DE69014505D1 - System zur optischen Inspektion von Bedingungen von Teilen, die auf einem Substrat angebracht sind. - Google Patents

System zur optischen Inspektion von Bedingungen von Teilen, die auf einem Substrat angebracht sind.

Info

Publication number
DE69014505D1
DE69014505D1 DE69014505T DE69014505T DE69014505D1 DE 69014505 D1 DE69014505 D1 DE 69014505D1 DE 69014505 T DE69014505 T DE 69014505T DE 69014505 T DE69014505 T DE 69014505T DE 69014505 D1 DE69014505 D1 DE 69014505D1
Authority
DE
Germany
Prior art keywords
substrate
conditions
parts
optical inspection
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69014505T
Other languages
English (en)
Other versions
DE69014505T2 (de
Inventor
Yuji Maruyama
Yukifumi Tsuda
Kazutoshi Ikegaya
Kunio Sannomiya
Hiroto Toba
Takumi Seto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1236158A external-priority patent/JPH0749930B2/ja
Priority claimed from JP2173449A external-priority patent/JPH0820220B2/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE69014505D1 publication Critical patent/DE69014505D1/de
Application granted granted Critical
Publication of DE69014505T2 publication Critical patent/DE69014505T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/309—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of printed or hybrid circuits or circuit substrates

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
DE69014505T 1989-09-12 1990-09-11 System zur optischen Inspektion von Bedingungen von Teilen, die auf einem Substrat angebracht sind. Expired - Fee Related DE69014505T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1236158A JPH0749930B2 (ja) 1989-09-12 1989-09-12 実装基板検査装置
JP2173449A JPH0820220B2 (ja) 1990-06-29 1990-06-29 実装部品の高さ測定装置

Publications (2)

Publication Number Publication Date
DE69014505D1 true DE69014505D1 (de) 1995-01-12
DE69014505T2 DE69014505T2 (de) 1995-05-04

Family

ID=26495419

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69014505T Expired - Fee Related DE69014505T2 (de) 1989-09-12 1990-09-11 System zur optischen Inspektion von Bedingungen von Teilen, die auf einem Substrat angebracht sind.

Country Status (3)

Country Link
US (1) US5200799A (de)
EP (1) EP0417736B1 (de)
DE (1) DE69014505T2 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5463227A (en) * 1992-06-24 1995-10-31 Robotic Vision Systems, Inc. Method for obtaining three-dimensional data from multiple parts or devices in a multi-pocketed tray
US5600150A (en) * 1992-06-24 1997-02-04 Robotic Vision Systems, Inc. Method for obtaining three-dimensional data from semiconductor devices in a row/column array and control of manufacturing of same with data to eliminate manufacturing errors
US5489985A (en) * 1993-01-21 1996-02-06 Matsushita Electric Industrial Co., Ltd. Apparatus for inspection of packaged printed circuit boards
US5546189A (en) * 1994-05-19 1996-08-13 View Engineering, Inc. Triangulation-based 3D imaging and processing method and system
US5617209A (en) * 1995-04-27 1997-04-01 View Engineering, Inc. Method and system for triangulation-based, 3-D imaging utilizing an angled scaning beam of radiant energy
US5661561A (en) * 1995-06-02 1997-08-26 Accu-Sort Systems, Inc. Dimensioning system
US5793051A (en) * 1995-06-07 1998-08-11 Robotic Vision Systems, Inc. Method for obtaining three-dimensional data from semiconductor devices in a row/column array and control of manufacturing of same with data to eliminate manufacturing errors
US6144452A (en) * 1996-04-23 2000-11-07 Matsushita Electric Industiral Co., Ltd. Electronic component mounting apparatus
US5760893A (en) * 1996-12-24 1998-06-02 Teradyne, Inc. Method and apparatus for inspecting component placement and solder connection in printed circuit board manufacture
US5898492A (en) * 1997-09-25 1999-04-27 International Business Machines Corporation Surface inspection tool using reflected and scattered light
EP1089607B1 (de) * 1998-02-27 2006-11-22 Matsushita Electric Industrial Co., Ltd. Bauteilerkennungsverfahren und -vorrichtung
KR100341637B1 (ko) * 1999-02-05 2002-06-24 뷰 엔지니어링, 아이엔씨. 3각측량을 토대로 한 3차원 화상화와 처리 방법 및 장치
US6441908B1 (en) * 1999-08-06 2002-08-27 Metron Systems, Inc. Profiling of a component having reduced sensitivity to anomalous off-axis reflections
JP2001053496A (ja) * 1999-08-06 2001-02-23 Matsushita Electric Ind Co Ltd 電子部品実装方法
US6496270B1 (en) * 2000-02-17 2002-12-17 Gsi Lumonics, Inc. Method and system for automatically generating reference height data for use in a three-dimensional inspection system
US6603542B1 (en) 2000-06-14 2003-08-05 Qc Optics, Inc. High sensitivity optical inspection system and method for detecting flaws on a diffractive surface
US6654115B2 (en) * 2001-01-18 2003-11-25 Orbotech Ltd. System and method for multi-dimensional optical inspection
GB0905006D0 (en) 2009-03-24 2009-05-06 Rawlinson Paul Testing and mounting IC's on PCB's
US8812149B2 (en) 2011-02-24 2014-08-19 Mss, Inc. Sequential scanning of multiple wavelengths
GB2508564A (en) * 2011-09-13 2014-06-04 Osi Optoelectronics Inc Improved laser rangefinder sensor
TW201348728A (zh) * 2012-05-18 2013-12-01 Weistech Technology Co Ltd 雷射測距裝置之光學訊號傳輸結構
JP6524250B2 (ja) * 2015-10-15 2019-06-05 ヤマハ発動機株式会社 部品実装装置
DE102016122494B4 (de) * 2016-11-22 2018-07-05 Asm Assembly Systems Gmbh & Co. Kg Verfahren zum Überprüfen eines Bestückinhalts von elektronischen Bauelementen mittels eines Vergleichs eines 3D-Höhenprofils mit einem Referenz-Höhenprofil, Bestückautomat sowie Computerprogramm zum Überprüfen eines Bestückinhalts
KR102514685B1 (ko) * 2017-09-28 2023-03-27 유니버셜 인스트루먼츠 코퍼레이션 개선된 리드 팁 조명 디바이스, 시스템 및 방법

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3975102A (en) * 1974-07-29 1976-08-17 Zygo Corporation Scanning photoelectric autocollimator
US4674869A (en) * 1979-04-30 1987-06-23 Diffracto, Ltd. Method and apparatus for electro-optically determining dimension, location and altitude of objects
US4627734A (en) * 1983-06-30 1986-12-09 Canadian Patents And Development Limited Three dimensional imaging method and device
JPS61225606A (ja) * 1985-03-29 1986-10-07 Sumitomo Metal Ind Ltd 物体形状測定装置
US4910690A (en) * 1986-02-14 1990-03-20 Citizen Watch Co., Ltd. Micro-dimensional measurement apparatus
US4796997A (en) * 1986-05-27 1989-01-10 Synthetic Vision Systems, Inc. Method and system for high-speed, 3-D imaging of an object at a vision station
AU598418B2 (en) * 1988-06-04 1990-06-21 Fujitsu Limited Optical system for detecting three-dimensional shape
JPH0762654B2 (ja) * 1988-10-25 1995-07-05 松下電器産業株式会社 実装基板検査装置
US5027418A (en) * 1989-02-13 1991-06-25 Matsushita Electric Industrial Co., Ltd. Electro-optical inspection apparatus for printed-circuit boards with components mounted thereon
US5103105A (en) * 1989-11-02 1992-04-07 Matsushita Electric Industrial Co., Ltd. Apparatus for inspecting solder portion of a circuit board

Also Published As

Publication number Publication date
EP0417736A2 (de) 1991-03-20
DE69014505T2 (de) 1995-05-04
EP0417736B1 (de) 1994-11-30
EP0417736A3 (en) 1991-09-11
US5200799A (en) 1993-04-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee