DE69003770T2 - Mikromechanischer Stufenverdichter und Methode zur Druckerhöhung bei äusserst niedrigem Betriebsdruck. - Google Patents

Mikromechanischer Stufenverdichter und Methode zur Druckerhöhung bei äusserst niedrigem Betriebsdruck.

Info

Publication number
DE69003770T2
DE69003770T2 DE90111971T DE69003770T DE69003770T2 DE 69003770 T2 DE69003770 T2 DE 69003770T2 DE 90111971 T DE90111971 T DE 90111971T DE 69003770 T DE69003770 T DE 69003770T DE 69003770 T2 DE69003770 T2 DE 69003770T2
Authority
DE
Germany
Prior art keywords
micromechanical
pressure
extremely low
stage compressor
low operating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE90111971T
Other languages
English (en)
Other versions
DE69003770D1 (de
Inventor
Arnold Dipl Ing Blum
Manfred Perske
Manfred Dipl Phys Schmidt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IPG Healthcare 501 Ltd
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to DE90111971T priority Critical patent/DE69003770T2/de
Application granted granted Critical
Publication of DE69003770D1 publication Critical patent/DE69003770D1/de
Publication of DE69003770T2 publication Critical patent/DE69003770T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/041—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms double acting plate-like flexible pumping member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
DE90111971T 1989-08-07 1990-06-23 Mikromechanischer Stufenverdichter und Methode zur Druckerhöhung bei äusserst niedrigem Betriebsdruck. Expired - Lifetime DE69003770T2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE90111971T DE69003770T2 (de) 1989-08-07 1990-06-23 Mikromechanischer Stufenverdichter und Methode zur Druckerhöhung bei äusserst niedrigem Betriebsdruck.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3926066A DE3926066A1 (de) 1989-08-07 1989-08-07 Mikromechanische kompressorkaskade und verfahren zur druckerhoehung bei extrem niedrigem arbeitsdruck
DE90111971T DE69003770T2 (de) 1989-08-07 1990-06-23 Mikromechanischer Stufenverdichter und Methode zur Druckerhöhung bei äusserst niedrigem Betriebsdruck.

Publications (2)

Publication Number Publication Date
DE69003770D1 DE69003770D1 (de) 1993-11-11
DE69003770T2 true DE69003770T2 (de) 1994-05-05

Family

ID=6386653

Family Applications (2)

Application Number Title Priority Date Filing Date
DE3926066A Granted DE3926066A1 (de) 1989-08-07 1989-08-07 Mikromechanische kompressorkaskade und verfahren zur druckerhoehung bei extrem niedrigem arbeitsdruck
DE90111971T Expired - Lifetime DE69003770T2 (de) 1989-08-07 1990-06-23 Mikromechanischer Stufenverdichter und Methode zur Druckerhöhung bei äusserst niedrigem Betriebsdruck.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE3926066A Granted DE3926066A1 (de) 1989-08-07 1989-08-07 Mikromechanische kompressorkaskade und verfahren zur druckerhoehung bei extrem niedrigem arbeitsdruck

Country Status (4)

Country Link
US (1) US5078581A (de)
EP (1) EP0412270B1 (de)
JP (1) JP2663994B2 (de)
DE (2) DE3926066A1 (de)

Families Citing this family (101)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0518524B1 (de) * 1991-05-30 1996-09-04 Hitachi, Ltd. Ventil und seine Verwendung in einer Vorrichtung hergestellt aus Halbleitermaterial
JPH05272457A (ja) * 1992-01-30 1993-10-19 Terumo Corp マイクロポンプおよびその製造方法
DE4402119C2 (de) * 1994-01-25 1998-07-23 Karlsruhe Forschzent Verfahren zur Herstellung von Mikromembranpumpen
US5611214A (en) * 1994-07-29 1997-03-18 Battelle Memorial Institute Microcomponent sheet architecture
US5705018A (en) * 1995-12-13 1998-01-06 Hartley; Frank T. Micromachined peristaltic pump
DE19637928C2 (de) * 1996-02-10 1999-01-14 Fraunhofer Ges Forschung Bistabile Membran-Aktivierungseinrichtung und Membran
US6168395B1 (en) 1996-02-10 2001-01-02 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Bistable microactuator with coupled membranes
US5961298A (en) * 1996-06-25 1999-10-05 California Institute Of Technology Traveling wave pump employing electroactive actuators
AU717626B2 (en) * 1996-10-03 2000-03-30 Debiotech S.A. Micro-machined device for fluids and method of manufacture
ES2152763B1 (es) * 1997-02-28 2001-08-16 Consejo Superior Investigacion Cubeta tubular con sensores quimicos de estado integrados para aplicacion a sistemas de analisis.
DE19719862A1 (de) * 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Mikromembranpumpe
US5836750A (en) * 1997-10-09 1998-11-17 Honeywell Inc. Electrostatically actuated mesopump having a plurality of elementary cells
US6106245A (en) * 1997-10-09 2000-08-22 Honeywell Low cost, high pumping rate electrostatically actuated mesopump
US6148635A (en) 1998-10-19 2000-11-21 The Board Of Trustees Of The University Of Illinois Active compressor vapor compression cycle integrated heat transfer device
ATE350580T1 (de) * 1998-11-06 2007-01-15 Honeywell Inc Elektrostatisch betätigte pumpenarray
US7130046B2 (en) * 2004-09-27 2006-10-31 Honeywell International Inc. Data frame selection for cytometer analysis
US7630063B2 (en) * 2000-08-02 2009-12-08 Honeywell International Inc. Miniaturized cytometer for detecting multiple species in a sample
US7016022B2 (en) * 2000-08-02 2006-03-21 Honeywell International Inc. Dual use detectors for flow cytometry
US8329118B2 (en) * 2004-09-02 2012-12-11 Honeywell International Inc. Method and apparatus for determining one or more operating parameters for a microfluidic circuit
US20060263888A1 (en) * 2000-06-02 2006-11-23 Honeywell International Inc. Differential white blood count on a disposable card
US6568286B1 (en) 2000-06-02 2003-05-27 Honeywell International Inc. 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
US7420659B1 (en) * 2000-06-02 2008-09-02 Honeywell Interantional Inc. Flow control system of a cartridge
US8071051B2 (en) 2004-05-14 2011-12-06 Honeywell International Inc. Portable sample analyzer cartridge
US6970245B2 (en) * 2000-08-02 2005-11-29 Honeywell International Inc. Optical alignment detection system
US6837476B2 (en) * 2002-06-19 2005-01-04 Honeywell International Inc. Electrostatically actuated valve
US7978329B2 (en) * 2000-08-02 2011-07-12 Honeywell International Inc. Portable scattering and fluorescence cytometer
US7262838B2 (en) * 2001-06-29 2007-08-28 Honeywell International Inc. Optical detection system for flow cytometry
US7242474B2 (en) * 2004-07-27 2007-07-10 Cox James A Cytometer having fluid core stream position control
US7283223B2 (en) * 2002-08-21 2007-10-16 Honeywell International Inc. Cytometer having telecentric optics
US7641856B2 (en) * 2004-05-14 2010-01-05 Honeywell International Inc. Portable sample analyzer with removable cartridge
US7471394B2 (en) * 2000-08-02 2008-12-30 Honeywell International Inc. Optical detection system with polarizing beamsplitter
US7215425B2 (en) * 2000-08-02 2007-05-08 Honeywell International Inc. Optical alignment for flow cytometry
US7000330B2 (en) * 2002-08-21 2006-02-21 Honeywell International Inc. Method and apparatus for receiving a removable media member
US6382228B1 (en) 2000-08-02 2002-05-07 Honeywell International Inc. Fluid driving system for flow cytometry
US7277166B2 (en) * 2000-08-02 2007-10-02 Honeywell International Inc. Cytometer analysis cartridge optical configuration
US7061595B2 (en) * 2000-08-02 2006-06-13 Honeywell International Inc. Miniaturized flow controller with closed loop regulation
US6729856B2 (en) 2001-10-09 2004-05-04 Honeywell International Inc. Electrostatically actuated pump with elastic restoring forces
US7094040B2 (en) * 2002-03-27 2006-08-22 Minolta Co., Ltd. Fluid transferring system and micropump suitable therefor
US7008193B2 (en) * 2002-05-13 2006-03-07 The Regents Of The University Of Michigan Micropump assembly for a microgas chromatograph and the like
DE10360709A1 (de) * 2003-12-19 2005-10-06 Bartels Mikrotechnik Gmbh Mikropumpe und klebstoffreies Verfahren zur Verbindung zweier Substrate
US7612871B2 (en) * 2004-09-01 2009-11-03 Honeywell International Inc Frequency-multiplexed detection of multiple wavelength light for flow cytometry
US7630075B2 (en) * 2004-09-27 2009-12-08 Honeywell International Inc. Circular polarization illumination based analyzer system
US20060134510A1 (en) * 2004-12-21 2006-06-22 Cleopatra Cabuz Air cell air flow control system and method
US7222639B2 (en) * 2004-12-29 2007-05-29 Honeywell International Inc. Electrostatically actuated gas valve
US7328882B2 (en) * 2005-01-06 2008-02-12 Honeywell International Inc. Microfluidic modulating valve
US7445017B2 (en) * 2005-01-28 2008-11-04 Honeywell International Inc. Mesovalve modulator
US7688427B2 (en) 2005-04-29 2010-03-30 Honeywell International Inc. Particle parameter determination system
US7320338B2 (en) * 2005-06-03 2008-01-22 Honeywell International Inc. Microvalve package assembly
WO2007005974A2 (en) * 2005-07-01 2007-01-11 Honeywell International, Inc. A flow metered analyzer
WO2007005973A2 (en) * 2005-07-01 2007-01-11 Honeywell International, Inc. A microfluidic card for rbc analysis
JP4995197B2 (ja) * 2005-07-01 2012-08-08 ハネウェル・インターナショナル・インコーポレーテッド ３ｄ流体力学的集束を有する成形カートリッジ
US7517201B2 (en) * 2005-07-14 2009-04-14 Honeywell International Inc. Asymmetric dual diaphragm pump
US7843563B2 (en) * 2005-08-16 2010-11-30 Honeywell International Inc. Light scattering and imaging optical system
US20070051415A1 (en) * 2005-09-07 2007-03-08 Honeywell International Inc. Microvalve switching array
US7624755B2 (en) * 2005-12-09 2009-12-01 Honeywell International Inc. Gas valve with overtravel
EP1963819A2 (de) * 2005-12-22 2008-09-03 Honeywell International, Inc. Tragbares probenanalysesystem
EP3121601A1 (de) * 2005-12-22 2017-01-25 Honeywell International Inc. Tragbares probenanalysesystem
EP1963817A2 (de) * 2005-12-22 2008-09-03 Honeywell International Inc. Kartusche für ein tragbares probenanalysegerät
JP5431732B2 (ja) * 2005-12-29 2014-03-05 ハネウェル・インターナショナル・インコーポレーテッド マイクロ流体フォーマットにおけるアッセイ実装
US7523762B2 (en) 2006-03-22 2009-04-28 Honeywell International Inc. Modulating gas valves and systems
US8007704B2 (en) * 2006-07-20 2011-08-30 Honeywell International Inc. Insert molded actuator components
US20080099082A1 (en) * 2006-10-27 2008-05-01 Honeywell International Inc. Gas valve shutoff seal
EP1916420B1 (de) * 2006-10-28 2009-09-23 Sensirion Holding AG Mehrzellenpumpe
US7644731B2 (en) * 2006-11-30 2010-01-12 Honeywell International Inc. Gas valve with resilient seat
CN101520035B (zh) * 2008-02-26 2013-03-20 研能科技股份有限公司 流体输送装置
CN101550925B (zh) * 2008-03-31 2014-08-27 研能科技股份有限公司 具有多个双腔体致动结构的流体输送装置
US20100034704A1 (en) * 2008-08-06 2010-02-11 Honeywell International Inc. Microfluidic cartridge channel with reduced bubble formation
US8037354B2 (en) 2008-09-18 2011-10-11 Honeywell International Inc. Apparatus and method for operating a computing platform without a battery pack
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US8899264B2 (en) 2011-12-15 2014-12-02 Honeywell International Inc. Gas valve with electronic proof of closure system
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US9846440B2 (en) 2011-12-15 2017-12-19 Honeywell International Inc. Valve controller configured to estimate fuel comsumption
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
US8663583B2 (en) 2011-12-27 2014-03-04 Honeywell International Inc. Disposable cartridge for fluid analysis
US8741233B2 (en) 2011-12-27 2014-06-03 Honeywell International Inc. Disposable cartridge for fluid analysis
US8741235B2 (en) 2011-12-27 2014-06-03 Honeywell International Inc. Two step sample loading of a fluid analysis cartridge
US8741234B2 (en) 2011-12-27 2014-06-03 Honeywell International Inc. Disposable cartridge for fluid analysis
US9234661B2 (en) 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
EP2868970B1 (de) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regelungsvorrichtung
DE102013222283B3 (de) * 2013-11-04 2015-01-15 Robert Bosch Gmbh Vorrichtung und Verfahren zur Handhabung von Reagenzien
US10024439B2 (en) 2013-12-16 2018-07-17 Honeywell International Inc. Valve over-travel mechanism
US20150316047A1 (en) * 2014-04-30 2015-11-05 Texas Instruments Incorporated Fluid pump having material displaceable responsive to electrical energy
CN103925187B (zh) * 2014-05-04 2016-03-30 吉林大学 一种多振子压电泵
US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
US9645584B2 (en) 2014-09-17 2017-05-09 Honeywell International Inc. Gas valve with electronic health monitoring
US10503181B2 (en) 2016-01-13 2019-12-10 Honeywell International Inc. Pressure regulator
US10563642B2 (en) 2016-06-20 2020-02-18 The Regents Of The University Of Michigan Modular stacked variable-compression micropump and method of making same
US10564062B2 (en) 2016-10-19 2020-02-18 Honeywell International Inc. Human-machine interface for gas valve
JP6911527B2 (ja) * 2017-05-23 2021-07-28 株式会社デンソー 冷凍サイクル装置
CN107339228A (zh) * 2017-06-26 2017-11-10 歌尔股份有限公司 微流泵浦结构、系统及制作方法
TWI640961B (zh) * 2017-07-10 2018-11-11 研能科技股份有限公司 致動傳感模組
US11073281B2 (en) 2017-12-29 2021-07-27 Honeywell International Inc. Closed-loop programming and control of a combustion appliance
US10697815B2 (en) 2018-06-09 2020-06-30 Honeywell International Inc. System and methods for mitigating condensation in a sensor module
DE102019004450B4 (de) * 2019-06-26 2024-03-14 Drägerwerk AG & Co. KGaA Mikropumpensystem und Verfahren zur Führung eines kompressiblen Fluids
TWI806671B (zh) * 2022-06-21 2023-06-21 中原大學 微型鼓風器

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940010U (de) * 1972-07-11 1974-04-09
JPS5493205A (en) * 1977-12-30 1979-07-24 Matsushita Electric Works Ltd Electrostatic diaphragm pump
JPS55148989A (en) * 1979-05-10 1980-11-19 Tsuneo Aoki Booster
DE3202324A1 (de) * 1981-03-12 1983-08-04 Paavo Veikko Dr.Med. 5465 Erpel Klami "abgekuehlte latentwaermespeicher fuer raumheizung und -abkuehlung mittels direkter oder vom wasser gebundener, undirekter sonnenenergie"
US4515534A (en) * 1982-09-30 1985-05-07 Lawless William N Miniature solid-state gas compressor
NL8302860A (nl) * 1983-08-15 1985-03-01 Stichting Ct Voor Micro Elektr Piezo-elektrische micropomp.
US4911616A (en) * 1988-01-19 1990-03-27 Laumann Jr Carl W Micro miniature implantable pump
US4938742A (en) * 1988-02-04 1990-07-03 Smits Johannes G Piezoelectric micropump with microvalves
SE8801299L (sv) * 1988-04-08 1989-10-09 Bertil Hoeoek Mikromekanisk envaegsventil
US4923000A (en) * 1989-03-03 1990-05-08 Microelectronics And Computer Technology Corporation Heat exchanger having piezoelectric fan means

Also Published As

Publication number Publication date
DE3926066A1 (de) 1991-02-14
DE69003770D1 (de) 1993-11-11
US5078581A (en) 1992-01-07
JP2663994B2 (ja) 1997-10-15
JPH0370884A (ja) 1991-03-26
DE3926066C2 (de) 1991-08-22
EP0412270A1 (de) 1991-02-13
EP0412270B1 (de) 1993-10-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: VOSSIUS & PARTNER, 81675 MUENCHEN

8327 Change in the person/name/address of the patent owner

Owner name: IPG HEALTHCARE 501 LTD., ST.PETER PORT, GUERNS, GB