskop
US6597452B1 (en) * 2000-11-17 2003-07-22 Jobin Yvon, Inc. Compact littrow-type scanning spectrometer
US6538737B2 (en) * 2001-01-29 2003-03-25 Cymer, Inc. High resolution etalon-grating spectrometer
JP3883816B2 (ja) * 2001-03-02 2007-02-21 富士通株式会社 波長分散及び波長分散スロープを可変出来る装置
EP1260802B1 (de) 2001-05-25 2008-10-29 Galileo Avionica S.p.A. Breitband-Spektrometer mit einem einen asphärischen Korrekturspiegel aufweisenden Objektiv
US6952260B2 (en) * 2001-09-07 2005-10-04 Jian Ming Xiao Double grating three dimensional spectrograph
US7265827B2 (en) * 2001-09-07 2007-09-04 Horiba Jobin Yvon, Inc. Double grating three dimensional spectrograph with multi-directional diffraction
DE10205142B4 (de) * 2002-02-07 2004-01-15 Gesellschaft zur Förderung angewandter Optik, Optoelektronik, Quantenelektronik und Spektroskopie e.V. Anordnung und Verfahren zur Wellenlängenkalibration bei einem Echelle-Spektrometer
US6993057B2 (en) * 2002-11-26 2006-01-31 Intel Corporation Coarse spectrometer with a grating
CN100478657C (zh) * 2005-03-18 2009-04-15 中国科学院上海技术物理研究所 推帚式光谱成像仪的宽视场及高分辨率的成像结构
US20060262304A1 (en) * 2005-04-22 2006-11-23 Keith Carron Apparatus for automated real-time material identification
US7345760B2 (en) * 2006-01-13 2008-03-18 Thermo Electron Scientific Instruments Llc Grating monochromator/spectrograph
US7773218B2 (en) * 2006-04-17 2010-08-10 Duke University Spatially-registered wavelength coding
CN101231382B (zh) * 2008-02-26 2010-09-01 上海激光等离子体研究所 用于啁啾脉冲放大的光谱调制整形装置
US20090273840A1 (en) * 2008-05-02 2009-11-05 Mclaughlin Sheldon Wavelength dispersing device
DE102009059280A1 (de) * 2009-12-22 2011-06-30 Leibniz-Institut für Analytische Wissenschaften-ISAS-e.V., 44139 Spektrometeranordnung
FR2970075B1 (fr) * 2011-01-03 2013-02-01 Centre Nat Etd Spatiales Spectrometre imageur a grand champ
CN102226716A (zh) * 2011-03-28 2011-10-26 中国科学院长春光学精密机械与物理研究所 一种中阶梯光栅光谱仪的光路结构
CN102539360B (zh) * 2011-12-31 2014-06-25 聚光科技(杭州)股份有限公司 提高光谱探测范围的分光装置及方法
US10718667B1 (en) * 2014-03-14 2020-07-21 Wavefront Research, Inc. Reflective relay spectrometer
US10809124B2 (en) * 2018-05-07 2020-10-20 Perkinelmer Health Sciences, Inc. Spectrometers and instruments including them
US10866139B2 (en) * 2018-08-10 2020-12-15 Perkinelmer Health Sciences, Inc. Spectrometers with retro-reflective surfaces and related instruments

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE26053E (en) * 1966-07-05 Double folded-z-configuration monochromator
GB861639A (en) * 1957-03-19 1961-02-22 Parsons & Co Sir Howard G Improvements in and relating to grating spectrometers
FR1434980A (fr) * 1965-01-08 1966-04-15 Centre Nat Rech Scient Perfectionnements à la spectrographie
US3888590A (en) * 1974-04-10 1975-06-10 John U White Grating monochromator
US4326802A (en) * 1980-02-06 1982-04-27 Instrumentation Laboratory Inc. Dual monochromator type of spectroanalysis system
US4455087A (en) * 1981-04-06 1984-06-19 Hamamatsu Systems Inc. Monochromatic imaging apparatus
DE3224559A1 (de) * 1982-07-01 1984-01-05 Bodenseewerk Perkin-Elmer & Co GmbH, 7770 Überlingen Monochromator

Also Published As

Publication number Publication date
JPH0326926A (ja) 1991-02-05
EP0403228B1 (de) 1995-08-23
EP0403228A1 (de) 1990-12-19
DE69021786D1 (de) 1995-09-28
US5285255A (en) 1994-02-08
ATE126883T1 (de) 1995-09-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee