DE60307672D1 - Mikromechanischer elektrostatischer schalter mit niedriger betätigungsspannung - Google Patents
Mikromechanischer elektrostatischer schalter mit niedriger betätigungsspannungInfo
- Publication number
- DE60307672D1 DE60307672D1 DE60307672T DE60307672T DE60307672D1 DE 60307672 D1 DE60307672 D1 DE 60307672D1 DE 60307672 T DE60307672 T DE 60307672T DE 60307672 T DE60307672 T DE 60307672T DE 60307672 D1 DE60307672 D1 DE 60307672D1
- Authority
- DE
- Germany
- Prior art keywords
- electrodes
- conductor paths
- distortion means
- operating voltage
- distorting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004020 conductor Substances 0.000 abstract 4
- 239000011810 insulating material Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
- H01H2059/0063—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stepped actuation, e.g. actuation voltages applied to different sets of electrodes at different times or different spring constants during actuation
Landscapes
- Micromachines (AREA)
- Push-Button Switches (AREA)
- Contacts (AREA)
- Electronic Switches (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0214944A FR2848020B1 (fr) | 2002-11-28 | 2002-11-28 | Micro-commutateur electrostatique pour composants a faible tension d'actionnement |
FR0214944 | 2002-11-28 | ||
PCT/FR2003/050138 WO2004051688A1 (fr) | 2002-11-28 | 2003-11-27 | Micro-commutateur electrostatique pour composant a faible tension d’actionnement |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60307672D1 true DE60307672D1 (de) | 2006-09-28 |
DE60307672T2 DE60307672T2 (de) | 2007-09-06 |
Family
ID=32309783
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60307672T Expired - Lifetime DE60307672T2 (de) | 2002-11-28 | 2003-11-27 | Mikromechanischer elektrostatischer schalter mit niedriger betätigungsspannung |
Country Status (6)
Country | Link |
---|---|
US (1) | US7283023B2 (de) |
EP (1) | EP1565922B1 (de) |
AT (1) | ATE336799T1 (de) |
DE (1) | DE60307672T2 (de) |
FR (1) | FR2848020B1 (de) |
WO (1) | WO2004051688A1 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2868591B1 (fr) * | 2004-04-06 | 2006-06-09 | Commissariat Energie Atomique | Microcommutateur a faible tension d'actionnement et faible consommation |
US7466215B2 (en) * | 2005-08-04 | 2008-12-16 | Wireless Mems, Inc. | Balanced MEMS switch for next generation communication systems |
GB0516516D0 (en) * | 2005-08-11 | 2005-09-21 | Cosmetic Warriors Ltd | Incense candles |
US9234979B2 (en) | 2009-12-08 | 2016-01-12 | Magna Closures Inc. | Wide activation angle pinch sensor section |
US8493081B2 (en) | 2009-12-08 | 2013-07-23 | Magna Closures Inc. | Wide activation angle pinch sensor section and sensor hook-on attachment principle |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9309327D0 (en) * | 1993-05-06 | 1993-06-23 | Smith Charles G | Bi-stable memory element |
US6115231A (en) * | 1997-11-25 | 2000-09-05 | Tdk Corporation | Electrostatic relay |
EP1156504A3 (de) * | 2000-05-16 | 2003-12-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanisches Relais mit verbessertem Schaltverhalten |
JP2002075156A (ja) * | 2000-09-01 | 2002-03-15 | Nec Corp | マイクロスイッチおよびその製造方法 |
SE0101182D0 (sv) * | 2001-04-02 | 2001-04-02 | Ericsson Telefon Ab L M | Micro electromechanical switches |
US6608268B1 (en) * | 2002-02-05 | 2003-08-19 | Memtronics, A Division Of Cogent Solutions, Inc. | Proximity micro-electro-mechanical system |
US7053736B2 (en) * | 2002-09-30 | 2006-05-30 | Teravicta Technologies, Inc. | Microelectromechanical device having an active opening switch |
-
2002
- 2002-11-28 FR FR0214944A patent/FR2848020B1/fr not_active Expired - Fee Related
-
2003
- 2003-11-27 WO PCT/FR2003/050138 patent/WO2004051688A1/fr active IP Right Grant
- 2003-11-27 EP EP03786074A patent/EP1565922B1/de not_active Expired - Lifetime
- 2003-11-27 US US10/536,632 patent/US7283023B2/en not_active Expired - Fee Related
- 2003-11-27 DE DE60307672T patent/DE60307672T2/de not_active Expired - Lifetime
- 2003-11-27 AT AT03786074T patent/ATE336799T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US7283023B2 (en) | 2007-10-16 |
DE60307672T2 (de) | 2007-09-06 |
FR2848020A1 (fr) | 2004-06-04 |
WO2004051688A1 (fr) | 2004-06-17 |
ATE336799T1 (de) | 2006-09-15 |
US20060164193A1 (en) | 2006-07-27 |
EP1565922A1 (de) | 2005-08-24 |
EP1565922B1 (de) | 2006-08-16 |
FR2848020B1 (fr) | 2005-01-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |