DE69011289T2 - Laserinterferometer. - Google Patents

Laserinterferometer.

Info

Publication number
DE69011289T2
DE69011289T2 DE69011289T DE69011289T DE69011289T2 DE 69011289 T2 DE69011289 T2 DE 69011289T2 DE 69011289 T DE69011289 T DE 69011289T DE 69011289 T DE69011289 T DE 69011289T DE 69011289 T2 DE69011289 T2 DE 69011289T2
Authority
DE
Germany
Prior art keywords
laser interferometer
interferometer
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69011289T
Other languages
English (en)
Other versions
DE69011289D1 (de
Inventor
Raymond John Chaney
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw PLC filed Critical Renishaw PLC
Application granted granted Critical
Publication of DE69011289D1 publication Critical patent/DE69011289D1/de
Publication of DE69011289T2 publication Critical patent/DE69011289T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
DE69011289T 1989-11-24 1990-11-20 Laserinterferometer. Expired - Fee Related DE69011289T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB898926574A GB8926574D0 (en) 1989-11-24 1989-11-24 Laser interferometer

Publications (2)

Publication Number Publication Date
DE69011289D1 DE69011289D1 (de) 1994-09-08
DE69011289T2 true DE69011289T2 (de) 1994-11-24

Family

ID=10666841

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69011289T Expired - Fee Related DE69011289T2 (de) 1989-11-24 1990-11-20 Laserinterferometer.

Country Status (5)

Country Link
US (1) US5274436A (de)
EP (2) EP0431792B1 (de)
JP (1) JPH03180704A (de)
DE (1) DE69011289T2 (de)
GB (1) GB8926574D0 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5414509A (en) * 1993-03-08 1995-05-09 Associated Universities, Inc. Optical pressure/density measuring means
DE19515365C2 (de) * 1995-05-02 1997-11-20 Deutsche Forsch Luft Raumfahrt Faseroptische Lichtschranke
DE19528676C2 (de) * 1995-08-04 1997-05-22 Zeiss Carl Jena Gmbh Interferometeranordnung zur absoluten Distanzmessung
US5724136A (en) * 1996-10-15 1998-03-03 Zygo Corporation Interferometric apparatus for measuring motions of a stage relative to fixed reflectors
US6483593B1 (en) 1999-08-10 2002-11-19 The Boeing Company Hetrodyne interferometer and associated interferometric method
NL1014807C2 (nl) * 2000-03-31 2001-10-04 Univ Eindhoven Tech Heterodyne laser interferometer met fiber.
US6509971B2 (en) * 2001-05-09 2003-01-21 Nikon Corporation Interferometer system
US6678447B1 (en) * 2001-07-03 2004-01-13 Valyn International Adjustable multi-beam splitter and fiber coupler
US20030035112A1 (en) * 2001-08-20 2003-02-20 Nevis Elizabeth A. Birefringent beam combiners for polarized beams in interferometers
KR100468155B1 (ko) * 2002-06-27 2005-01-26 한국과학기술원 이종모드 헬륨-네온 레이저와 슈퍼 헤테로다인위상측정법을 이용한 헤테로다인 레이저 간섭계
US7359057B2 (en) 2005-08-26 2008-04-15 Ball Aerospace & Technologies Corp. Method and apparatus for measuring small shifts in optical wavelengths
CN103499385B (zh) * 2013-09-25 2016-04-13 北京理工大学 一种高精度双频同时测量激光外差干涉相位测振光路
CN104133207B (zh) * 2014-08-28 2016-10-12 哈尔滨工业大学 可溯源超外差式精测尺混合激光器测距装置与方法
CN104655159B (zh) * 2015-02-10 2017-05-24 深圳大学 一种正交偏振激光器的传感器
CN104964641B (zh) * 2015-06-29 2017-10-10 成都信息工程大学 一种磁性微位移平台式级联阶梯角反射镜激光干涉仪及标定方法和测量方法
CN113280729A (zh) * 2021-05-26 2021-08-20 桂林电子科技大学 一种双频激光干涉测量信号解调的前处理装置和方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB191309067A (en) * 1913-04-17 1914-01-08 Courtaulds Ltd Improvements in Apparatus for Bleaching, Dyeing, Washing, or otherwise Treating with Liquid, Hanks of Thread, Yarn, Silk, or other Fibrous Material.
US3881823A (en) * 1967-06-02 1975-05-06 Philips Corp Apparatus for measuring the variation of an optical path length with the aid of an interferometer
US3534292A (en) * 1967-08-02 1970-10-13 Hewlett Packard Co Frequency stabilized laser system
US4278352A (en) * 1979-10-24 1981-07-14 The Boeing Company Support system for extensible bellows
US4767210A (en) * 1983-02-24 1988-08-30 British Telecommunications Plc Optical fibre interferometer
GB2144215B (en) * 1983-07-28 1988-06-22 Cise Spa Interferometric detector with fibre-optic sensor
US4688940A (en) * 1985-03-12 1987-08-25 Zygo Corporation Heterodyne interferometer system
IT1184100B (it) * 1985-04-23 1987-10-22 Cselt Centro Studi Lab Telecom Ellissometro interferometrico statico
US4627731A (en) * 1985-09-03 1986-12-09 United Technologies Corporation Common optical path interferometric gauge
US4902888A (en) * 1987-12-15 1990-02-20 Brother Kogyo Kabushiki Kaisha Optical fiber sensor

Also Published As

Publication number Publication date
GB8926574D0 (en) 1990-01-17
EP0431792A2 (de) 1991-06-12
US5274436A (en) 1993-12-28
EP0431792A3 (en) 1991-09-18
DE69011289D1 (de) 1994-09-08
EP0431792B1 (de) 1994-08-03
EP0606677A2 (de) 1994-07-20
JPH03180704A (ja) 1991-08-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee