DE68910237T2 - Verfahren zum mit Hilfe Eines Lasers selektiven Anbringen eines in der Flüssigkeitsphase befindlichen Metalles auf einem Substrat. - Google Patents

Verfahren zum mit Hilfe Eines Lasers selektiven Anbringen eines in der Flüssigkeitsphase befindlichen Metalles auf einem Substrat.

Info

Publication number
DE68910237T2
DE68910237T2 DE89202094T DE68910237T DE68910237T2 DE 68910237 T2 DE68910237 T2 DE 68910237T2 DE 89202094 T DE89202094 T DE 89202094T DE 68910237 T DE68910237 T DE 68910237T DE 68910237 T2 DE68910237 T2 DE 68910237T2
Authority
DE
Germany
Prior art keywords
laser
substrate
metal
liquid phase
selectively applying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE89202094T
Other languages
English (en)
Other versions
DE68910237D1 (de
Inventor
Der Putten Andreas Martinu Van
Johannes Mathias Gerard Rikken
Johannes Wilhelmus Mari Jacobs
Kort Cornelis Gerardus Clem De
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of DE68910237D1 publication Critical patent/DE68910237D1/de
Publication of DE68910237T2 publication Critical patent/DE68910237T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/14—Decomposition by irradiation, e.g. photolysis, particle radiation or by mixed irradiation sources
    • C23C18/143—Radiation by light, e.g. photolysis or pyrolysis
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/32051—Deposition of metallic or metal-silicide layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
    • H01L21/76879—Filling of holes, grooves or trenches, e.g. vias, with conductive material by selective deposition of conductive material in the vias, e.g. selective C.V.D. on semiconductor material, plating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76886—Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances
    • H01L21/76892—Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances modifying the pattern
    • H01L21/76894—Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances modifying the pattern using a laser, e.g. laser cutting, laser direct writing, laser repair
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
    • H05K3/182—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method
    • H05K3/185—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method by making a catalytic pattern by photo-imaging
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/225—Correcting or repairing of printed circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemically Coating (AREA)
  • Electrodes Of Semiconductors (AREA)
DE89202094T 1988-08-18 1989-08-16 Verfahren zum mit Hilfe Eines Lasers selektiven Anbringen eines in der Flüssigkeitsphase befindlichen Metalles auf einem Substrat. Expired - Fee Related DE68910237T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8802047A NL8802047A (nl) 1988-08-18 1988-08-18 Werkwijze voor het selectief op een substraat aanbrengen van een metaal uit de vloeistoffase met behulp van een laser.

Publications (2)

Publication Number Publication Date
DE68910237D1 DE68910237D1 (de) 1993-12-02
DE68910237T2 true DE68910237T2 (de) 1994-05-05

Family

ID=19852774

Family Applications (1)

Application Number Title Priority Date Filing Date
DE89202094T Expired - Fee Related DE68910237T2 (de) 1988-08-18 1989-08-16 Verfahren zum mit Hilfe Eines Lasers selektiven Anbringen eines in der Flüssigkeitsphase befindlichen Metalles auf einem Substrat.

Country Status (5)

Country Link
US (1) US5059449A (de)
EP (1) EP0357124B1 (de)
JP (1) JPH02101171A (de)
DE (1) DE68910237T2 (de)
NL (1) NL8802047A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012023349B4 (de) 2012-11-29 2022-10-13 Hochschule München Verfahren und Vorrichtung zur strukturierten Beschichtung der Innenseite eines Schlauchs oder Rohrs

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4994352A (en) * 1988-11-25 1991-02-19 The Dow Chemical Company Dye-enhanced deposition of elemental metals and metalloids on substrates
US5167983A (en) * 1988-12-28 1992-12-01 General Electric Company Method of forming a conductor pattern on the inside of a hollow tube by reacting a gas or fluid therein with actinic radiation
US5171608A (en) * 1990-09-28 1992-12-15 The Unites States Of America As Represented By The Secretary Of The Navy Method of pattern transfer in photolithography using laser induced metallization
DE4125863A1 (de) * 1991-08-03 1993-02-04 Lpkf Cad Cam Systeme Gmbh Verfahren zum aufbringen von strukturierten metallschichten auf glassubstraten
US5209388A (en) * 1991-09-26 1993-05-11 Allied-Signal Inc. Process for bonding carbonaceous bodies
US5260108A (en) * 1992-03-10 1993-11-09 International Business Machines Corporation Selective seeding of Pd by excimer laser radiation through the liquid
US5378508A (en) * 1992-04-01 1995-01-03 Akzo Nobel N.V. Laser direct writing
TW392288B (en) 1997-06-06 2000-06-01 Dow Corning Thermally stable dielectric coatings
US6025038A (en) * 1998-08-26 2000-02-15 Board Of Regents Of The University Of Nebraska Method for depositing rare-earth boride onto a substrate
US6077617A (en) * 1998-08-26 2000-06-20 Board Of Regents Of The University Of Nebraska Rare-earth boride thin film system
US6419998B1 (en) 2000-06-19 2002-07-16 Mcgrath Thomas Method for deposition of metal catalysts on inert supports
US7135405B2 (en) 2004-08-04 2006-11-14 Hewlett-Packard Development Company, L.P. Method to form an interconnect
WO2007085452A1 (de) * 2006-01-25 2007-08-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und vorrichtung zur präzisionsbearbeitung von substraten mittels eines in einen flüssigkeitsstrahl eingekoppelten laser und dessen verwendung
GB0700021D0 (en) * 2007-01-02 2007-02-07 Univ Surrey Methods of adhering particles to a material by heating
DE102007010872A1 (de) 2007-03-06 2008-09-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Präzisionsbearbeitung von Substraten und dessen Verwendung
DE102007018845B4 (de) 2007-04-20 2009-11-12 Carl Von Ossietzky Universität Oldenburg Verfahren zur Abscheidung einer metallhaltigen Substanz auf einem Substrat und Beschichtungsmaterial dafür
JP5216633B2 (ja) 2008-03-19 2013-06-19 ローム・アンド・ハース・エレクトロニック・マテリアルズ，エル．エル．シー． バックグラウンドめっきを抑制する方法
EP2157209B1 (de) * 2008-07-31 2014-10-22 Rohm and Haas Electronic Materials LLC Hemmung der Hintergrundplattierung
US20110123728A1 (en) * 2009-11-25 2011-05-26 Ricoh Company, Ltd. Thin film manufacturing method and thin film element
WO2015189875A1 (ja) * 2014-06-12 2015-12-17 富士電機株式会社 不純物添加装置、不純物添加方法及び半導体素子の製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4126468A (en) * 1975-06-28 1978-11-21 Vickers Limited Radiation sensitive compositions of quaternary ammonium salt and carboxylic acid sensitizer
US4239789A (en) * 1979-05-08 1980-12-16 International Business Machines Corporation Maskless method for electroless plating patterns
US4444801A (en) * 1981-01-14 1984-04-24 Hitachi, Ltd. Method and apparatus for correcting transparent defects on a photomask
US4349583A (en) * 1981-07-28 1982-09-14 International Business Machines Corporation Laser enhanced maskless method for plating and simultaneous plating and etching of patterns
JPS58203443A (ja) * 1982-05-24 1983-11-26 Hitachi Ltd ホトマスクの白点欠陥修正用組成物
US4511597A (en) * 1983-10-12 1985-04-16 Kollmorgen Technologies Corporation Method for depositing a metal on a surface
US4526807A (en) * 1984-04-27 1985-07-02 General Electric Company Method for deposition of elemental metals and metalloids on substrates
US4659587A (en) * 1984-10-11 1987-04-21 Hitachi, Ltd. Electroless plating process and process for producing multilayer wiring board

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012023349B4 (de) 2012-11-29 2022-10-13 Hochschule München Verfahren und Vorrichtung zur strukturierten Beschichtung der Innenseite eines Schlauchs oder Rohrs

Also Published As

Publication number Publication date
NL8802047A (nl) 1990-03-16
EP0357124A2 (de) 1990-03-07
EP0357124B1 (de) 1993-10-27
JPH02101171A (ja) 1990-04-12
DE68910237D1 (de) 1993-12-02
US5059449A (en) 1991-10-22
EP0357124A3 (en) 1990-03-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PHILIPS ELECTRONICS N.V., EINDHOVEN, NL

8339 Ceased/non-payment of the annual fee