DE602008006318D1 - Element zur optischen Erfassung, Antriebsverfahren dafür und Sonde zur optischen Erfassung mit dem Element zur optischen Erfassung - Google Patents

Element zur optischen Erfassung, Antriebsverfahren dafür und Sonde zur optischen Erfassung mit dem Element zur optischen Erfassung

Info

Publication number
DE602008006318D1
DE602008006318D1 DE602008006318T DE602008006318T DE602008006318D1 DE 602008006318 D1 DE602008006318 D1 DE 602008006318D1 DE 602008006318 T DE602008006318 T DE 602008006318T DE 602008006318 T DE602008006318 T DE 602008006318T DE 602008006318 D1 DE602008006318 D1 DE 602008006318D1
Authority
DE
Germany
Prior art keywords
optical detection
detection element
driving method
method therefor
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602008006318T
Other languages
English (en)
Inventor
Shinya Ogikubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
Original Assignee
Fujifilm Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Publication of DE602008006318D1 publication Critical patent/DE602008006318D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0028—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders specially adapted for specific applications, e.g. for endoscopes, ophthalmoscopes, attachments to conventional microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Radiology & Medical Imaging (AREA)
  • Surgery (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)
DE602008006318T 2007-09-20 2008-09-18 Element zur optischen Erfassung, Antriebsverfahren dafür und Sonde zur optischen Erfassung mit dem Element zur optischen Erfassung Active DE602008006318D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007243517A JP2009075309A (ja) 2007-09-20 2007-09-20 光走査素子およびその駆動方法、並びに光走査素子を用いた光走査プローブ

Publications (1)

Publication Number Publication Date
DE602008006318D1 true DE602008006318D1 (de) 2011-06-01

Family

ID=40085412

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602008006318T Active DE602008006318D1 (de) 2007-09-20 2008-09-18 Element zur optischen Erfassung, Antriebsverfahren dafür und Sonde zur optischen Erfassung mit dem Element zur optischen Erfassung

Country Status (5)

Country Link
US (1) US8294968B2 (de)
EP (1) EP2040107B1 (de)
JP (1) JP2009075309A (de)
CN (1) CN101393105A (de)
DE (1) DE602008006318D1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8510272B2 (en) 2007-04-20 2013-08-13 General Electric Company Decision support response systems and methods
JP2009063637A (ja) * 2007-09-04 2009-03-26 Fujifilm Corp 光走査プローブおよび光走査プローブ装置並びに光走査プローブの制御方法
JP4444371B1 (ja) * 2009-09-01 2010-03-31 富士フイルム株式会社 撮像素子及び撮像装置
JP5513184B2 (ja) * 2010-03-16 2014-06-04 キヤノン株式会社 マイクロ構造体及びその製造方法
JP5395829B2 (ja) * 2011-02-25 2014-01-22 富士フイルム株式会社 内視鏡装置
DE102011081042B4 (de) * 2011-08-16 2021-05-27 Robert Bosch Gmbh Steuervorrichtung für einen Mikrospiegel, Verfahren zum Ansteuern eines Mikrospiegels und Bildprojektionssystem
CN102401995B (zh) * 2011-11-18 2013-05-29 无锡微奥科技有限公司 一种内窥镜微型光学探头
DE102011089514B4 (de) * 2011-12-22 2022-09-01 Robert Bosch Gmbh Mikrospiegel und 2-Spiegelsystem
CN102670179B (zh) * 2012-05-28 2014-02-05 凝辉(天津)科技有限责任公司 基于双旋转微镜的光学扫描探针
CN102662235B (zh) * 2012-06-04 2015-04-01 凝辉(天津)科技有限责任公司 直接光驱动扫描微镜
CN102662234B (zh) * 2012-06-04 2015-04-01 凝辉(天津)科技有限责任公司 光驱动扫描微镜
DE102013212102A1 (de) * 2013-06-25 2015-01-08 Robert Bosch Gmbh Mikromechanisches Bauteil, Mikrospiegelvorrichtung und Herstellungsverfahren für ein mikromechanisches Bauteil
EP3223181B1 (de) 2016-03-24 2019-12-18 Sofradim Production System und verfahren zur generierung eines modell und zur simulierung einer wirkung an einer chirurgischen reparaturstelle
CN109669267B (zh) * 2019-01-18 2021-01-05 成都理想境界科技有限公司 一种扫描致动器及光纤扫描器
CN111552072B (zh) * 2020-04-28 2022-07-12 安徽中科米微电子技术有限公司 大尺寸mems垂直梳齿微镜及其制备方法
CN114690400B (zh) * 2020-12-29 2023-05-02 极米科技股份有限公司 一种静电力驱动方式的振镜
CN113425227B (zh) * 2021-06-24 2022-09-06 哈尔滨工业大学 一种诊断-治疗一体化软体肠胃镜医疗机器人
CN117389030A (zh) * 2022-07-04 2024-01-12 西安炬光科技股份有限公司 光束扫描系统及其扫描方法

Family Cites Families (15)

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Publication number Priority date Publication date Assignee Title
JPH01152278A (ja) 1987-12-09 1989-06-14 Mitsubishi Electric Corp 薄膜形成装置
JP2924200B2 (ja) * 1990-01-18 1999-07-26 富士電機株式会社 ねじり振動子およびその応用素子
JPH04211217A (ja) * 1990-02-19 1992-08-03 Fuji Electric Co Ltd 光偏向子
US5629790A (en) * 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
DE19712201A1 (de) 1997-03-24 1998-10-01 Bodenseewerk Geraetetech Mikromechanische Spiegel-Anordnung
JP3011144B2 (ja) 1997-07-31 2000-02-21 日本電気株式会社 光スキャナとその駆動方法
JP2000310743A (ja) 1998-05-22 2000-11-07 Olympus Optical Co Ltd 光走査装置およびこれを用いた光走査型共焦点光学装置
US6384406B1 (en) * 1999-08-05 2002-05-07 Microvision, Inc. Active tuning of a torsional resonant structure
JP4620901B2 (ja) 2001-06-04 2011-01-26 キヤノン株式会社 ２次元光走査装置、及び該２次元光走査装置の駆動方法
JP4331501B2 (ja) * 2002-06-14 2009-09-16 オリンパス株式会社 小型光学ユニット
JP2004144926A (ja) * 2002-10-23 2004-05-20 Olympus Corp 光学像取り込み装置
US7031040B2 (en) * 2003-05-16 2006-04-18 Ricoh Company, Ltd. Optical scanning apparatus, optical writing apparatus, image forming apparatus, and method of driving vibration mirror
KR20050043423A (ko) 2003-11-06 2005-05-11 삼성전자주식회사 주파수 변조 가능한 공진형 스캐너
JP4929738B2 (ja) 2005-04-18 2012-05-09 セイコーエプソン株式会社 光走査装置、光走査装置の制御方法及び画像表示装置
JP2007017769A (ja) * 2005-07-08 2007-01-25 Fujifilm Holdings Corp 光通信用微小薄膜可動素子及び微小薄膜可動素子アレイ

Also Published As

Publication number Publication date
US20090080046A1 (en) 2009-03-26
JP2009075309A (ja) 2009-04-09
US8294968B2 (en) 2012-10-23
EP2040107A1 (de) 2009-03-25
EP2040107B1 (de) 2011-04-20
CN101393105A (zh) 2009-03-25

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