DE68926257D1 - Kathodenaufstellung zum Einbau in eine Elektronenkanone - Google Patents

Kathodenaufstellung zum Einbau in eine Elektronenkanone

Info

Publication number
DE68926257D1
DE68926257D1 DE68926257T DE68926257T DE68926257D1 DE 68926257 D1 DE68926257 D1 DE 68926257D1 DE 68926257 T DE68926257 T DE 68926257T DE 68926257 T DE68926257 T DE 68926257T DE 68926257 D1 DE68926257 D1 DE 68926257D1
Authority
DE
Germany
Prior art keywords
installation
electron gun
cathode
cathode installation
gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE68926257T
Other languages
English (en)
Inventor
Hans Joachim Kolpin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atomic Energy of Canada Ltd AECL
Original Assignee
Atomic Energy of Canada Ltd AECL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atomic Energy of Canada Ltd AECL filed Critical Atomic Energy of Canada Ltd AECL
Application granted granted Critical
Publication of DE68926257D1 publication Critical patent/DE68926257D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/027—Construction of the gun or parts thereof
DE68926257T 1988-01-07 1989-01-05 Kathodenaufstellung zum Einbau in eine Elektronenkanone Expired - Lifetime DE68926257D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA000555997A CA1286769C (en) 1988-01-07 1988-01-07 Electron gun design

Publications (1)

Publication Number Publication Date
DE68926257D1 true DE68926257D1 (de) 1996-05-23

Family

ID=4137197

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68926257T Expired - Lifetime DE68926257D1 (de) 1988-01-07 1989-01-05 Kathodenaufstellung zum Einbau in eine Elektronenkanone

Country Status (5)

Country Link
US (1) US4900982A (de)
EP (1) EP0323898B1 (de)
JP (1) JPH01246754A (de)
CA (1) CA1286769C (de)
DE (1) DE68926257D1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3930202A1 (de) * 1989-09-09 1991-03-14 Ptr Praezisionstech Gmbh Elektronenstrahlerzeuger fuer eine elektronenstrahlkanone
US5534747A (en) * 1994-05-13 1996-07-09 Litton Systems, Inc. Variable focus electron gun assembly with ceramic spacers
TW398003B (en) * 1998-06-25 2000-07-11 Koninkl Philips Electronics Nv Electron tube comprising a semiconductor cathode
US6252339B1 (en) * 1998-09-17 2001-06-26 Nikon Corporation Removable bombardment filament-module for electron beam projection systems
US6548946B1 (en) * 2000-11-02 2003-04-15 General Electric Company Electron beam generator
JP4041742B2 (ja) * 2001-05-01 2008-01-30 株式会社荏原製作所 電子線装置及び該電子線装置を用いたデバイス製造方法
US8084929B2 (en) * 2009-04-29 2011-12-27 Atti International Services Company, Inc. Multiple device shaping uniform distribution of current density in electro-static focusing systems
CN105470071B (zh) * 2015-11-23 2017-03-15 中国工程物理研究院应用电子学研究所 一种可控产生不同直径强流电子束的二极管装置
DE102018123100A1 (de) 2018-09-20 2020-03-26 Thales Deutschland GmbH Electron Devices Elektronenkanone
US11355303B2 (en) 2019-09-03 2022-06-07 Tae Technologies, Inc. Systems, devices, and methods for contaminant resistant insulative structures
DE102020213174A1 (de) 2020-10-19 2022-04-21 THEVA DüNNSCHICHTTECHNIK GMBH Aktiv gekühlte elektronenkanone zur materialverdampfung im vakuum
CN116978763B (zh) * 2023-09-25 2023-12-12 电子科技大学 一种便于电子枪电极中心对准的装配方法及装配固定结构

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2391780A (en) * 1943-10-13 1945-12-25 Rca Corp Electron discharge device
US3581357A (en) * 1968-01-02 1971-06-01 Hughes Aircraft Co Electron gun alignment method and device therefor
US3777210A (en) * 1972-10-30 1973-12-04 Rca Corp Electron gun and method of assembly
FR2315766A1 (fr) * 1975-06-23 1977-01-21 Sciaky Sa Canon a electrons
US4621213A (en) * 1984-07-02 1986-11-04 Imatron, Inc. Electron gun

Also Published As

Publication number Publication date
JPH01246754A (ja) 1989-10-02
US4900982A (en) 1990-02-13
EP0323898B1 (de) 1996-04-17
EP0323898A3 (de) 1991-05-29
CA1286769C (en) 1991-07-23
EP0323898A2 (de) 1989-07-12

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Legal Events

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