DE68905852D1 - Ultraschallwandler und verfahren zu dessen herstellung. - Google Patents

Ultraschallwandler und verfahren zu dessen herstellung.

Info

Publication number
DE68905852D1
DE68905852D1 DE8989200917T DE68905852T DE68905852D1 DE 68905852 D1 DE68905852 D1 DE 68905852D1 DE 8989200917 T DE8989200917 T DE 8989200917T DE 68905852 T DE68905852 T DE 68905852T DE 68905852 D1 DE68905852 D1 DE 68905852D1
Authority
DE
Germany
Prior art keywords
production
ultrasonic transducer
transducer
ultrasonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8989200917T
Other languages
English (en)
Other versions
DE68905852T2 (de
Inventor
Kazuo Sato
Hiroshi Kanda
Shigeo Kato
Kuninori Imai
Takeji Shiokawa
Shinji Tanaka
Isao Ishikawa
Harumassa Onozato
Hisayoshi Hashimoto
Morio Tamura
Kazuyoshi Hatano
Fujio Sato
Ken Ichiryuu
Kiyoshi Tanaka
Takao Kawanuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Construction Machinery Co Ltd
Hitachi Ltd
Original Assignee
Hitachi Construction Machinery Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Construction Machinery Co Ltd, Hitachi Ltd filed Critical Hitachi Construction Machinery Co Ltd
Publication of DE68905852D1 publication Critical patent/DE68905852D1/de
Application granted granted Critical
Publication of DE68905852T2 publication Critical patent/DE68905852T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18—Methods or devices for transmitting, conducting or directing sound
    • G10K11/26—Sound-focusing or directing, e.g. scanning
    • G10K11/30—Sound-focusing or directing, e.g. scanning using refraction, e.g. acoustic lenses
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
DE8989200917T 1988-04-13 1989-04-12 Ultraschallwandler und verfahren zu dessen herstellung. Expired - Fee Related DE68905852T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8905988 1988-04-13
JP28772088 1988-11-16

Publications (2)

Publication Number Publication Date
DE68905852D1 true DE68905852D1 (de) 1993-05-13
DE68905852T2 DE68905852T2 (de) 1993-07-15

Family

ID=26430496

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8989200917T Expired - Fee Related DE68905852T2 (de) 1988-04-13 1989-04-12 Ultraschallwandler und verfahren zu dessen herstellung.

Country Status (4)

Country Link
US (2) US5003516A (de)
EP (1) EP0337575B1 (de)
JP (1) JP2730756B2 (de)
DE (1) DE68905852T2 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5299175A (en) * 1989-10-06 1994-03-29 Consejo Superior De Investigaciones Cientificas Electroacoustic unit for generating high sonic and ultra-sonic intensities in gases and interphases
CN1019919C (zh) * 1990-03-08 1993-02-17 清华大学 具有新型声镜的反射式声显微镜
US5127410A (en) * 1990-12-06 1992-07-07 Hewlett-Packard Company Ultrasound probe and lens assembly for use therein
US5177993A (en) * 1991-07-22 1993-01-12 Ivac Corporation Air-in-line sensor
CA2104894A1 (en) * 1992-11-19 1994-05-20 Robert P. Kraus, Jr. Entrained air measurement apparatus and method
JP3243047B2 (ja) * 1993-03-12 2002-01-07 呉羽化学工業株式会社 受波型圧電素子
WO1997003834A1 (fr) * 1995-07-14 1997-02-06 Seiko Epson Corporation Tete laminee pour impression par jets d'encre, son procede de fabrication et imprimantes en etant equipees
EP0847527B1 (de) * 1995-08-31 2001-12-12 Alcan International Limited Ultraschallwandlern zur verwendung in rauhe umgebungen
US5708209A (en) * 1996-08-27 1998-01-13 Aluminum Company Of America Apparatus and method for ultrasonic particle detection in molten metal
US6202658B1 (en) 1998-11-11 2001-03-20 Applied Materials, Inc. Method and apparatus for cleaning the edge of a thin disc
US6311702B1 (en) 1998-11-11 2001-11-06 Applied Materials, Inc. Megasonic cleaner
US6237419B1 (en) * 1999-08-16 2001-05-29 General Electric Company Aspherical curved element transducer to inspect a part with curved entry surface
US6277656B1 (en) * 1999-09-30 2001-08-21 Rama R. Goruganthu Substrate removal as a function of acoustic analysis
WO2001075985A1 (fr) * 2000-03-30 2001-10-11 Fujitsu Limited Actionneur piezoelectrique, son procede de fabrication et tete a jet d'encre dotee de cet actionneur
JP2001299747A (ja) * 2000-04-20 2001-10-30 Nippon Koden Corp 超音波３次元走査プローブ
JP4723732B2 (ja) * 2000-07-12 2011-07-13 セイコーインスツル株式会社 脈検出装置及び超音波診断装置
GB0201978D0 (en) * 2002-01-29 2002-03-13 Young Michael J R Method and apparatus for focussing ultrasonic energy
US7360417B2 (en) * 2005-01-10 2008-04-22 Gems Sensors, Inc. Fluid level detector
DE102005061343B4 (de) * 2005-12-21 2010-11-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Ultraschallwandler mit selbsttragender Anpassschicht sowie Verfahren zur Herstellung
DE102006033372B4 (de) * 2006-02-17 2010-04-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Ultraschallaktor zur Reinigung von Objekten
KR100887226B1 (ko) * 2007-09-19 2009-03-06 세메스 주식회사 초음파 진동 생성 장치 및 방법 그리고 웨이퍼 세정 장치및 방법
KR100970415B1 (ko) 2008-02-25 2010-07-15 채희천 멤스 초음파 트랜스듀서 및 이를 가지는 비만치료장치
WO2016161109A1 (en) * 2015-03-31 2016-10-06 The Regents Of The University Of California System and method for tunable patterning and assembly of particles via acoustophoresis
CN104984890B (zh) * 2015-06-06 2017-12-08 中国科学院合肥物质科学研究院 一种柔性聚焦mems超声波发生器及其制备方法
RU197438U1 (ru) * 2020-01-09 2020-04-27 Федеральное государственное бюджетное образовательное учреждение высшего образования "Сибирский государственный университет геосистем и технологий" (СГУГиТ) Устройство субволновой фокусировки поверхностных упругих волн

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3913061A (en) * 1973-04-25 1975-10-14 Stanford Research Inst Focusing and deflecting system for acoustic imaging
JPS56103327A (en) * 1980-01-21 1981-08-18 Hitachi Ltd Ultrasonic image pickup apparatus
US4321696A (en) * 1980-02-12 1982-03-23 Hitachi, Ltd. Ultrasonic transducer using ultra high frequency
US4349796A (en) * 1980-12-15 1982-09-14 Bell Telephone Laboratories, Incorporated Devices incorporating phonon filters
JPS584197A (ja) * 1981-07-01 1983-01-11 日立建機株式会社 音響球面レンズ
JPS5993495A (ja) * 1982-11-19 1984-05-29 日立建機株式会社 音響球面レンズ
FR2570199B1 (fr) * 1984-09-12 1986-12-26 Centre Nat Rech Scient Microscope acoustique pour analyser un objet en profondeur comportant des lentilles aspheriques
JPH0622065B2 (ja) * 1987-02-25 1994-03-23 株式会社日立製作所 集積型光ヘツド
DE3887762T2 (de) * 1987-03-17 1994-09-08 Matsushita Electric Ind Co Ltd Optischer Kopf.
US4782350A (en) * 1987-10-28 1988-11-01 Xerox Corporation Amorphous silicon varactors as rf amplitude modulators and their application to acoustic ink printers

Also Published As

Publication number Publication date
JP2730756B2 (ja) 1998-03-25
JPH02222834A (ja) 1990-09-05
EP0337575A3 (en) 1989-11-29
EP0337575B1 (de) 1993-04-07
US5003516A (en) 1991-03-26
US5050137A (en) 1991-09-17
EP0337575A2 (de) 1989-10-18
DE68905852T2 (de) 1993-07-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee