DE68907001D1 - Polysilicium mit vermindertem wasserstoffgehalt. - Google Patents
Polysilicium mit vermindertem wasserstoffgehalt.Info
- Publication number
- DE68907001D1 DE68907001D1 DE8989117962T DE68907001T DE68907001D1 DE 68907001 D1 DE68907001 D1 DE 68907001D1 DE 8989117962 T DE8989117962 T DE 8989117962T DE 68907001 T DE68907001 T DE 68907001T DE 68907001 D1 DE68907001 D1 DE 68907001D1
- Authority
- DE
- Germany
- Prior art keywords
- polysilicium
- hydrogen content
- reduced hydrogen
- reduced
- content
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/037—Purification
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/029—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of monosilane
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US25596788A | 1988-10-11 | 1988-10-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68907001D1 true DE68907001D1 (de) | 1993-07-15 |
DE68907001T2 DE68907001T2 (de) | 1993-09-16 |
Family
ID=22970598
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8989117962T Expired - Lifetime DE68907001T2 (de) | 1988-10-11 | 1989-09-28 | Polysilicium mit vermindertem wasserstoffgehalt. |
DE198989117962T Pending DE363742T1 (de) | 1988-10-11 | 1989-09-28 | Polysilicium mit vermindertem wasserstoffgehalt. |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE198989117962T Pending DE363742T1 (de) | 1988-10-11 | 1989-09-28 | Polysilicium mit vermindertem wasserstoffgehalt. |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP0363742B1 (de) |
JP (1) | JP3022576B2 (de) |
KR (1) | KR930006696B1 (de) |
CA (1) | CA1340189C (de) |
DE (2) | DE68907001T2 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5165908A (en) * | 1988-03-31 | 1992-11-24 | Advanced Silicon Materials, Inc. | Annular heated fluidized bed reactor |
US5326547A (en) * | 1988-10-11 | 1994-07-05 | Albemarle Corporation | Process for preparing polysilicon with diminished hydrogen content by using a two-step heating process |
CA2038175A1 (en) * | 1990-04-02 | 1991-10-03 | Albemarle Corporation | Polysilicon and process therefor |
JPH0822795B2 (ja) * | 1991-11-29 | 1996-03-06 | 東芝セラミックス株式会社 | シリコン単結晶の製造方法 |
JP2506525B2 (ja) * | 1992-01-30 | 1996-06-12 | 信越半導体株式会社 | シリコン単結晶の製造方法 |
US5405658A (en) * | 1992-10-20 | 1995-04-11 | Albemarle Corporation | Silicon coating process |
KR960009391B1 (en) * | 1993-12-24 | 1996-07-18 | Korea Inst Sci & Tech | Apparatus and method of measuring flow velocity |
US5798137A (en) | 1995-06-07 | 1998-08-25 | Advanced Silicon Materials, Inc. | Method for silicon deposition |
US7291222B2 (en) * | 2004-06-18 | 2007-11-06 | Memc Electronic Materials, Inc. | Systems and methods for measuring and reducing dust in granular material |
US20060105105A1 (en) * | 2004-11-12 | 2006-05-18 | Memc Electronic Materials, Inc. | High purity granular silicon and method of manufacturing the same |
DE102015216144A1 (de) * | 2015-08-24 | 2017-03-02 | Wacker Chemie Ag | Sinterfilter aus polykristallinem Silicium |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4820587A (en) * | 1986-08-25 | 1989-04-11 | Ethyl Corporation | Polysilicon produced by a fluid bed process |
-
1989
- 1989-09-20 CA CA000612125A patent/CA1340189C/en not_active Expired - Fee Related
- 1989-09-28 EP EP89117962A patent/EP0363742B1/de not_active Expired - Lifetime
- 1989-09-28 DE DE8989117962T patent/DE68907001T2/de not_active Expired - Lifetime
- 1989-09-28 DE DE198989117962T patent/DE363742T1/de active Pending
- 1989-10-09 JP JP1262279A patent/JP3022576B2/ja not_active Expired - Lifetime
- 1989-10-11 KR KR1019890014577A patent/KR930006696B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE363742T1 (de) | 1990-10-18 |
EP0363742A1 (de) | 1990-04-18 |
EP0363742B1 (de) | 1993-06-09 |
JPH02153814A (ja) | 1990-06-13 |
JP3022576B2 (ja) | 2000-03-21 |
DE68907001T2 (de) | 1993-09-16 |
CA1340189C (en) | 1998-12-15 |
KR930006696B1 (ko) | 1993-07-22 |
KR900006408A (ko) | 1990-05-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: ALBEMARLE CORP., RICHMOND, VA., US |