DE602006004862D1 - Pvd-beschichtetes substrat - Google Patents

Pvd-beschichtetes substrat

Info

Publication number
DE602006004862D1
DE602006004862D1 DE200660004862 DE602006004862T DE602006004862D1 DE 602006004862 D1 DE602006004862 D1 DE 602006004862D1 DE 200660004862 DE200660004862 DE 200660004862 DE 602006004862 T DE602006004862 T DE 602006004862T DE 602006004862 D1 DE602006004862 D1 DE 602006004862D1
Authority
DE
Germany
Prior art keywords
coating
layer
cyn
incorporated
friction coefficient
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE200660004862
Other languages
English (en)
Inventor
Papken Hovsepian
Arutiun P Ehiasarian
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sheffield Hallam University
Original Assignee
Sheffield Hallam University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sheffield Hallam University filed Critical Sheffield Hallam University
Publication of DE602006004862D1 publication Critical patent/DE602006004862D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3464—Operating strategies
    • H01J37/3467—Pulsed operation, e.g. HIPIMS
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T407/00—Cutters, for shaping
    • Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T408/00—Cutting by use of rotating axially moving tool
    • Y10T408/78—Tool of specific diverse material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Organic Insulating Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Paints Or Removers (AREA)
  • Lubricants (AREA)
DE200660004862 2005-04-27 2006-04-25 Pvd-beschichtetes substrat Active DE602006004862D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0508485A GB2425780B (en) 2005-04-27 2005-04-27 PVD coated substrate
PCT/GB2006/001509 WO2006114610A1 (en) 2005-04-27 2006-04-25 Pvd coated substrate

Publications (1)

Publication Number Publication Date
DE602006004862D1 true DE602006004862D1 (de) 2009-03-05

Family

ID=34640197

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200660004862 Active DE602006004862D1 (de) 2005-04-27 2006-04-25 Pvd-beschichtetes substrat

Country Status (6)

Country Link
US (1) US8173248B2 (de)
EP (1) EP1874981B1 (de)
AT (1) ATE420983T1 (de)
DE (1) DE602006004862D1 (de)
GB (1) GB2425780B (de)
WO (1) WO2006114610A1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005033769B4 (de) 2005-07-15 2009-10-22 Systec System- Und Anlagentechnik Gmbh & Co.Kg Verfahren und Vorrichtung zur Mehrkathoden-PVD-Beschichtung und Substrat mit PVD-Beschichtung
TWI476289B (zh) * 2006-12-12 2015-03-11 Oerlikon Advanced Technologies Ag 在高能脈衝磁管噴濺中之消弧及產生脈波
US7966909B2 (en) * 2007-07-25 2011-06-28 The Gillette Company Process of forming a razor blade
US20100055826A1 (en) * 2008-08-26 2010-03-04 General Electric Company Methods of Fabrication of Solar Cells Using High Power Pulsed Magnetron Sputtering
DE102008050499B4 (de) * 2008-10-07 2014-02-06 Systec System- Und Anlagentechnik Gmbh & Co. Kg PVD-Beschichtungsverfahren, Vorrichtung zur Durchführung des Verfahrens und nach dem Verfahren beschichtete Substrate
CN107034465A (zh) * 2009-02-27 2017-08-11 欧瑞康表面解决方案股份公司，普费菲孔 层体系以及用于制造层体系的涂覆方法
DE102010004661B4 (de) * 2010-01-14 2014-12-24 Siemens Aktiengesellschaft Vanadium basierte Hartstoffbeschichtung einer Windkraftanlagenkomponente
CN102443773A (zh) * 2010-10-06 2012-05-09 鸿富锦精密工业（深圳）有限公司 涂层、具有该涂层的被覆件及该被覆件的制造方法
BRPI1102335A2 (pt) 2011-05-27 2013-06-25 Mahle Metal Leve Sa elemento dotado de pelo menos uma superfÍcie de deslizamento com um revestimento para uso em um motor de combustço interna ou em um compressor
DE102011116576A1 (de) * 2011-10-21 2013-04-25 Oerlikon Trading Ag, Trübbach Bohrer mit Beschichtung
TW201321542A (zh) * 2011-11-29 2013-06-01 Chenming Mold Ind Corp 製造ic屏蔽鍍膜之設備及ic之金屬屏蔽膜層
RU2494173C1 (ru) * 2012-01-23 2013-09-27 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Нижегородский государственный технический университет им. Р.Е. Алексеева" (НГТУ) Способ вакуумно-плазменного осаждения покрытия на режущую пластину из твердосплавного материала
US9126273B2 (en) 2012-12-17 2015-09-08 Kennametal Inc Tool for the cutting machining of workpieces and process for coating substrate bodies
CN103212729B (zh) * 2013-04-17 2016-04-13 重庆市硅酸盐研究所 一种具有CrAlTiN超晶格涂层的数控刀具及其制备方法
BR102013031138B1 (pt) 2013-12-03 2020-10-27 Mahle International Gmbh anel de pistão
US11183375B2 (en) 2014-03-31 2021-11-23 Applied Materials, Inc. Deposition system with multi-cathode and method of manufacture thereof
EP3363568B1 (de) * 2014-06-06 2023-08-30 Sumitomo Electric Hardmetal Corp. Beschichtetes schneidwerkzeug und verfahren zum herstellen
US10431440B2 (en) 2015-12-20 2019-10-01 Applied Materials, Inc. Methods and apparatus for processing a substrate
BR102016007169B1 (pt) * 2016-03-31 2023-01-10 Mahle International Gmbh Anel de pistão para motores de combustão interna, processo para obtenção de anel de pistão e motor de combustão interna
US12009192B2 (en) * 2016-11-03 2024-06-11 Starfire Industries Llc System for coupling RF power into LINACs and bellows coating by magnetron sputtering with kick pulse
US11008650B2 (en) * 2016-11-03 2021-05-18 Starfire Industries Llc Compact system for coupling RF power directly into RF linacs
AT15596U1 (de) * 2017-02-28 2018-03-15 Plansee Composite Mat Gmbh Sputtertarget und Verfahren zur Herstellung eines Sputtertargets
US10577686B2 (en) * 2017-06-09 2020-03-03 The Boeing Company Corrosion resistant and low embrittlement aluminum alloy coatings on steel by magnetron sputtering
US20210060669A1 (en) * 2018-02-02 2021-03-04 Lockheed Martin Corporation Tribological optimized cutter tool for milling titanium or titanium alloys
CN113529038A (zh) * 2021-07-19 2021-10-22 中山市气相科技有限公司 一种耐摩擦、耐腐蚀TiN薄膜的制备方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0008234A1 (de) * 1978-08-11 1980-02-20 Mackay, Simon Brooke, The Baron Tanlaw Elektronische Kalenderanordnung
US4842710A (en) * 1987-03-23 1989-06-27 Siemens Aktiengesellschaft Method of making mixed nitride films with at least two metals
JPH02138458A (ja) * 1988-11-16 1990-05-28 Raimuzu:Kk 複合硬質材料及びその製造方法
JP3045184B2 (ja) * 1990-12-21 2000-05-29 エムエムシーコベルコツール株式会社 耐摩耗性硬質皮膜及びその形成方法と、耐摩耗性硬質皮膜被覆工具
EP0496053B1 (de) * 1991-01-21 1995-07-26 Balzers Aktiengesellschaft Beschichtetes hochverschleissfestes Werkzeug und physikalisches Beschichtungsverfahren zur Beschichtung von hochverschleissfesten Werkzeugen
US5981049A (en) * 1996-12-04 1999-11-09 Sumitomo Electric Industries, Ltd. Coated tool and method of manufacturing the same
JP3165658B2 (ja) * 1997-04-10 2001-05-14 三菱重工業株式会社 歯車加工方法
SE518145C2 (sv) * 1997-04-18 2002-09-03 Sandvik Ab Multiskiktbelagt skärverktyg
ATE291648T1 (de) * 1998-10-27 2005-04-15 Mitsubishi Mat Kobe Tools Corp Verschleissfestes beschichtetes teil
US7300559B2 (en) * 2000-04-10 2007-11-27 G & H Technologies Llc Filtered cathodic arc deposition method and apparatus
SE0004203D0 (sv) * 2000-11-16 2000-11-16 Haakan Hugosson A surface coating
DE10262174B4 (de) * 2001-07-23 2007-03-15 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.), Kobe Harte verschleissfeste Schicht, Verfahren zum Bilden derselben und Verwendung

Also Published As

Publication number Publication date
ATE420983T1 (de) 2009-01-15
GB2425780A (en) 2006-11-08
EP1874981A1 (de) 2008-01-09
US20080260478A1 (en) 2008-10-23
WO2006114610A1 (en) 2006-11-02
GB0508485D0 (en) 2005-06-01
EP1874981B1 (de) 2009-01-14
GB2425780B (en) 2007-09-05
GB2425780A8 (en) 2007-01-09
US8173248B2 (en) 2012-05-08

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