DE60221764D1 - Elektro-mechanische Gittervorrichtung mit stufenlos steuerbarer Diffraktionseffizienz - Google Patents
Elektro-mechanische Gittervorrichtung mit stufenlos steuerbarer DiffraktionseffizienzInfo
- Publication number
- DE60221764D1 DE60221764D1 DE60221764T DE60221764T DE60221764D1 DE 60221764 D1 DE60221764 D1 DE 60221764D1 DE 60221764 T DE60221764 T DE 60221764T DE 60221764 T DE60221764 T DE 60221764T DE 60221764 D1 DE60221764 D1 DE 60221764D1
- Authority
- DE
- Germany
- Prior art keywords
- electro
- diffraction efficiency
- grating device
- mechanical grating
- controllable diffraction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1828—Diffraction gratings having means for producing variable diffraction
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US957334 | 2001-09-20 | ||
US09/957,334 US6750998B2 (en) | 2001-09-20 | 2001-09-20 | Electro-mechanical grating device having a continuously controllable diffraction efficiency |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60221764D1 true DE60221764D1 (de) | 2007-09-27 |
DE60221764T2 DE60221764T2 (de) | 2008-06-05 |
Family
ID=25499431
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60221764T Expired - Lifetime DE60221764T2 (de) | 2001-09-20 | 2002-09-09 | Elektromechanische gittervorrichtung mit einem kontinuierlich steuerbaren beugungswirkungsgrad |
Country Status (4)
Country | Link |
---|---|
US (1) | US6750998B2 (de) |
EP (1) | EP1296171B1 (de) |
JP (1) | JP2003185946A (de) |
DE (1) | DE60221764T2 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7215461B1 (en) * | 2004-09-14 | 2007-05-08 | Silicon Light Machines Corporation | MEMS devices with increased damping for suspended movable structures |
US7310180B2 (en) * | 2004-11-05 | 2007-12-18 | Silicon Light Machines Corporation | Dielectric spacer for enhanced squeeze-film damping of movable members of MEMS devices |
US7573631B1 (en) * | 2005-02-22 | 2009-08-11 | Silicon Light Machines Corporation | Hybrid analog/digital spatial light modulator |
KR100890286B1 (ko) * | 2005-11-03 | 2009-03-26 | 삼성전기주식회사 | 회절형 도파 공간 광변조기 |
KR100906801B1 (ko) * | 2007-08-06 | 2009-07-09 | 삼성전기주식회사 | 다수 리본 구조의 광변조기 |
FR2929704B1 (fr) * | 2008-04-04 | 2010-05-14 | Univ Joseph Fourier | Detecteur capacitif, procede de fabrication d'un detecteur capacitif et dispositif de mesure l'integrant |
NO333724B1 (no) * | 2009-08-14 | 2013-09-02 | Sintef | En mikromekanisk rekke med optisk reflekterende overflater |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4011009A (en) | 1975-05-27 | 1977-03-08 | Xerox Corporation | Reflection diffraction grating having a controllable blaze angle |
US4492435A (en) | 1982-07-02 | 1985-01-08 | Xerox Corporation | Multiple array full width electro mechanical modulator |
US4596992A (en) | 1984-08-31 | 1986-06-24 | Texas Instruments Incorporated | Linear spatial light modulator and printer |
US5115344A (en) | 1990-10-03 | 1992-05-19 | Motorola, Inc. | Tunable diffraction grating |
US6219015B1 (en) * | 1992-04-28 | 2001-04-17 | The Board Of Directors Of The Leland Stanford, Junior University | Method and apparatus for using an array of grating light valves to produce multicolor optical images |
US5311360A (en) | 1992-04-28 | 1994-05-10 | The Board Of Trustees Of The Leland Stanford, Junior University | Method and apparatus for modulating a light beam |
US5661593A (en) | 1992-10-01 | 1997-08-26 | Engle; Craig D. | Linear electrostatic modulator |
US5757536A (en) | 1995-08-30 | 1998-05-26 | Sandia Corporation | Electrically-programmable diffraction grating |
US6252697B1 (en) * | 1998-12-18 | 2001-06-26 | Eastman Kodak Company | Mechanical grating device |
US6238581B1 (en) * | 1998-12-18 | 2001-05-29 | Eastman Kodak Company | Process for manufacturing an electro-mechanical grating device |
US6479811B1 (en) * | 2000-03-06 | 2002-11-12 | Eastman Kodak Company | Method and system for calibrating a diffractive grating modulator |
-
2001
- 2001-09-20 US US09/957,334 patent/US6750998B2/en not_active Expired - Fee Related
-
2002
- 2002-09-09 EP EP02078695A patent/EP1296171B1/de not_active Expired - Lifetime
- 2002-09-09 DE DE60221764T patent/DE60221764T2/de not_active Expired - Lifetime
- 2002-09-18 JP JP2002271615A patent/JP2003185946A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
DE60221764T2 (de) | 2008-06-05 |
US6750998B2 (en) | 2004-06-15 |
JP2003185946A (ja) | 2003-07-03 |
US20030058514A1 (en) | 2003-03-27 |
EP1296171A2 (de) | 2003-03-26 |
EP1296171A3 (de) | 2004-07-14 |
EP1296171B1 (de) | 2007-08-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8381 | Inventor (new situation) |
Inventor name: KRUSCHWITZ, BRIAN E., ROCHESTER, NEW YORK 1465, US Inventor name: BRAZAS, JOHN CHARLES, ROCHESTER, NEW YORK 1465, US |
|
8364 | No opposition during term of opposition |