DE60221764D1 - Elektro-mechanische Gittervorrichtung mit stufenlos steuerbarer Diffraktionseffizienz - Google Patents

Elektro-mechanische Gittervorrichtung mit stufenlos steuerbarer Diffraktionseffizienz

Info

Publication number
DE60221764D1
DE60221764D1 DE60221764T DE60221764T DE60221764D1 DE 60221764 D1 DE60221764 D1 DE 60221764D1 DE 60221764 T DE60221764 T DE 60221764T DE 60221764 T DE60221764 T DE 60221764T DE 60221764 D1 DE60221764 D1 DE 60221764D1
Authority
DE
Germany
Prior art keywords
electro
diffraction efficiency
grating device
mechanical grating
controllable diffraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60221764T
Other languages
English (en)
Other versions
DE60221764T2 (de
Inventor
Brian E Kruschwitz
John Charles Brazas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eastman Kodak Co
Original Assignee
Eastman Kodak Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eastman Kodak Co filed Critical Eastman Kodak Co
Publication of DE60221764D1 publication Critical patent/DE60221764D1/de
Application granted granted Critical
Publication of DE60221764T2 publication Critical patent/DE60221764T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • G02B5/1828Diffraction gratings having means for producing variable diffraction

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Micromachines (AREA)
DE60221764T 2001-09-20 2002-09-09 Elektromechanische gittervorrichtung mit einem kontinuierlich steuerbaren beugungswirkungsgrad Expired - Lifetime DE60221764T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US957334 2001-09-20
US09/957,334 US6750998B2 (en) 2001-09-20 2001-09-20 Electro-mechanical grating device having a continuously controllable diffraction efficiency

Publications (2)

Publication Number Publication Date
DE60221764D1 true DE60221764D1 (de) 2007-09-27
DE60221764T2 DE60221764T2 (de) 2008-06-05

Family

ID=25499431

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60221764T Expired - Lifetime DE60221764T2 (de) 2001-09-20 2002-09-09 Elektromechanische gittervorrichtung mit einem kontinuierlich steuerbaren beugungswirkungsgrad

Country Status (4)

Country Link
US (1) US6750998B2 (de)
EP (1) EP1296171B1 (de)
JP (1) JP2003185946A (de)
DE (1) DE60221764T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7215461B1 (en) * 2004-09-14 2007-05-08 Silicon Light Machines Corporation MEMS devices with increased damping for suspended movable structures
US7310180B2 (en) * 2004-11-05 2007-12-18 Silicon Light Machines Corporation Dielectric spacer for enhanced squeeze-film damping of movable members of MEMS devices
US7573631B1 (en) * 2005-02-22 2009-08-11 Silicon Light Machines Corporation Hybrid analog/digital spatial light modulator
KR100890286B1 (ko) * 2005-11-03 2009-03-26 삼성전기주식회사 회절형 도파 공간 광변조기
KR100906801B1 (ko) * 2007-08-06 2009-07-09 삼성전기주식회사 다수 리본 구조의 광변조기
FR2929704B1 (fr) * 2008-04-04 2010-05-14 Univ Joseph Fourier Detecteur capacitif, procede de fabrication d'un detecteur capacitif et dispositif de mesure l'integrant
NO333724B1 (no) * 2009-08-14 2013-09-02 Sintef En mikromekanisk rekke med optisk reflekterende overflater

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4011009A (en) 1975-05-27 1977-03-08 Xerox Corporation Reflection diffraction grating having a controllable blaze angle
US4492435A (en) 1982-07-02 1985-01-08 Xerox Corporation Multiple array full width electro mechanical modulator
US4596992A (en) 1984-08-31 1986-06-24 Texas Instruments Incorporated Linear spatial light modulator and printer
US5115344A (en) 1990-10-03 1992-05-19 Motorola, Inc. Tunable diffraction grating
US6219015B1 (en) * 1992-04-28 2001-04-17 The Board Of Directors Of The Leland Stanford, Junior University Method and apparatus for using an array of grating light valves to produce multicolor optical images
US5311360A (en) 1992-04-28 1994-05-10 The Board Of Trustees Of The Leland Stanford, Junior University Method and apparatus for modulating a light beam
US5661593A (en) 1992-10-01 1997-08-26 Engle; Craig D. Linear electrostatic modulator
US5757536A (en) 1995-08-30 1998-05-26 Sandia Corporation Electrically-programmable diffraction grating
US6252697B1 (en) * 1998-12-18 2001-06-26 Eastman Kodak Company Mechanical grating device
US6238581B1 (en) * 1998-12-18 2001-05-29 Eastman Kodak Company Process for manufacturing an electro-mechanical grating device
US6479811B1 (en) * 2000-03-06 2002-11-12 Eastman Kodak Company Method and system for calibrating a diffractive grating modulator

Also Published As

Publication number Publication date
DE60221764T2 (de) 2008-06-05
US6750998B2 (en) 2004-06-15
JP2003185946A (ja) 2003-07-03
US20030058514A1 (en) 2003-03-27
EP1296171A2 (de) 2003-03-26
EP1296171A3 (de) 2004-07-14
EP1296171B1 (de) 2007-08-15

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Legal Events

Date Code Title Description
8381 Inventor (new situation)

Inventor name: KRUSCHWITZ, BRIAN E., ROCHESTER, NEW YORK 1465, US

Inventor name: BRAZAS, JOHN CHARLES, ROCHESTER, NEW YORK 1465, US

8364 No opposition during term of opposition