DE69004597D1 - Beschleunigungsmesser mit Pulsantrieb. - Google Patents
Beschleunigungsmesser mit Pulsantrieb.Info
- Publication number
- DE69004597D1 DE69004597D1 DE90630049T DE69004597T DE69004597D1 DE 69004597 D1 DE69004597 D1 DE 69004597D1 DE 90630049 T DE90630049 T DE 90630049T DE 69004597 T DE69004597 T DE 69004597T DE 69004597 D1 DE69004597 D1 DE 69004597D1
- Authority
- DE
- Germany
- Prior art keywords
- accelerometer
- pulse drive
- pulse
- drive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/317,217 US4987779A (en) | 1989-02-28 | 1989-02-28 | Pulse-driven accelerometer arrangement |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69004597D1 true DE69004597D1 (de) | 1993-12-23 |
DE69004597T2 DE69004597T2 (de) | 1994-03-10 |
Family
ID=23232646
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE90630049T Expired - Fee Related DE69004597T2 (de) | 1989-02-28 | 1990-02-22 | Beschleunigungsmesser mit Pulsantrieb. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4987779A (de) |
EP (1) | EP0385917B1 (de) |
JP (1) | JP2851673B2 (de) |
CA (1) | CA2010987C (de) |
DE (1) | DE69004597T2 (de) |
IL (1) | IL93542A0 (de) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0672899B2 (ja) * | 1988-04-01 | 1994-09-14 | 株式会社日立製作所 | 加速度センサ |
US5142921A (en) * | 1990-10-29 | 1992-09-01 | Litton Systems, Inc. | Force balance instrument with electrostatic charge control |
US5205171A (en) * | 1991-01-11 | 1993-04-27 | Northrop Corporation | Miniature silicon accelerometer and method |
WO1992017759A1 (en) * | 1991-03-30 | 1992-10-15 | Kazuhiro Okada | Method of testing performance of device for measuring physical quantity by using change of distance between electrodes and physical quantity measuring device provided with function of executing this method |
JP3151956B2 (ja) * | 1992-09-04 | 2001-04-03 | 株式会社村田製作所 | 加速度センサ |
US5576483A (en) * | 1993-10-01 | 1996-11-19 | Hysitron Incorporated | Capacitive transducer with electrostatic actuation |
US5473946A (en) * | 1994-09-09 | 1995-12-12 | Litton Systems, Inc. | Accelerometer using pulse-on-demand control |
US5511420A (en) * | 1994-12-01 | 1996-04-30 | Analog Devices, Inc. | Electric field attraction minimization circuit |
US5535626A (en) * | 1994-12-21 | 1996-07-16 | Breed Technologies, Inc. | Sensor having direct-mounted sensing element |
US5659195A (en) * | 1995-06-08 | 1997-08-19 | The Regents Of The University Of California | CMOS integrated microsensor with a precision measurement circuit |
JP3435979B2 (ja) * | 1996-04-26 | 2003-08-11 | 株式会社デンソー | 物理量検出装置 |
US5939633A (en) * | 1997-06-18 | 1999-08-17 | Analog Devices, Inc. | Apparatus and method for multi-axis capacitive sensing |
DE19929767C2 (de) * | 1999-06-29 | 2002-06-13 | Litef Gmbh | Beschleunigungsmeßeinrichtung |
US6360602B1 (en) * | 1999-07-29 | 2002-03-26 | Litton Systems, Inc. | Method and apparatus reducing output noise in a digitally rebalanced accelerometer |
US6865946B2 (en) * | 2003-01-16 | 2005-03-15 | The Boeing Company | Flexure plate dual capacitance accelerometer |
US6901801B2 (en) * | 2003-07-28 | 2005-06-07 | The Boeing Company | Capacitance acceleration derivative detector |
US7124634B2 (en) * | 2003-07-29 | 2006-10-24 | The Boeing Company | Single plate capacitive acceleration derivative detector |
EP1779121A1 (de) * | 2004-08-17 | 2007-05-02 | Analog Devices, Inc. | Mehrfachachsenbeschleunigungssensor |
US7310577B2 (en) * | 2004-09-29 | 2007-12-18 | The Boeing Company | Integrated capacitive bridge and integrated flexure functions inertial measurement unit |
US7360425B2 (en) * | 2004-11-22 | 2008-04-22 | The Boeing Company | Compensated composite structure |
US7228739B2 (en) | 2004-11-23 | 2007-06-12 | The Boeing Company | Precision flexure plate |
US7331229B2 (en) * | 2004-12-09 | 2008-02-19 | The Boeing Company | Magnetic null accelerometer |
US7137208B2 (en) * | 2004-12-14 | 2006-11-21 | The Boeing Company | Leveling device |
US7296470B2 (en) * | 2005-04-14 | 2007-11-20 | The Boeing Company | Extended accuracy flexured plate dual capacitance accelerometer |
US7368923B2 (en) * | 2005-12-22 | 2008-05-06 | Honeywell International Inc. | Time interval trimmed differential capacitance sensor |
US7757555B2 (en) * | 2006-08-30 | 2010-07-20 | Robert Bosch Gmbh | Tri-axis accelerometer having a single proof mass and fully differential output signals |
US7610809B2 (en) * | 2007-01-18 | 2009-11-03 | Freescale Semiconductor, Inc. | Differential capacitive sensor and method of making same |
US8800371B2 (en) * | 2012-03-08 | 2014-08-12 | Industrial Technology Research Institute | Electrostatic force generator and force measurement system and accelerometer having the same |
US9027403B2 (en) | 2012-04-04 | 2015-05-12 | Analog Devices, Inc. | Wide G range accelerometer |
US9046547B2 (en) * | 2012-08-13 | 2015-06-02 | Pgs Geophysical As | Accelerometer having multiple feedback systems operating on a given proof mass |
US9341646B2 (en) * | 2012-12-19 | 2016-05-17 | Northrop Grumman Guidance And Electronics Company, Inc. | Bias reduction in force rebalanced accelerometers |
CN105759075B (zh) | 2016-02-25 | 2017-09-19 | 中国科学院地质与地球物理研究所 | 一种高精度挠性加速度计 |
US10512164B2 (en) * | 2017-10-02 | 2019-12-17 | Encite Llc | Micro devices formed by flex circuit substrates |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2326233C2 (de) * | 1973-05-23 | 1986-02-06 | Hans-Werner Dr.-Ing. 6382 Friedrichsdorf Fischer | Verfahren zur Linearisierung der selbsttätigen elektrostatischen Kraftkompensation |
US3877313A (en) * | 1973-07-23 | 1975-04-15 | Singer Co | Electrostatic accelerometer |
FR2454103A1 (fr) * | 1979-04-11 | 1980-11-07 | Sagem | Perfectionnements aux accelerometres pendulaires asservis |
DE3023528C2 (de) * | 1980-06-24 | 1984-11-29 | W.C. Heraeus Gmbh, 6450 Hanau | Aluminium enthaltender Feinstdraht |
US4353254A (en) * | 1980-12-18 | 1982-10-12 | The Singer Company | Control circuit for electro-static accelerometer |
GB2096326B (en) * | 1981-04-06 | 1984-08-15 | Secr Defence | Force-balance pendulum accelerometers |
US4679434A (en) * | 1985-07-25 | 1987-07-14 | Litton Systems, Inc. | Integrated force balanced accelerometer |
JPH0672899B2 (ja) * | 1988-04-01 | 1994-09-14 | 株式会社日立製作所 | 加速度センサ |
-
1989
- 1989-02-28 US US07/317,217 patent/US4987779A/en not_active Expired - Lifetime
-
1990
- 1990-02-22 DE DE90630049T patent/DE69004597T2/de not_active Expired - Fee Related
- 1990-02-22 EP EP90630049A patent/EP0385917B1/de not_active Expired - Lifetime
- 1990-02-27 CA CA002010987A patent/CA2010987C/en not_active Expired - Fee Related
- 1990-02-27 IL IL93542A patent/IL93542A0/xx unknown
- 1990-02-28 JP JP2049166A patent/JP2851673B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69004597T2 (de) | 1994-03-10 |
JPH02278160A (ja) | 1990-11-14 |
IL93542A0 (en) | 1990-11-29 |
EP0385917B1 (de) | 1993-11-18 |
CA2010987A1 (en) | 1990-08-31 |
EP0385917A1 (de) | 1990-09-05 |
CA2010987C (en) | 1998-12-15 |
JP2851673B2 (ja) | 1999-01-27 |
US4987779A (en) | 1991-01-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: BREED AUTOMOTIVE TECHNOLOGY, INC., LAKELAND, FLA., |
|
8328 | Change in the person/name/address of the agent |
Free format text: HENKEL, FEILER & HAENZEL, 81675 MUENCHEN |
|
8339 | Ceased/non-payment of the annual fee |