DE69016743D1 - Vibrator. - Google Patents

Vibrator.

Info

Publication number
DE69016743D1
DE69016743D1 DE69016743T DE69016743T DE69016743D1 DE 69016743 D1 DE69016743 D1 DE 69016743D1 DE 69016743 T DE69016743 T DE 69016743T DE 69016743 T DE69016743 T DE 69016743T DE 69016743 D1 DE69016743 D1 DE 69016743D1
Authority
DE
Germany
Prior art keywords
vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69016743T
Other languages
English (en)
Other versions
DE69016743T2 (de
Inventor
Takeshi Nakamura
Katsumi Fujimoto
Jiro Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1290757A external-priority patent/JP2608536B2/ja
Priority claimed from JP2225842A external-priority patent/JP2508382B2/ja
Priority claimed from JP2225844A external-priority patent/JP2508384B2/ja
Priority claimed from JP2225843A external-priority patent/JP2508383B2/ja
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of DE69016743D1 publication Critical patent/DE69016743D1/de
Application granted granted Critical
Publication of DE69016743T2 publication Critical patent/DE69016743T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5663—Manufacturing; Trimming; Mounting; Housings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H1/00—Measuring characteristics of vibrations in solids by using direct conduction to the detector
    • G01H1/10—Measuring characteristics of vibrations in solids by using direct conduction to the detector of torsional vibrations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2027—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having cylindrical or annular shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Mechanical Engineering (AREA)
  • Gyroscopes (AREA)
DE69016743T 1989-11-07 1990-11-05 Vibrator. Expired - Lifetime DE69016743T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP1290757A JP2608536B2 (ja) 1989-11-07 1989-11-07 振動子
JP2225842A JP2508382B2 (ja) 1990-08-27 1990-08-27 角速度センサ
JP2225844A JP2508384B2 (ja) 1990-08-27 1990-08-27 角速度センサ
JP2225843A JP2508383B2 (ja) 1990-08-27 1990-08-27 角速度センサ

Publications (2)

Publication Number Publication Date
DE69016743D1 true DE69016743D1 (de) 1995-03-23
DE69016743T2 DE69016743T2 (de) 1995-06-08

Family

ID=27477194

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69016743T Expired - Lifetime DE69016743T2 (de) 1989-11-07 1990-11-05 Vibrator.

Country Status (3)

Country Link
US (1) US5117148A (de)
EP (1) EP0427177B1 (de)
DE (1) DE69016743T2 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5493166A (en) * 1988-08-12 1996-02-20 Murata Manufacturing Co., Ltd. Vibrator and vibrating gyroscope using the same
US5874674A (en) * 1988-08-12 1999-02-23 Murata Manufacturing Co., Ltd. Vibrator including piezoelectric electrodes or detectors arranged to be non-parallel and non-perpendicular to coriolis force direction and vibratory gyroscope using the same
US5349857A (en) * 1988-08-12 1994-09-27 Murata Manufacturing Co., Ltd. Vibratory gyroscope
EP0517259B1 (de) * 1991-06-07 1996-05-15 Akai Electric Co., Ltd. Schwingungssteuerungsgerät
JP2923813B2 (ja) * 1991-06-11 1999-07-26 キヤノン株式会社 カンチレバー型変位素子、及びこれを用いた走査型トンネル顕微鏡、情報処理装置
JPH0552572A (ja) * 1991-08-28 1993-03-02 Akai Electric Co Ltd 振動子の支持構造
DE69310799T2 (de) * 1992-03-30 1997-11-13 Murata Manufacturing Co Vibrator mit abgeglichenen Kantenbereichen
JP3016986B2 (ja) * 1993-02-17 2000-03-06 三菱電機株式会社 振動ジャイロ用検出回路
DE4314535C2 (de) * 1993-05-03 1997-05-07 Sick Ag Inferferometrisches Gaskomponenten-Meßgerät
DE69411108T2 (de) * 1993-09-24 1999-02-18 Murata Mfg. Co., Ltd., Nagaokakyo, Kyoto Vibratordrehungsmessaufnehmer
JP3175489B2 (ja) * 1994-08-24 2001-06-11 三菱電機株式会社 振動ジャイロおよび振動ジャイロの検査装置
JPH08159779A (ja) 1994-12-02 1996-06-21 Murata Mfg Co Ltd 振動ジャイロ
JP3291968B2 (ja) * 1994-12-15 2002-06-17 株式会社村田製作所 振動ジャイロ
JPH08247770A (ja) * 1995-03-14 1996-09-27 Murata Mfg Co Ltd 振動ジャイロ
JP2996137B2 (ja) * 1995-03-31 1999-12-27 株式会社村田製作所 振動ジャイロ
JPH08278146A (ja) * 1995-04-03 1996-10-22 Murata Mfg Co Ltd 振動ジャイロ
US6085740A (en) * 1996-02-21 2000-07-11 Aerogen, Inc. Liquid dispensing apparatus and methods
JPH09113279A (ja) * 1995-10-16 1997-05-02 Murata Mfg Co Ltd 振動ジャイロ
JP2996157B2 (ja) * 1995-10-12 1999-12-27 株式会社村田製作所 振動ジャイロ
US5698784A (en) * 1996-01-24 1997-12-16 Gyration, Inc. Vibratory rate gyroscope and methods of assembly and operation
WO1998036241A1 (fr) * 1997-02-17 1998-08-20 Mitutoyo Corporation Sonde d'injection de signaux tactiles non directionnels
US6457358B1 (en) * 1999-03-18 2002-10-01 Board Of Regents Of The University Of Nebraska Tubular coriolis force driven piezoelectric gyroscope system, and method of use
US6690351B1 (en) * 2000-04-06 2004-02-10 Xybernaut Corporation Computer display optimizer
GB0121934D0 (en) * 2001-09-12 2001-10-31 Europ Technology For Business Angular rate sensors
JP4631329B2 (ja) * 2004-07-01 2011-02-16 パナソニック株式会社 角速度センサ及びその製造方法
DE102016112101B4 (de) * 2016-07-01 2018-08-02 Physik Instrumente (Pi) Gmbh & Co. Kg Vorrichtung umfassend einen Ultraschallaktor und eine Halterungsvorrichtung, wobei der Ultraschallaktor an der Halterungsvorrichtung angeordnet ist
CN110420827B (zh) * 2019-08-12 2021-07-27 中国科学院微电子研究所 一种超声换能器阵列探头

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2955216A (en) * 1960-10-04 Reinforced hollow piezoelectric ceramic transducer structures
US2944118A (en) * 1960-07-05 Binaural phonograph pickup
US2439499A (en) * 1942-08-20 1948-04-13 Brush Dev Co Piezoelectric motor
US2607216A (en) * 1946-08-16 1952-08-19 Bell Telephone Labor Inc Torsional interferometer
USRE23813E (en) * 1947-12-26 1954-04-20 Piezoelectric transducer and method for producing same
US3168623A (en) * 1954-10-13 1965-02-02 Gulton Ind Inc Piezoelectric transducer
US3117189A (en) * 1958-12-11 1964-01-07 Electro Voice Electromechanical transducer
NL261168A (de) * 1960-03-07
US3258617A (en) * 1963-02-07 1966-06-28 Avco Corp Piezoelectric device
US3559162A (en) * 1969-04-14 1971-01-26 Sparton Corp Unitary directional sonar transducer
GB1381727A (en) * 1971-08-26 1975-01-29 English Electric Co Ltd Devices incorporating cavity resonators
DE2165680A1 (de) * 1971-12-30 1973-07-05 Siemens Ag Piezoelektrischer koerper und verfahren zur polarisation
US3871395A (en) * 1973-02-26 1975-03-18 Fibra Sonics Ultrasonic/chemical cleaner for contact lenses
SU509826A1 (ru) * 1974-04-17 1976-04-05 Предприятие П/Я Р-6303 Ультразвуковой пьезоэлектрическийпреобразователь
US4088907A (en) * 1976-10-29 1978-05-09 Westinghouse Electric Corp. Piezoelectric acoustic emission instrumentation

Also Published As

Publication number Publication date
EP0427177B1 (de) 1995-02-08
EP0427177A2 (de) 1991-05-15
EP0427177A3 (en) 1992-07-22
DE69016743T2 (de) 1995-06-08
US5117148A (en) 1992-05-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: GROSSE, BOCKHORNI, SCHUMACHER, 81476 MUENCHEN

8328 Change in the person/name/address of the agent

Representative=s name: GROSSE, SCHUMACHER, KNAUER, VON HIRSCHHAUSEN, 8033