DE60316977D1 - Verfahren zur herstellung einer beweglichen linsenstruktur für eine lichtformungseinheit - Google Patents

Verfahren zur herstellung einer beweglichen linsenstruktur für eine lichtformungseinheit

Info

Publication number
DE60316977D1
DE60316977D1 DE60316977T DE60316977T DE60316977D1 DE 60316977 D1 DE60316977 D1 DE 60316977D1 DE 60316977 T DE60316977 T DE 60316977T DE 60316977 T DE60316977 T DE 60316977T DE 60316977 D1 DE60316977 D1 DE 60316977D1
Authority
DE
Germany
Prior art keywords
producing
lens
forming
movable lens
forming unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60316977T
Other languages
English (en)
Other versions
DE60316977T2 (de
Inventor
Gert Andersson
Stefan Bengtsson
Sverker Hard
Anders Larsson
Fredrik Nikolajeff
Henrik Roedjegard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Imego AB
Original Assignee
Imego AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imego AB filed Critical Imego AB
Application granted granted Critical
Publication of DE60316977D1 publication Critical patent/DE60316977D1/de
Publication of DE60316977T2 publication Critical patent/DE60316977T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00142—Bridges
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12102—Lens

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Eyeglasses (AREA)
DE60316977T 2002-11-05 2003-11-04 Verfahren zur herstellung einer beweglichen linsenstruktur für eine lichtformungseinheit Expired - Lifetime DE60316977T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SE0203266 2002-11-05
SE0203266A SE521533C2 (sv) 2002-11-05 2002-11-05 Förfarande för att tillverka en rörlig struktur för en ljusformande enhet
PCT/SE2003/001709 WO2004042442A1 (en) 2002-11-05 2003-11-04 Method of producing a movable lens structure for a light shaping unit

Publications (2)

Publication Number Publication Date
DE60316977D1 true DE60316977D1 (de) 2007-11-29
DE60316977T2 DE60316977T2 (de) 2008-07-31

Family

ID=20289471

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60316977T Expired - Lifetime DE60316977T2 (de) 2002-11-05 2003-11-04 Verfahren zur herstellung einer beweglichen linsenstruktur für eine lichtformungseinheit

Country Status (8)

Country Link
US (1) US8298457B2 (de)
EP (1) EP1558954B1 (de)
JP (1) JP4463108B2 (de)
AT (1) ATE376199T1 (de)
AU (1) AU2003278666A1 (de)
DE (1) DE60316977T2 (de)
SE (1) SE521533C2 (de)
WO (1) WO2004042442A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5035188B2 (ja) * 2008-09-10 2012-09-26 コニカミノルタホールディングス株式会社 撮像装置の製造方法および撮像装置
US8675293B2 (en) * 2010-01-25 2014-03-18 Axsun Technologies, Inc. SOI lens structure for medical probe
US10281715B2 (en) * 2015-06-16 2019-05-07 Young Optics Inc. Imaging displacement module

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4423396C2 (de) 1994-07-04 2001-10-25 Fraunhofer Ges Forschung Verfahren zum Herstellen einer mikromechanischen Oberflächenstruktur
FR2734065B1 (fr) * 1995-05-12 1997-06-06 Commissariat Energie Atomique Composants microoptiques et microdeflecteurs optomecaniques a deplacement de microlentilles
DE19600399C1 (de) * 1996-01-08 1997-08-21 Siemens Ag Herstellverfahren für ein mikromechanisches Bauteil mit einer beweglichen Struktur
FR2747802B1 (fr) * 1996-04-18 1998-05-15 Commissariat Energie Atomique Microdispositif optomecanique, et application a un microdeflecteur optomecanique
US6446467B1 (en) * 1997-07-29 2002-09-10 Physical Optics Corporation Monolithic glass light shaping diffuser and method for its production
JPH1172723A (ja) 1997-08-29 1999-03-16 Omron Corp マイクロ光学素子，機能素子ユニット，およびこれらの製造方法
US6054335A (en) * 1997-12-12 2000-04-25 Xerox Corporation Fabrication of scanning III-V compound light emitters integrated with Si-based actuators
US6074888A (en) * 1998-08-18 2000-06-13 Trw Inc. Method for fabricating semiconductor micro epi-optical components
US6091537A (en) * 1998-12-11 2000-07-18 Xerox Corporation Electro-actuated microlens assemblies
JP2001155201A (ja) * 1999-11-25 2001-06-08 Yazaki Corp 運行記録計用記録紙

Also Published As

Publication number Publication date
SE0203266D0 (sv) 2002-11-05
DE60316977T2 (de) 2008-07-31
EP1558954B1 (de) 2007-10-17
JP4463108B2 (ja) 2010-05-12
JP2006505428A (ja) 2006-02-16
US8298457B2 (en) 2012-10-30
SE0203266L (sv) 2003-11-11
SE521533C2 (sv) 2003-11-11
US20060012849A1 (en) 2006-01-19
EP1558954A1 (de) 2005-08-03
WO2004042442A1 (en) 2004-05-21
ATE376199T1 (de) 2007-11-15
AU2003278666A1 (en) 2004-06-07

Similar Documents

Publication Publication Date Title
DE69927547D1 (de) Verfahren zur Herstellung von mikro-elektromechanischen Anordnungen hoher Isolation
DE50106029D1 (de) Verfahren zur Herstellung von Polycarbonat
ATE334809T1 (de) Verfahren zur herstellung von einem beschichteten optischen gegenstand
DE69941555D1 (de) Verfahren zur Herstellung einer Giessform für Mikro-Linsen
DE69604560D1 (de) Die herstellung von fluorinierten organischen verbindungen
ATE306315T1 (de) Verfahren zur herstellung blauer mikrokapseln
ATE443756T1 (de) Chondroitin synthasegen und verfahren zur dessen herstellung und anwendung
ATE455778T1 (de) Verfahren zur herstellung form i von (s)-(+)- clopidogrelbisulfat
DE50212806D1 (de) Verfahren zur herstellung eines brillenglases
EP0866086A3 (de) Verfahren zur Herstellung SiOH-funktioneller Carbosilan-Dendrimere
DE69418581D1 (de) Verfahren zur herstellung dünner bleche, geeignet für die anfertigung von dosenteilen
ATE327219T1 (de) Verfahren zur herstellung von hydroxymethylthiobuttersäure
DE60316977D1 (de) Verfahren zur herstellung einer beweglichen linsenstruktur für eine lichtformungseinheit
DE60015189D1 (de) Verfahren zur Herstellung von SiON-Wellenleiter
DE59610348D1 (de) Verfahren zur Herstellung hellfarbiger, niedrigviskoser Tensidkonzentrate
DE60300144D1 (de) Verfahren zur Herstellung von Al-Sinterlegierung
ATE368427T1 (de) Verfahren und vorrichtung zur herstellung einer dentalkeramischen struktur
DE60015563D1 (de) Verfahren zur herstellung von benzoperhydroisoindolen
DE60105314D1 (de) Verfahren zur herstellung von taxanderivaten
DE69932587D1 (de) Verfahren zur Herstellung von integrierten Bauelementen mit elektromechanischen Mikrostrukturen, ohne Restspannung
ATE462687T1 (de) Verfahren zur herstellung von azoverbindungen
ATE297841T1 (de) Verfahren zur herstellung einer matrix und nach diesem verfahren hergestellte matrix
DE60018221D1 (de) Zusammensetzungen und verfahren zur herstellung von ophtalmischen linsen
DE60103560D1 (de) Prozess zur herstellung von paclitaxel
DE50201040D1 (de) Verfahren zur herstellung eines brillenglases unter berücksichtigung der optimalen, individuellen progressionslänge

Legal Events

Date Code Title Description
8364 No opposition during term of opposition