DE602007001789D1 - Vorrichtung zum bewegen von flüssigkeiten und/oder gasen - Google Patents

Vorrichtung zum bewegen von flüssigkeiten und/oder gasen

Info

Publication number
DE602007001789D1
DE602007001789D1 DE602007001789T DE602007001789T DE602007001789D1 DE 602007001789 D1 DE602007001789 D1 DE 602007001789D1 DE 602007001789 T DE602007001789 T DE 602007001789T DE 602007001789 T DE602007001789 T DE 602007001789T DE 602007001789 D1 DE602007001789 D1 DE 602007001789D1
Authority
DE
Germany
Prior art keywords
chamber
gases
partially
moving liquids
side facing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007001789T
Other languages
English (en)
Inventor
Juergen Heinze
Rudolf Kiefer
Gerald Urban
Daniel Georg Weis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Albert Ludwigs Universitaet Freiburg
Original Assignee
Albert Ludwigs Universitaet Freiburg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Albert Ludwigs Universitaet Freiburg filed Critical Albert Ludwigs Universitaet Freiburg
Publication of DE602007001789D1 publication Critical patent/DE602007001789D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Detergent Compositions (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Actuator (AREA)
DE602007001789T 2006-01-26 2007-01-24 Vorrichtung zum bewegen von flüssigkeiten und/oder gasen Active DE602007001789D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006003744A DE102006003744B3 (de) 2006-01-26 2006-01-26 Vorrichtung zur Bewegung von Flüssigkeiten und/oder Gasen
PCT/EP2007/000595 WO2007085434A1 (en) 2006-01-26 2007-01-24 Device for moving liquids and/or gases

Publications (1)

Publication Number Publication Date
DE602007001789D1 true DE602007001789D1 (de) 2009-09-10

Family

ID=37882332

Family Applications (2)

Application Number Title Priority Date Filing Date
DE102006003744A Expired - Fee Related DE102006003744B3 (de) 2006-01-26 2006-01-26 Vorrichtung zur Bewegung von Flüssigkeiten und/oder Gasen
DE602007001789T Active DE602007001789D1 (de) 2006-01-26 2007-01-24 Vorrichtung zum bewegen von flüssigkeiten und/oder gasen

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE102006003744A Expired - Fee Related DE102006003744B3 (de) 2006-01-26 2006-01-26 Vorrichtung zur Bewegung von Flüssigkeiten und/oder Gasen

Country Status (4)

Country Link
EP (1) EP1989447B1 (de)
AT (1) ATE438037T1 (de)
DE (2) DE102006003744B3 (de)
WO (1) WO2007085434A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007045637A1 (de) 2007-09-25 2009-04-02 Robert Bosch Gmbh Mikrodosiervorrichtung zum Dosieren von Kleinstmengen eines Mediums
WO2010004721A1 (ja) * 2008-07-08 2010-01-14 パナソニック株式会社 導電性高分子を用いた流体搬送装置
DE102008042054A1 (de) 2008-09-12 2010-03-18 Robert Bosch Gmbh Mikroventil, Mikropumpe sowie Herstellungsverfahren
CN112696528A (zh) * 2020-12-25 2021-04-23 京东方科技集团股份有限公司 一种用于微流控芯片的液压开关阀以及微流控芯片

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4143343C2 (de) * 1991-09-11 1994-09-22 Fraunhofer Ges Forschung Mikrominiaturisierte, elektrostatisch betriebene Mikromembranpumpe
DE4433894A1 (de) * 1994-09-22 1996-03-28 Fraunhofer Ges Forschung Verfahren und Vorrichtung zur Ansteuerung einer Mikropumpe
DE19637928C2 (de) * 1996-02-10 1999-01-14 Fraunhofer Ges Forschung Bistabile Membran-Aktivierungseinrichtung und Membran
DE19625179C2 (de) * 1996-06-24 1998-09-24 Joerg Prof Dr Ing Mueller Mikromembranpumpe mit Kugelventilen und elektromagnetischem Membranantrieb
DE19724240C2 (de) * 1997-06-09 2003-06-05 Sascha Bechtel Förderpumpe, insbesondere Mikroförderpumpe
FR2817604B1 (fr) * 2000-12-01 2004-04-23 Biomerieux Sa Vannes activees par des polymeres electro-actifs ou par des materiaux a memoire de forme, dispositif contenant de telles vannes et procede de mise en oeuvre
DE10164474B4 (de) * 2001-12-20 2006-06-14 Mathias Frodl Mikropumpe
EP2302216A1 (de) * 2003-02-24 2011-03-30 Medipacs, Inc. Impulsaktiviertes Aktuatorpumpensystem
DE10313158A1 (de) * 2003-03-18 2004-10-07 Siemens Ag Mikropumpe mit einem membranartigen Aktor

Also Published As

Publication number Publication date
ATE438037T1 (de) 2009-08-15
WO2007085434A1 (en) 2007-08-02
EP1989447A1 (de) 2008-11-12
EP1989447B1 (de) 2009-07-29
DE102006003744B3 (de) 2007-09-13

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Legal Events

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