DE68921607D1 - Verfahren zum Züchten einer kristallinen halbleitenden Dünnschicht und Vorrichtung dafür. - Google Patents

Verfahren zum Züchten einer kristallinen halbleitenden Dünnschicht und Vorrichtung dafür.

Info

Publication number
DE68921607D1
DE68921607D1 DE68921607T DE68921607T DE68921607D1 DE 68921607 D1 DE68921607 D1 DE 68921607D1 DE 68921607 T DE68921607 T DE 68921607T DE 68921607 T DE68921607 T DE 68921607T DE 68921607 D1 DE68921607 D1 DE 68921607D1
Authority
DE
Germany
Prior art keywords
growing
thin film
device therefor
semiconducting thin
crystalline semiconducting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68921607T
Other languages
English (en)
Other versions
DE68921607T2 (de
Inventor
Tetsuya Mitsubishi Denki Yagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of DE68921607D1 publication Critical patent/DE68921607D1/de
Application granted granted Critical
Publication of DE68921607T2 publication Critical patent/DE68921607T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/10—Heating of the reaction chamber or the substrate
    • C30B25/105—Heating of the reaction chamber or the substrate by irradiation or electric discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02387—Group 13/15 materials
    • H01L21/02395—Arsenides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02538—Group 13/15 materials
    • H01L21/02546—Arsenides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/0257—Doping during depositing
    • H01L21/02573—Conductivity type
    • H01L21/02576—N-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/914—Doping
    • Y10S438/925—Fluid growth doping control, e.g. delta doping

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
DE68921607T 1989-03-30 1989-12-01 Verfahren zum Züchten einer kristallinen halbleitenden Dünnschicht und Vorrichtung dafür. Expired - Fee Related DE68921607T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1080482A JPH02260417A (ja) 1989-03-30 1989-03-30 半導体薄膜の結晶成長方法及びその装置

Publications (2)

Publication Number Publication Date
DE68921607D1 true DE68921607D1 (de) 1995-04-13
DE68921607T2 DE68921607T2 (de) 1995-07-27

Family

ID=13719498

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68921607T Expired - Fee Related DE68921607T2 (de) 1989-03-30 1989-12-01 Verfahren zum Züchten einer kristallinen halbleitenden Dünnschicht und Vorrichtung dafür.

Country Status (4)

Country Link
US (1) US5061643A (de)
EP (1) EP0389718B1 (de)
JP (1) JPH02260417A (de)
DE (1) DE68921607T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5493445A (en) * 1990-03-29 1996-02-20 The United States Of America As Represented By The Secretary Of The Navy Laser textured surface absorber and emitter
US5164324A (en) * 1990-03-29 1992-11-17 The United States Of America As Represented By The Secretary Of The Navy Laser texturing
US5322988A (en) * 1990-03-29 1994-06-21 The United States Of America As Represented By The Secretary Of The Navy Laser texturing
US5354420A (en) * 1990-03-29 1994-10-11 The United States Of America As Represented By The Secretary Of The Navy Method for laser-assisted etching of III-V and II-VI semiconductor compounds using chlorofluorocarbon ambients
US5310989A (en) * 1990-04-10 1994-05-10 The United States Of America As Represented By The Secretary Of The Navy Method for laser-assisted etching of III-V and II-VI semiconductor compounds using chlorofluorocarbon ambients
US5840592A (en) * 1993-12-21 1998-11-24 The United States Of America As Represented By The Secretary Of The Navy Method of improving the spectral response and dark current characteristics of an image gathering detector
JPH098344A (ja) * 1995-06-14 1997-01-10 Hitachi Cable Ltd 発光ダイオード及びその製造方法
KR0178303B1 (ko) * 1995-10-27 1999-04-15 김은영 CBr4 개스를 이용한 반도체 패턴 측면의 에피성장율 조절방법
US6043509A (en) * 1996-12-13 2000-03-28 Hitachi Cable, Ltd. Light-emitting diode having moisture-proof characteristics and high output power
TW558666B (en) * 1997-09-25 2003-10-21 Toshiba Corp Method of manufacturing semiconductor apparatus
US6245144B1 (en) 1999-12-06 2001-06-12 Lucent Technologies Inc. Doping control in selective area growth (SAG) of InP epitaxy in the fabrication of solid state semiconductor lasers
CN1095514C (zh) * 2000-11-22 2002-12-04 中国科学院广州化学研究所 一种氯化木素及其衍生物的降解方法
US6479313B1 (en) * 2001-05-25 2002-11-12 Kopin Corporation Method of manufacturing GaN-based p-type compound semiconductors and light emitting diodes
JP2010232638A (ja) * 2009-03-03 2010-10-14 Hitachi Cable Ltd 発光素子用エピタキシャルウェハおよび発光素子

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59121917A (ja) * 1982-12-28 1984-07-14 Nec Corp 気相成長装置
US4657777A (en) * 1984-12-17 1987-04-14 Canon Kabushiki Kaisha Formation of deposited film
US4772486A (en) * 1985-02-18 1988-09-20 Canon Kabushiki Kaisha Process for forming a deposited film
US4778692A (en) * 1985-02-20 1988-10-18 Canon Kabushiki Kaisha Process for forming deposited film
FR2578095B1 (fr) * 1985-02-28 1988-04-15 Avitaya Francois D Procede et dispositif de depot par croissance epitaxiale d'un materiau dope
JPS6291494A (ja) * 1985-10-16 1987-04-25 Res Dev Corp Of Japan 化合物半導体単結晶成長方法及び装置
JPS62140485A (ja) * 1985-12-16 1987-06-24 Hitachi Ltd 半導体構造体およびその製造方法
US4918028A (en) * 1986-04-14 1990-04-17 Canon Kabushiki Kaisha Process for photo-assisted epitaxial growth using remote plasma with in-situ etching
JPH0821552B2 (ja) * 1986-05-12 1996-03-04 ソニー株式会社 不純物ド−ピング法
JPS6328030A (ja) * 1986-07-21 1988-02-05 Seiko Epson Corp 化合物半導体の結晶成長方法
JP2587623B2 (ja) * 1986-11-22 1997-03-05 新技術事業団 化合物半導体のエピタキシヤル結晶成長方法
US4885260A (en) * 1987-02-17 1989-12-05 Matsushita Electric Industrial Co., Ltd. Method of laser enhanced vapor phase growth for compound semiconductor
US4843031A (en) * 1987-03-17 1989-06-27 Matsushita Electric Industrial Co., Ltd. Method of fabricating compound semiconductor laser using selective irradiation
GB2204066A (en) * 1987-04-06 1988-11-02 Philips Electronic Associated A method for manufacturing a semiconductor device having a layered structure
JPH073909B2 (ja) * 1987-09-08 1995-01-18 三菱電機株式会社 半導体レーザの製造方法
JPH01198482A (ja) * 1988-02-01 1989-08-10 Canon Inc マイクロ波プラズマｃｖｄ法による堆積膜形成法
GB8806800D0 (en) * 1988-03-22 1988-04-20 British Telecomm Etching methods

Also Published As

Publication number Publication date
JPH02260417A (ja) 1990-10-23
EP0389718A2 (de) 1990-10-03
US5061643A (en) 1991-10-29
EP0389718B1 (de) 1995-03-08
EP0389718A3 (de) 1991-08-07
DE68921607T2 (de) 1995-07-27

Similar Documents

Publication Publication Date Title
DE3886023D1 (de) Verfahren und Vorrichtung zum Atomschicht-Epitaxie-Aufwachsen.
DE69227464D1 (de) Vorrichtung und verfahren zum aufnehmen einer substanz
DE3874212D1 (de) Vorrichtung und verfahren zum wechseln einer folienrolle zur umhuellung.
DE3888283D1 (de) Verfahren und Vorrichtung zum Herstellen einer texturierten gelochten Folie.
ATA84987A (de) Verfahren und vorrichtung zum automatischen trennen und anwickeln einer warenbahn
DE3675296D1 (de) Verfahren und vorrichtung zum darstellen einer abbildung eines einzigen parameters.
DE69033153D1 (de) Verfahren zur Herstellung einer Halbleiterdünnschicht und damit hergestellte Halbleiterdünnschicht
DE3682381D1 (de) Verfahren und vorrichtung zur kontrolle einer oberflaeche.
DE3177241D1 (de) Verfahren und vorrichtung zum bilden und wachsen eines einzelkristalles einer halbleiterverbindung.
DE68917046D1 (de) Verfahren und Vorrichtung zum automatischen Abfasen einer Halbleiterplatte.
DE3686614D1 (de) Vorrichtung und verfahren zum automatisierten manipulieren einer kassette.
DE69015550D1 (de) Verfahren zum Züchten eines Kristalls.
DE3775462D1 (de) Verfahren und einrichtung zum befestigen und loesen eines trommelartigen elementes.
DE68921607D1 (de) Verfahren zum Züchten einer kristallinen halbleitenden Dünnschicht und Vorrichtung dafür.
DE69015074D1 (de) Verfahren und Vorrichtung zur Durchführung einer Fermentation.
DE69619513D1 (de) Verfahren und vorrichtung zum züchten von einkristallen
DE69031976D1 (de) Verfahren und Vorrichtung zum epitaktischen Wachstum eines Kristalles einer chemischen Verbindung
ATA219888A (de) Verfahren und einrichtung zum intermittierenden aufspritzen einer pastoesen masse
DE68918149D1 (de) Vorrichtung und Verfahren zum Herstellen einer Vorrichtung.
AT361199B (de) Verfahren und vorrichtung zum befestigen einer abdichtungsschicht gegen eine unterlage
DE58904910D1 (de) Verfahren und vorrichtung zur herstellung einer tiefdruckform.
DE3678194D1 (de) Verfahren und vorrichtung zur herstellung eines duennen gegenstandes.
DE69019096D1 (de) Verfahren und Vorrichtung zur thermischen Behandlung einer kristallinen thermoplastischen Kunststoffolie.
DE69009831D1 (de) Verfahren zur Züchtung eines Einkristalls.
DE4092708T1 (de) Vorrichtung und Verfahren zum Erzeugen eines Einkristalls

Legal Events

Date Code Title Description
8320 Willingness to grant licences declared (paragraph 23)
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee