DE60312943D1 - UV akustooptisches Gerät und optische bildgebende Vorrichtung, die dasselbe verwendet - Google Patents

UV akustooptisches Gerät und optische bildgebende Vorrichtung, die dasselbe verwendet

Info

Publication number
DE60312943D1
DE60312943D1 DE60312943T DE60312943T DE60312943D1 DE 60312943 D1 DE60312943 D1 DE 60312943D1 DE 60312943 T DE60312943 T DE 60312943T DE 60312943 T DE60312943 T DE 60312943T DE 60312943 D1 DE60312943 D1 DE 60312943D1
Authority
DE
Germany
Prior art keywords
same
optical imaging
acoustooptic
imaging device
acoustooptic device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60312943T
Other languages
English (en)
Other versions
DE60312943T2 (de
Inventor
Hisashi Minemoto
Toshimi Nishiyama
Kimihiko Shibuya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE60312943D1 publication Critical patent/DE60312943D1/de
Application granted granted Critical
Publication of DE60312943T2 publication Critical patent/DE60312943T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/0009—Materials therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
DE60312943T 2002-11-05 2003-11-03 UV akustooptisches Gerät und optische bildgebende Vorrichtung, die dasselbe verwendet Expired - Lifetime DE60312943T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002320893 2002-11-05
JP2002320893 2002-11-05

Publications (2)

Publication Number Publication Date
DE60312943D1 true DE60312943D1 (de) 2007-05-16
DE60312943T2 DE60312943T2 (de) 2007-12-13

Family

ID=32105414

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60312943T Expired - Lifetime DE60312943T2 (de) 2002-11-05 2003-11-03 UV akustooptisches Gerät und optische bildgebende Vorrichtung, die dasselbe verwendet

Country Status (4)

Country Link
US (2) US6903862B2 (de)
EP (1) EP1418463B1 (de)
CN (1) CN100380224C (de)
DE (1) DE60312943T2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006003955A1 (ja) * 2004-06-30 2006-01-12 Matsushita Electric Industrial Co., Ltd. 音響光学素子及びそれを用いた光描画装置
US7876420B2 (en) * 2004-12-07 2011-01-25 Asml Holding N.V. System and method utilizing an electrooptic modulator
US20060164711A1 (en) * 2005-01-24 2006-07-27 Asml Holding N.V. System and method utilizing an electrooptic modulator
US20090227093A1 (en) * 2006-02-17 2009-09-10 Cornell Research Foundation, Inc Patterning During Film Growth
CN100428000C (zh) * 2007-02-02 2008-10-22 中国电子科技集团公司第二十六研究所 用陶瓷材料吸声的声光器件
CN102684057B (zh) * 2011-03-11 2014-02-26 苏州生物医学工程技术研究所 一种紫外及可见光波段声光q开关
CN105068280B (zh) * 2015-07-17 2019-05-24 中国科学院理化技术研究所 一种氟代硼铍酸钾族晶体材料的用途及声光器件
US10996540B2 (en) * 2018-04-26 2021-05-04 Mycronic AB Compact alpha-BBO acousto-optic deflector with high resolving power for UV and visible radiation

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3818129A (en) * 1971-06-30 1974-06-18 Hitachi Ltd Laser imaging device
US3798746A (en) * 1972-10-10 1974-03-26 Rca Corp Process of making acousto-optic devices
US4126834A (en) * 1977-06-27 1978-11-21 Gte Sylvania Incorporated Bulk wave bragg cell
US4205348A (en) 1978-07-05 1980-05-27 Xerox Corporation Laser scanning utilizing facet tracking and acousto pulse imaging techniques
US4610754A (en) * 1982-10-29 1986-09-09 Westinghouse Electric Corp. Method for growing crystals
US4661699A (en) * 1983-03-28 1987-04-28 T. R. Whitney Corporation Scanning beam control system and method with bi-directional reference scale
JPS6029725A (ja) * 1983-07-28 1985-02-15 Hoya Corp 音響光学変調装置
JPH03179327A (ja) 1989-09-25 1991-08-05 Fuji Photo Film Co Ltd 導波路型音響光学素子
JPH04260050A (ja) * 1990-10-24 1992-09-16 Xerox Corp フィルター付き感光体
US5463493A (en) * 1993-01-19 1995-10-31 Mvm Electronics Acousto-optic polychromatic light modulator
US5801389A (en) * 1995-05-30 1998-09-01 Nikon Corporation Acousto-optic modulator, position detector using it, and projection exposure apparatus
US6744555B2 (en) * 1997-11-21 2004-06-01 Imra America, Inc. Ultrashort-pulse source with controllable wavelength output
US6416865B1 (en) 1998-10-30 2002-07-09 Sumitomo Electric Industries, Ltd. Hard carbon film and surface acoustic-wave substrate
US6151427A (en) * 1999-04-20 2000-11-21 The United States Of America As Represented By The National Security Agency Tunable optic fiber bandpass filter using flexural acoustic waves
DE10113788A1 (de) 2001-03-21 2002-09-26 Zeiss Carl Beugungsoptische Komponente, Beleuchtungssystem und Belichtungssystem mit einer solchen beugungsoptischen Komponente und Belichtungsverfahren unter Verwendung eines solchen Belichtungssystems
CN1128380C (zh) * 2001-04-29 2003-11-19 中国科学院上海硅酸盐研究所 用稀土离子改性的钨酸铅晶体制作的声光调制器

Also Published As

Publication number Publication date
US20040090660A1 (en) 2004-05-13
US20050117198A1 (en) 2005-06-02
CN1499244A (zh) 2004-05-26
EP1418463A1 (de) 2004-05-12
EP1418463B1 (de) 2007-04-04
CN100380224C (zh) 2008-04-09
US6903862B2 (en) 2005-06-07
DE60312943T2 (de) 2007-12-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP