DE69014283D1 - Verfahren zum mikroskopischen Schleifen und Gerät zum mikroskopischen Schleifen. - Google Patents

Verfahren zum mikroskopischen Schleifen und Gerät zum mikroskopischen Schleifen.

Info

Publication number
DE69014283D1
DE69014283D1 DE69014283T DE69014283T DE69014283D1 DE 69014283 D1 DE69014283 D1 DE 69014283D1 DE 69014283 T DE69014283 T DE 69014283T DE 69014283 T DE69014283 T DE 69014283T DE 69014283 D1 DE69014283 D1 DE 69014283D1
Authority
DE
Germany
Prior art keywords
microscopic
microscopic grinding
grinding apparatus
grinding method
grinding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69014283T
Other languages
English (en)
Other versions
DE69014283T2 (de
Inventor
Shinichi Mizuguchi
Syuji Ueda
Kouji Kato
Noritsugu Umehara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE69014283D1 publication Critical patent/DE69014283D1/de
Application granted granted Critical
Publication of DE69014283T2 publication Critical patent/DE69014283T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B35/00—Machines or devices designed for superfinishing surfaces on work, i.e. by means of abrading blocks reciprocating with high frequency
    • B24B35/005—Machines or devices designed for superfinishing surfaces on work, i.e. by means of abrading blocks reciprocating with high frequency for making three-dimensional objects

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
DE69014283T 1989-12-04 1990-12-04 Verfahren zum mikroskopischen Schleifen und Gerät zum mikroskopischen Schleifen. Expired - Fee Related DE69014283T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31471689A JPH0777704B2 (ja) 1989-12-04 1989-12-04 微小研磨方法

Publications (2)

Publication Number Publication Date
DE69014283D1 true DE69014283D1 (de) 1995-01-05
DE69014283T2 DE69014283T2 (de) 1995-05-18

Family

ID=18056705

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69014283T Expired - Fee Related DE69014283T2 (de) 1989-12-04 1990-12-04 Verfahren zum mikroskopischen Schleifen und Gerät zum mikroskopischen Schleifen.

Country Status (5)

Country Link
US (1) US5076026A (de)
EP (1) EP0431553B1 (de)
JP (1) JPH0777704B2 (de)
KR (1) KR940007404B1 (de)
DE (1) DE69014283T2 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5185957A (en) * 1990-06-01 1993-02-16 Matsushita Electric Co., Ltd. Micro-abrading method and micro-abrading tool
JP2827540B2 (ja) * 1991-03-11 1998-11-25 松下電器産業株式会社 研磨スピンドル
JP2682260B2 (ja) * 1991-05-09 1997-11-26 松下電器産業株式会社 微小研磨方法及び微小研磨工具
US6503414B1 (en) 1992-04-14 2003-01-07 Byelocorp Scientific, Inc. Magnetorheological polishing devices and methods
US5449313A (en) * 1992-04-14 1995-09-12 Byelocorp Scientific, Inc. Magnetorheological polishing devices and methods
US5305554A (en) * 1993-06-16 1994-04-26 Carbon Implants, Inc. Moisture control in vibratory mass finishing systems
US5478270A (en) * 1994-01-25 1995-12-26 International Business Machines Corporation Ultrasonic micro machining slider air bearings with diamond faced patterned die
WO1996011081A2 (en) * 1994-09-30 1996-04-18 Extrude Hone Corporation Method and apparatus for ultrasonic working
US5795212A (en) * 1995-10-16 1998-08-18 Byelocorp Scientific, Inc. Deterministic magnetorheological finishing
SE510932C2 (sv) * 1997-02-17 1999-07-12 Volvo Ab Användning av en anordning för reproducerbar ytbearbetning av en provyta i samband med utveckling av lacker, lackerade detaljer eller poleringsutrustning för bilindustrin
US6306011B1 (en) * 1998-05-11 2001-10-23 Dynetics Corporation System for controlling the size and surface geometry of an orifice
US6227942B1 (en) * 1999-04-21 2001-05-08 H-Semitran Llc Ferrofluidic finishing
US6325696B1 (en) 1999-09-13 2001-12-04 International Business Machines Corporation Piezo-actuated CMP carrier
JP3119358B1 (ja) * 1999-10-18 2000-12-18 株式会社石井表記 半導体ウエハーのエッジ研磨装置
US6257957B1 (en) 1999-12-01 2001-07-10 Gerber Coburn Optical Inc. Tactile feedback system
KR100395168B1 (ko) * 2000-06-29 2003-08-21 송치성 자기연마장치
DE10314625B3 (de) * 2003-04-01 2004-10-14 Optotech Optikmaschinen Gmbh Verfahren und Vorrichtung zum Nacharbeiten von Präzisionsoberflächen
DE102005010286A1 (de) * 2005-03-01 2006-09-07 Thiel, Wolfgang, Dr. Bearbeitungsvorrichtung und -verfahren zum Bearbeiten von Oberflächen in Vertiefungen von Werkstücken
JP2007210073A (ja) * 2006-02-10 2007-08-23 Utsunomiya Univ 磁気研磨装置及び磁気研磨加工用工具
US8070081B2 (en) 2009-05-14 2011-12-06 Wark Rickey E Pressure monitor for pulverizer
JP5886596B2 (ja) * 2011-10-28 2016-03-16 Fdk株式会社 研磨バイト及びそれを用いた表面処理装置
CN102672549A (zh) * 2012-03-23 2012-09-19 辽宁科技大学 大曲面磁力研磨抛光装置
US9157010B2 (en) * 2012-07-18 2015-10-13 Cabot Microelectronics Corporation Magnetorheological fluid for ultrasmooth polishing
CN104858725B (zh) * 2015-05-26 2017-12-12 浙江师范大学 医用钛合金螺钉气囊磁流变刷抛光机
JP2019014004A (ja) * 2017-07-06 2019-01-31 日本特殊陶業株式会社 セラミック製品の製造方法
US11571779B2 (en) * 2018-06-21 2023-02-07 University Of Florida Research Foundation, Incorporated Magnetic-field-guidance system

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4122602A (en) * 1977-06-03 1978-10-31 The Gillette Company Processes for treating cutting edges
SU1071411A1 (ru) * 1977-07-26 1984-02-07 Физико-технический институт АН БССР Устройство дл объемной полировки
US4186528A (en) * 1978-05-23 1980-02-05 Kosobutsky Alexandr A Machine for treating spherical surfaces of parts with magneto-abrasive powder
US4211041A (en) * 1978-06-16 1980-07-08 Kozhuro Lev M Rotor-type machine for abrasive machining of parts with ferromagnetic abrasive powders in magnetic field
JPS58192737A (ja) * 1982-04-28 1983-11-10 Inoue Japax Res Inc 磨き加工方法
JPH0413082Y2 (de) * 1986-01-10 1992-03-27
DE3634409A1 (de) * 1986-10-09 1988-04-21 Fraunhofer Ges Forschung Vorrichtung zum bearbeiten von werkstuecken durch magnetabrasives schleifen
US4821466A (en) * 1987-02-09 1989-04-18 Koji Kato Method for grinding using a magnetic fluid and an apparatus thereof
SU1586814A1 (ru) * 1987-03-03 1990-08-23 Череповецкий филиал Вологодского политехнического института Способ управлени агрегатом абразивно-порошковой очистки полос от окалины
GB2203367B (en) * 1987-04-16 1991-07-03 Rawson Francis F H High frequency machining
EP0347462A4 (en) * 1987-11-18 1990-10-10 Fiziko-Tekhnichesky Institut Akademii Nauk Belorusskoi Ssr Device for magneto-abrasive machining of external cylindrical surfaces of parts

Also Published As

Publication number Publication date
JPH03178767A (ja) 1991-08-02
JPH0777704B2 (ja) 1995-08-23
EP0431553A3 (en) 1991-11-27
KR910011395A (ko) 1991-08-07
EP0431553A2 (de) 1991-06-12
KR940007404B1 (ko) 1994-08-18
EP0431553B1 (de) 1994-11-23
DE69014283T2 (de) 1995-05-18
US5076026A (en) 1991-12-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee