DE60204255D1 - Chemischer Filter - Google Patents

Chemischer Filter

Info

Publication number
DE60204255D1
DE60204255D1 DE60204255T DE60204255T DE60204255D1 DE 60204255 D1 DE60204255 D1 DE 60204255D1 DE 60204255 T DE60204255 T DE 60204255T DE 60204255 T DE60204255 T DE 60204255T DE 60204255 D1 DE60204255 D1 DE 60204255D1
Authority
DE
Germany
Prior art keywords
chemical filter
chemical
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60204255T
Other languages
English (en)
Other versions
DE60204255T2 (de
Inventor
Minoru Tanaka
Kazuki Yamana
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nichias Corp
Original Assignee
Nichias Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nichias Corp filed Critical Nichias Corp
Application granted granted Critical
Publication of DE60204255D1 publication Critical patent/DE60204255D1/de
Publication of DE60204255T2 publication Critical patent/DE60204255T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8603—Removing sulfur compounds
    • B01D53/8609—Sulfur oxides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8621—Removing nitrogen compounds
    • B01D53/8625—Nitrogen oxides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/16—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of arsenic, antimony, bismuth, vanadium, niobium, tantalum, polonium, chromium, molybdenum, tungsten, manganese, technetium or rhenium
    • B01J23/32—Manganese, technetium or rhenium
    • B01J23/34—Manganese
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J35/00—Catalysts, in general, characterised by their form or physical properties
    • B01J35/50—Catalysts, in general, characterised by their form or physical properties characterised by their shape or configuration
    • B01J35/56—Foraminous structures having flow-through passages or channels, e.g. grids or three-dimensional monoliths
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/40—Alkaline earth metal or magnesium compounds
    • B01D2251/404—Alkaline earth metal or magnesium compounds of calcium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/60—Inorganic bases or salts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/60—Inorganic bases or salts
    • B01D2251/604—Hydroxides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/102—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/25—Coated, impregnated or composite adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/30—Physical properties of adsorbents
    • B01D2253/302—Dimensions
    • B01D2253/304—Linear dimensions, e.g. particle shape, diameter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/30—Physical properties of adsorbents
    • B01D2253/34—Specific shapes
    • B01D2253/342—Monoliths
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/40—Nitrogen compounds
    • B01D2257/404—Nitrogen oxides other than dinitrogen oxide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/70—Organic compounds not provided for in groups B01D2257/00 - B01D2257/602
    • B01D2257/708—Volatile organic compounds V.O.C.'s
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
    • B01J21/12—Silica and alumina
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
    • B01J21/18—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J35/00—Catalysts, in general, characterised by their form or physical properties
    • B01J35/19—Catalysts containing parts with different compositions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/02—Impregnation, coating or precipitation
    • B01J37/0215—Coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Environmental & Geological Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
  • Gas Separation By Absorption (AREA)
  • Filtering Materials (AREA)
  • Catalysts (AREA)
  • Treating Waste Gases (AREA)
DE60204255T 2001-03-30 2002-03-21 Chemischer Filter Expired - Lifetime DE60204255T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001100592 2001-03-30
JP2001100592 2001-03-30

Publications (2)

Publication Number Publication Date
DE60204255D1 true DE60204255D1 (de) 2005-06-30
DE60204255T2 DE60204255T2 (de) 2006-02-02

Family

ID=18954023

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60204255T Expired - Lifetime DE60204255T2 (de) 2001-03-30 2002-03-21 Chemischer Filter

Country Status (5)

Country Link
US (1) US20020177520A1 (de)
EP (1) EP1247559B1 (de)
JP (1) JP4315410B2 (de)
KR (1) KR100807499B1 (de)
DE (1) DE60204255T2 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7135205B2 (en) 2002-03-01 2006-11-14 Ngimat, Co. Fuel cell membranes and catalytic layers
GB0209183D0 (en) * 2002-04-23 2002-06-05 Madison Filter 981 Ltd Filter elements
JP2005046792A (ja) * 2003-07-31 2005-02-24 Nichias Corp ケミカルフィルタの製造方法
EP2805764A3 (de) * 2003-12-05 2015-01-07 Nisshoku Corporation Anionenadsorbierendes Kohlenstoffmaterial sowie Herstellungsverfahren und Produktionsanlagen dafür
JP4819367B2 (ja) * 2005-02-02 2011-11-24 ニチアス株式会社 エアフィルタ用シートの製造方法
KR100653431B1 (ko) * 2005-03-29 2006-12-01 주식회사 코캣 금속화합물을 이용한 케미컬 필터 및 이의 제조방법
US7316732B2 (en) * 2005-07-14 2008-01-08 Access Business Group International Llc Air treatment filter and related method
US7451849B1 (en) * 2005-11-07 2008-11-18 Geo2 Technologies, Inc. Substantially fibrous exhaust screening system for motor vehicles
JP4948249B2 (ja) * 2006-05-01 2012-06-06 イビデン株式会社 ハニカム構造体、ハニカム構造体の製造方法、ハニカムフィルタ及びハニカムフィルタの製造方法
JP4965953B2 (ja) * 2006-09-29 2012-07-04 株式会社東芝 ポリシラザンまたはポリシラザン溶液の取り扱い方法、ポリシラザン溶液、半導体装置の製造方法
US8617295B2 (en) * 2009-09-30 2013-12-31 3M Innovative Properties Company Active-particulate air filter having monolith primary filter and polishing filter
TW201134539A (en) * 2010-04-09 2011-10-16 Jg Environmental Tech Co Ltd Multi-channel chemical filter material
CN102175244A (zh) * 2011-03-16 2011-09-07 公安部沈阳消防研究所 基于惯性传感器的建筑物内人员定位系统及定位方法
JP6405718B2 (ja) * 2013-06-18 2018-10-17 東洋紡株式会社 酸性ガス吸着・除去剤およびそれを用いた吸着・除去フィルタ
JP6349736B2 (ja) * 2014-01-17 2018-07-04 東洋紡株式会社 酸性ガス吸着・除去フィルタ
US9908098B2 (en) 2014-10-06 2018-03-06 Corning Incorporated Honeycomb filter article and methods thereof
JP2018037170A (ja) * 2016-08-29 2018-03-08 トヨタ紡織株式会社 燃料電池システム用エアクリーナ
JP7434711B2 (ja) 2019-02-22 2024-02-21 トヨタ紡織株式会社 燃料電池システム用エアフィルタ
KR20230067220A (ko) 2021-11-09 2023-05-16 주식회사 성창오토텍 이온교환수지 입자를 함유한 유해공기 정화용 복합필터
KR102492039B1 (ko) * 2022-10-07 2023-01-27 주식회사 효림 수처리용 활성탄 필터모듈과 그 재생방법 및 활성탄을 이용한 영가철-활성탄 복합체 필터모듈과 그 재생방법

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4421533A (en) * 1978-03-27 1983-12-20 Takeda Chemical Industries, Ltd. Method of removing ozone and composition therefor
US4534775A (en) * 1982-03-02 1985-08-13 General Time Corp. Air treatment filter element and air treatment filter
US5212131A (en) * 1991-02-20 1993-05-18 Innovative Research Enterprises Low pressure drop filter
JPH0691957B2 (ja) * 1991-07-19 1994-11-16 ニチアス株式会社 オゾンフィルターおよびその製造法
GB2292698B (en) * 1994-08-31 1998-02-11 Nichias Corp Ozone filter and process for producing the same
JP2981714B2 (ja) * 1995-03-29 1999-11-22 ニチアス株式会社 脱臭フィルター
KR20000067428A (ko) * 1999-04-28 2000-11-15 이충중 공기여과용 필터 및 그 제조방법
KR20000000187A (ko) * 1999-09-29 2000-01-15 이충중 탈취필터 및 그 제조방법
US20010029843A1 (en) * 2000-01-31 2001-10-18 Nichias Co., Ltd. Chemical filter and manufacturing method thereof

Also Published As

Publication number Publication date
JP4315410B2 (ja) 2009-08-19
EP1247559A1 (de) 2002-10-09
JP2003001024A (ja) 2003-01-07
KR20020077072A (ko) 2002-10-11
KR100807499B1 (ko) 2008-02-25
DE60204255T2 (de) 2006-02-02
EP1247559B1 (de) 2005-05-25
US20020177520A1 (en) 2002-11-28

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