DE60313121D1 - Dampfsaugstrahlpumpe mit ejektorpumpenstufe - Google Patents

Dampfsaugstrahlpumpe mit ejektorpumpenstufe

Info

Publication number
DE60313121D1
DE60313121D1 DE60313121T DE60313121T DE60313121D1 DE 60313121 D1 DE60313121 D1 DE 60313121D1 DE 60313121 T DE60313121 T DE 60313121T DE 60313121 T DE60313121 T DE 60313121T DE 60313121 D1 DE60313121 D1 DE 60313121D1
Authority
DE
Germany
Prior art keywords
pump
steam exhaust
level
ejector
exhaust pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60313121T
Other languages
English (en)
Other versions
DE60313121T2 (de
Inventor
Marsbed Hablanian
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Inc
Original Assignee
Varian Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Inc filed Critical Varian Inc
Application granted granted Critical
Publication of DE60313121D1 publication Critical patent/DE60313121D1/de
Publication of DE60313121T2 publication Critical patent/DE60313121T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • F04F9/04—Diffusion pumps in combination with fore pumps, e.g. use of isolating valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Jet Pumps And Other Pumps (AREA)
DE60313121T 2002-11-07 2003-11-03 Dampfsaugstrahlpumpe mit ejektorpumpenstufe Expired - Lifetime DE60313121T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US290866 2002-11-07
US10/290,866 US6767192B2 (en) 2002-11-07 2002-11-07 Vapor jet pump with ejector stage in foreline
PCT/US2003/035214 WO2004044435A1 (en) 2002-11-07 2003-11-03 Vapor jet vacuum pump having ejector stage in foreline conduit

Publications (2)

Publication Number Publication Date
DE60313121D1 true DE60313121D1 (de) 2007-05-24
DE60313121T2 DE60313121T2 (de) 2008-01-03

Family

ID=32229137

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60313121T Expired - Lifetime DE60313121T2 (de) 2002-11-07 2003-11-03 Dampfsaugstrahlpumpe mit ejektorpumpenstufe

Country Status (4)

Country Link
US (1) US6767192B2 (de)
EP (1) EP1468191B1 (de)
DE (1) DE60313121T2 (de)
WO (1) WO2004044435A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008032825B3 (de) * 2008-07-11 2010-01-14 Siemens Aktiengesellschaft Strahlpumpe sowie Verfahren zu deren Betrieb
US9133796B2 (en) 2013-03-08 2015-09-15 Ford Global Technologies, Llc Multi-path purge ejector system
WO2014141421A1 (ja) * 2013-03-14 2014-09-18 株式会社シンクロン 油拡散ポンプ及び真空成膜装置
US11519419B2 (en) 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface
CN113266609B (zh) * 2021-06-02 2023-04-07 傅朝清 热液喷射多单元蒸气压缩装置及热泵

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2150685A (en) * 1937-03-11 1939-03-14 Distillation Products Inc Process and means for the production of vacua
FR879667A (fr) * 1940-04-13 1943-03-02 Oerlikon Maschf Système de pompes à vide
GB564655A (en) * 1942-04-01 1944-10-06 Stokes Machine Co Improvements in vacuum pumping systems
US2386298A (en) * 1943-01-30 1945-10-09 Nat Res Corp Diffusion pump
US2361245A (en) * 1943-03-27 1944-10-24 Westinghouse Electric & Mfg Co Vacuum pump
US2386299A (en) * 1944-07-03 1945-10-09 Nat Res Corp Diffusion pump
US2464369A (en) * 1945-02-16 1949-03-15 Distillation Products Inc Ejector and condensation pump
US2465590A (en) * 1945-05-11 1949-03-29 Distillation Products Inc Vacuum pump
US2696344A (en) * 1951-08-21 1954-12-07 Edwards & Co London Ltd W Vapor vacuum pump
US2714484A (en) * 1953-02-02 1955-08-02 Nat Res Corp High-vacuum device
US2797043A (en) * 1953-06-16 1957-06-25 Cons Electrodynamics Corp Vacuum pump
DE928314C (de) * 1953-09-25 1955-05-31 Siemens Ag Pumpenanordnung zur Erzeugung eines Hochvakuums
US4845360A (en) 1987-12-10 1989-07-04 Varian Associates, Inc. Counterflow leak detector with high and low sensitivity operating modes

Also Published As

Publication number Publication date
US20040091364A1 (en) 2004-05-13
US6767192B2 (en) 2004-07-27
DE60313121T2 (de) 2008-01-03
EP1468191B1 (de) 2007-04-11
WO2004044435A1 (en) 2004-05-27
EP1468191A1 (de) 2004-10-20

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