DE60204237D1 - Verfahren zum herstellen eines zuführkanals für einen tintenstrahldruckkopf - Google Patents
Verfahren zum herstellen eines zuführkanals für einen tintenstrahldruckkopfInfo
- Publication number
- DE60204237D1 DE60204237D1 DE60204237T DE60204237T DE60204237D1 DE 60204237 D1 DE60204237 D1 DE 60204237D1 DE 60204237 T DE60204237 T DE 60204237T DE 60204237 T DE60204237 T DE 60204237T DE 60204237 D1 DE60204237 D1 DE 60204237D1
- Authority
- DE
- Germany
- Prior art keywords
- front surface
- substrate
- diaphragm
- depth
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 4
- 230000003628 erosive effect Effects 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Ink Jet (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITTO20011019 | 2001-10-25 | ||
IT2001TO001019A ITTO20011019A1 (it) | 2001-10-25 | 2001-10-25 | Procedimento perfezionato per la costruzione di un condotto di alimentazione per una testina di stampa a getto di inchiostro. |
PCT/IT2002/000678 WO2003035401A1 (en) | 2001-10-25 | 2002-10-24 | Improved process for construction of a feeding duct for an ink jet printhead |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60204237D1 true DE60204237D1 (de) | 2005-06-23 |
DE60204237T2 DE60204237T2 (de) | 2006-01-26 |
Family
ID=11459276
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60204237T Expired - Lifetime DE60204237T2 (de) | 2001-10-25 | 2002-10-24 | Verfahren zum herstellen eines zuführkanals für einen tintenstrahldruckkopf |
Country Status (7)
Country | Link |
---|---|
US (1) | US7229157B2 (de) |
EP (1) | EP1439959B8 (de) |
AT (1) | ATE295784T1 (de) |
DE (1) | DE60204237T2 (de) |
ES (1) | ES2243782T3 (de) |
IT (1) | ITTO20011019A1 (de) |
WO (1) | WO2003035401A1 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ITTO20020876A1 (it) | 2002-10-10 | 2004-04-11 | Olivetti I Jet Spa | Dispositivo di stampa a getto di inchiostro in parallelo |
JP2008126504A (ja) * | 2006-11-20 | 2008-06-05 | Canon Inc | インクジェット記録ヘッドの製造方法、およびインクジェット記録ヘッド |
EP2814671B1 (de) | 2012-03-16 | 2020-04-29 | Hewlett-Packard Development Company, L.P. | Druckkopf mit versenkten schlitzenden |
JP6168909B2 (ja) * | 2013-08-13 | 2017-07-26 | キヤノン株式会社 | 液体吐出ヘッド用基板の製造方法 |
TWI553793B (zh) * | 2014-07-24 | 2016-10-11 | 光頡科技股份有限公司 | 陶瓷基板、封裝基板、半導體晶片封裝件及其製造方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4169008A (en) * | 1977-06-13 | 1979-09-25 | International Business Machines Corporation | Process for producing uniform nozzle orifices in silicon wafers |
US4961821A (en) | 1989-11-22 | 1990-10-09 | Xerox Corporation | Ode through holes and butt edges without edge dicing |
US5387314A (en) | 1993-01-25 | 1995-02-07 | Hewlett-Packard Company | Fabrication of ink fill slots in thermal ink-jet printheads utilizing chemical micromachining |
US5658471A (en) * | 1995-09-22 | 1997-08-19 | Lexmark International, Inc. | Fabrication of thermal ink-jet feed slots in a silicon substrate |
DK0841167T3 (da) * | 1996-11-11 | 2005-01-24 | Canon Kk | Fremgangsmåde til fremstilling af gennemgående hul og anvendelse af den nævnte fremgangsmåde til fremstilling af et siliciumsubstrat, der har et gennemgående hul, og en anordning, der anvender et sådant substrat, fremgangsmåde til fremstilling..... |
US6164762A (en) * | 1998-06-19 | 2000-12-26 | Lexmark International, Inc. | Heater chip module and process for making same |
US6402301B1 (en) * | 2000-10-27 | 2002-06-11 | Lexmark International, Inc | Ink jet printheads and methods therefor |
US6805432B1 (en) * | 2001-07-31 | 2004-10-19 | Hewlett-Packard Development Company, L.P. | Fluid ejecting device with fluid feed slot |
-
2001
- 2001-10-25 IT IT2001TO001019A patent/ITTO20011019A1/it unknown
-
2002
- 2002-10-24 DE DE60204237T patent/DE60204237T2/de not_active Expired - Lifetime
- 2002-10-24 US US10/493,571 patent/US7229157B2/en not_active Expired - Lifetime
- 2002-10-24 ES ES02788533T patent/ES2243782T3/es not_active Expired - Lifetime
- 2002-10-24 AT AT02788533T patent/ATE295784T1/de not_active IP Right Cessation
- 2002-10-24 WO PCT/IT2002/000678 patent/WO2003035401A1/en not_active Application Discontinuation
- 2002-10-24 EP EP02788533A patent/EP1439959B8/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE60204237T2 (de) | 2006-01-26 |
US7229157B2 (en) | 2007-06-12 |
EP1439959B1 (de) | 2005-05-18 |
EP1439959A1 (de) | 2004-07-28 |
US20040252166A1 (en) | 2004-12-16 |
EP1439959B8 (de) | 2005-07-13 |
ATE295784T1 (de) | 2005-06-15 |
ES2243782T3 (es) | 2005-12-01 |
WO2003035401A1 (en) | 2003-05-01 |
ITTO20011019A1 (it) | 2003-04-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8327 | Change in the person/name/address of the patent owner |
Owner name: TELECOM ITALIA S.P.A., MAILAND/MILANO, IT |
|
8364 | No opposition during term of opposition |