DE69010817D1 - In wässeriger Base entwickelbare negative Schutzschichtzusammensetzungen. - Google Patents

In wässeriger Base entwickelbare negative Schutzschichtzusammensetzungen.

Info

Publication number
DE69010817D1
DE69010817D1 DE69010817T DE69010817T DE69010817D1 DE 69010817 D1 DE69010817 D1 DE 69010817D1 DE 69010817 T DE69010817 T DE 69010817T DE 69010817 T DE69010817 T DE 69010817T DE 69010817 D1 DE69010817 D1 DE 69010817D1
Authority
DE
Germany
Prior art keywords
protective layer
aqueous base
layer compositions
negative protective
developable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69010817T
Other languages
English (en)
Other versions
DE69010817T2 (de
Inventor
Hiroshi Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE69010817D1 publication Critical patent/DE69010817D1/de
Publication of DE69010817T2 publication Critical patent/DE69010817T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
DE69010817T 1989-09-25 1990-08-30 In wässeriger Base entwickelbare negative Schutzschichtzusammensetzungen. Expired - Fee Related DE69010817T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/411,960 US5019481A (en) 1989-09-25 1989-09-25 Aqueous base developable negative resist compositions

Publications (2)

Publication Number Publication Date
DE69010817D1 true DE69010817D1 (de) 1994-08-25
DE69010817T2 DE69010817T2 (de) 1995-03-16

Family

ID=23630985

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69010817T Expired - Fee Related DE69010817T2 (de) 1989-09-25 1990-08-30 In wässeriger Base entwickelbare negative Schutzschichtzusammensetzungen.

Country Status (4)

Country Link
US (1) US5019481A (de)
EP (1) EP0420827B1 (de)
JP (1) JPH0675195B2 (de)
DE (1) DE69010817T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59206289D1 (de) * 1991-09-27 1996-06-20 Siemens Ag Verfahren zur Erzeugung eines Bottom-Resists
US6472128B2 (en) 1996-04-30 2002-10-29 Shipley Company, L.L.C. Antihalation compositions
US6165697A (en) * 1991-11-15 2000-12-26 Shipley Company, L.L.C. Antihalation compositions
US6773864B1 (en) * 1991-11-15 2004-08-10 Shipley Company, L.L.C. Antihalation compositions
US6528235B2 (en) 1991-11-15 2003-03-04 Shipley Company, L.L.C. Antihalation compositions
AU672220B2 (en) * 1993-09-20 1996-09-26 National Research Development Corporation Negative photoresist and a process therefor
US5491046A (en) * 1995-02-10 1996-02-13 Eastman Kodak Company Method of imaging a lithographic printing plate
JP3810510B2 (ja) * 1997-03-26 2006-08-16 富士写真フイルム株式会社 ネガ型画像記録材料及び平版印刷版原版
JP3859304B2 (ja) * 1997-05-13 2006-12-20 富士フイルムホールディングス株式会社 感光感熱性組成物

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3787302A (en) * 1970-10-19 1974-01-22 Nitto Electric Ind Co Photo-sensitive cross-linking agents for high molecular weight materials
US4102687A (en) * 1977-02-14 1978-07-25 General Electric Company UV Curable composition of a thermosetting condensation resin and Group VIa onium salt
US4416975A (en) * 1981-02-04 1983-11-22 Ciba-Geigy Corporation Photopolymerization process employing compounds containing acryloyl groups and maleimide groups
JPS6131426A (ja) * 1984-07-23 1986-02-13 Showa Highpolymer Co Ltd 変性フエノ−ル樹脂組成物
CA1307695C (en) * 1986-01-13 1992-09-22 Wayne Edmund Feely Photosensitive compounds and thermally stable and aqueous developablenegative images
JPS62215946A (ja) * 1986-03-18 1987-09-22 Mitsubishi Chem Ind Ltd 感光性組成物及び感光性平版印刷版
JPS6336240A (ja) * 1986-07-28 1988-02-16 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン レジスト構造の作成方法
US4800152A (en) * 1987-03-16 1989-01-24 International Business Machines Corporation Negative resist compositions
DE3711263A1 (de) * 1987-04-03 1988-10-13 Hoechst Ag Lichtempfindliches gemisch, daraus hergestelltes lichtempfindliches kopiermaterial und verfahren zur herstellung von druckformen
DE3711264A1 (de) * 1987-04-03 1988-10-13 Hoechst Ag Lichtempfindliches gemisch und hieraus hergestelltes lichtempfindliches kopiermaterial
JPH01293339A (ja) * 1988-05-23 1989-11-27 Tosoh Corp フォトレジスト組成物
JPH0223355A (ja) * 1988-07-12 1990-01-25 Fujitsu Ltd パターン形成方法
KR900005226A (ko) * 1988-09-29 1990-04-13 윌리엄 비이 해리스 감광성 조성물 및 양화 상과 음화 상의 생성방법

Also Published As

Publication number Publication date
US5019481A (en) 1991-05-28
EP0420827A3 (en) 1991-10-23
DE69010817T2 (de) 1995-03-16
JPH03185449A (ja) 1991-08-13
EP0420827A2 (de) 1991-04-03
EP0420827B1 (de) 1994-07-20
JPH0675195B2 (ja) 1994-09-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee