DE69017879D1 - Vorrichtung zur Herstellung von dünnen Schichten mittels Zerstäubung. - Google Patents

Vorrichtung zur Herstellung von dünnen Schichten mittels Zerstäubung.

Info

Publication number
DE69017879D1
DE69017879D1 DE69017879T DE69017879T DE69017879D1 DE 69017879 D1 DE69017879 D1 DE 69017879D1 DE 69017879 T DE69017879 T DE 69017879T DE 69017879 T DE69017879 T DE 69017879T DE 69017879 D1 DE69017879 D1 DE 69017879D1
Authority
DE
Germany
Prior art keywords
atomization
production
thin layers
layers
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69017879T
Other languages
English (en)
Inventor
Nobuyasu Shiba
Mizuho Imai
Mikio Sekiguchi
Hideyo Iida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyo Yuden Co Ltd
Original Assignee
Taiyo Yuden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiyo Yuden Co Ltd filed Critical Taiyo Yuden Co Ltd
Application granted granted Critical
Publication of DE69017879D1 publication Critical patent/DE69017879D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/25—Oxides by deposition from the liquid phase
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/11—Deposition methods from solutions or suspensions
    • C03C2218/112—Deposition methods from solutions or suspensions by spraying
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemically Coating (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Chemical Vapour Deposition (AREA)
DE69017879T 1990-01-13 1990-12-28 Vorrichtung zur Herstellung von dünnen Schichten mittels Zerstäubung. Expired - Lifetime DE69017879D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005787A JPH07100864B2 (ja) 1990-01-13 1990-01-13 霧化薄膜形成装置

Publications (1)

Publication Number Publication Date
DE69017879D1 true DE69017879D1 (de) 1995-04-20

Family

ID=11620814

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69017879T Expired - Lifetime DE69017879D1 (de) 1990-01-13 1990-12-28 Vorrichtung zur Herstellung von dünnen Schichten mittels Zerstäubung.

Country Status (5)

Country Link
US (1) US5090360A (de)
EP (1) EP0437854B1 (de)
JP (1) JPH07100864B2 (de)
AU (1) AU630845B2 (de)
DE (1) DE69017879D1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5621130B2 (ja) * 2009-11-24 2014-11-05 株式会社陶喜 ミスト噴出用ノズル、それを備えた成膜装置および成膜方法
US9027863B2 (en) 2013-05-01 2015-05-12 Ethen D. WENTZ Bale shredder
US9456553B1 (en) 2015-06-01 2016-10-04 Ethen D. WENTZ Bale flipping apparatus for bale shredder
CN114990522B (zh) * 2022-04-14 2023-08-08 重庆理工大学 一种热分解薄膜制备装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE619110C (de) * 1935-09-24 Fritz Herms Dr Mittels Schlauch an eine Wasser- oder Badeeinrichtung anzuschliessende Handdusche
US121265A (en) * 1871-11-28 Improvement in nozzles
DE1496590C3 (de) * 1964-10-16 1973-10-31 N.V. Philips' Gloeilampenfabrieken, Eindhoven (Niederlande) Verfahren zur Herstellung von warme reflektierenden SnO tief 2 Schichten mit reproduzierbaren optischen und elektrischen Eigenschaften auf Tragern
US3378396A (en) * 1967-03-27 1968-04-16 Zaromb Solomon Conductive oxide-coated articles
DE3417229A1 (de) * 1984-05-10 1985-11-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Zerstaeuberkopf fuer spritzpistolen zum pneumatischen zerstaeuben von fluessigkeiten
JPS6316068A (ja) * 1986-07-09 1988-01-23 Res Dev Corp Of Japan 薄膜形成用噴霧装置
US4843770A (en) * 1987-08-17 1989-07-04 Crane Newell D Supersonic fan nozzle having a wide exit swath

Also Published As

Publication number Publication date
EP0437854B1 (de) 1995-03-15
US5090360A (en) 1992-02-25
JPH07100864B2 (ja) 1995-11-01
EP0437854A1 (de) 1991-07-24
JPH03291382A (ja) 1991-12-20
AU6920391A (en) 1991-07-18
AU630845B2 (en) 1992-11-05

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Legal Events

Date Code Title Description
8332 No legal effect for de