DE602006004862D1 - Pvd-beschichtetes substrat - Google Patents
Pvd-beschichtetes substratInfo
- Publication number
- DE602006004862D1 DE602006004862D1 DE200660004862 DE602006004862T DE602006004862D1 DE 602006004862 D1 DE602006004862 D1 DE 602006004862D1 DE 200660004862 DE200660004862 DE 200660004862 DE 602006004862 T DE602006004862 T DE 602006004862T DE 602006004862 D1 DE602006004862 D1 DE 602006004862D1
- Authority
- DE
- Germany
- Prior art keywords
- coating
- layer
- cyn
- incorporated
- friction coefficient
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3464—Operating strategies
- H01J37/3467—Pulsed operation, e.g. HIPIMS
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0664—Carbonitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T407/00—Cutters, for shaping
- Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T408/00—Cutting by use of rotating axially moving tool
- Y10T408/78—Tool of specific diverse material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0508485A GB2425780B (en) | 2005-04-27 | 2005-04-27 | PVD coated substrate |
PCT/GB2006/001509 WO2006114610A1 (en) | 2005-04-27 | 2006-04-25 | Pvd coated substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602006004862D1 true DE602006004862D1 (de) | 2009-03-05 |
Family
ID=34640197
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE200660004862 Active DE602006004862D1 (de) | 2005-04-27 | 2006-04-25 | Pvd-beschichtetes substrat |
Country Status (6)
Country | Link |
---|---|
US (1) | US8173248B2 (de) |
EP (1) | EP1874981B1 (de) |
AT (1) | ATE420983T1 (de) |
DE (1) | DE602006004862D1 (de) |
GB (1) | GB2425780B (de) |
WO (1) | WO2006114610A1 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005033769B4 (de) | 2005-07-15 | 2009-10-22 | Systec System- Und Anlagentechnik Gmbh & Co.Kg | Verfahren und Vorrichtung zur Mehrkathoden-PVD-Beschichtung und Substrat mit PVD-Beschichtung |
JP5259618B2 (ja) * | 2006-12-12 | 2013-08-07 | オーツェー・エリコン・バルザース・アーゲー | 高出力インパルス・マグネトロン・スパッタリング(hipims)におけるパルシング及びアーク抑制 |
US7966909B2 (en) * | 2007-07-25 | 2011-06-28 | The Gillette Company | Process of forming a razor blade |
US20100055826A1 (en) * | 2008-08-26 | 2010-03-04 | General Electric Company | Methods of Fabrication of Solar Cells Using High Power Pulsed Magnetron Sputtering |
DE102008050499B4 (de) * | 2008-10-07 | 2014-02-06 | Systec System- Und Anlagentechnik Gmbh & Co. Kg | PVD-Beschichtungsverfahren, Vorrichtung zur Durchführung des Verfahrens und nach dem Verfahren beschichtete Substrate |
US8956722B2 (en) * | 2009-02-27 | 2015-02-17 | Oerlikon Metaplas Gmbh | Layer system for the formation of a surface layer on a surface of a substrate and coating method for the manufacture of a layer system |
DE102010004661B4 (de) * | 2010-01-14 | 2014-12-24 | Siemens Aktiengesellschaft | Vanadium basierte Hartstoffbeschichtung einer Windkraftanlagenkomponente |
CN102443773A (zh) * | 2010-10-06 | 2012-05-09 | 鸿富锦精密工业(深圳)有限公司 | 涂层、具有该涂层的被覆件及该被覆件的制造方法 |
BRPI1102335A2 (pt) | 2011-05-27 | 2013-06-25 | Mahle Metal Leve Sa | elemento dotado de pelo menos uma superfÍcie de deslizamento com um revestimento para uso em um motor de combustço interna ou em um compressor |
DE102011116576A1 (de) * | 2011-10-21 | 2013-04-25 | Oerlikon Trading Ag, Trübbach | Bohrer mit Beschichtung |
TW201321542A (zh) * | 2011-11-29 | 2013-06-01 | Chenming Mold Ind Corp | 製造ic屏蔽鍍膜之設備及ic之金屬屏蔽膜層 |
RU2494173C1 (ru) * | 2012-01-23 | 2013-09-27 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Нижегородский государственный технический университет им. Р.Е. Алексеева" (НГТУ) | Способ вакуумно-плазменного осаждения покрытия на режущую пластину из твердосплавного материала |
US9126273B2 (en) | 2012-12-17 | 2015-09-08 | Kennametal Inc | Tool for the cutting machining of workpieces and process for coating substrate bodies |
CN103212729B (zh) * | 2013-04-17 | 2016-04-13 | 重庆市硅酸盐研究所 | 一种具有CrAlTiN超晶格涂层的数控刀具及其制备方法 |
BR102013031138B1 (pt) | 2013-12-03 | 2020-10-27 | Mahle International Gmbh | anel de pistão |
US11183375B2 (en) | 2014-03-31 | 2021-11-23 | Applied Materials, Inc. | Deposition system with multi-cathode and method of manufacture thereof |
CN105473261B (zh) * | 2014-06-06 | 2017-08-18 | 住友电工硬质合金株式会社 | 表面被覆工具及其制造方法 |
US10431440B2 (en) | 2015-12-20 | 2019-10-01 | Applied Materials, Inc. | Methods and apparatus for processing a substrate |
BR102016007169B1 (pt) * | 2016-03-31 | 2023-01-10 | Mahle International Gmbh | Anel de pistão para motores de combustão interna, processo para obtenção de anel de pistão e motor de combustão interna |
US11008650B2 (en) * | 2016-11-03 | 2021-05-18 | Starfire Industries Llc | Compact system for coupling RF power directly into RF linacs |
US20210327694A1 (en) * | 2016-11-03 | 2021-10-21 | Starfire Industries Llc | System for coupling rf power into linacs and bellows coating by magnetron sputtering with kick pulse |
AT15596U1 (de) * | 2017-02-28 | 2018-03-15 | Plansee Composite Mat Gmbh | Sputtertarget und Verfahren zur Herstellung eines Sputtertargets |
US10577686B2 (en) * | 2017-06-09 | 2020-03-03 | The Boeing Company | Corrosion resistant and low embrittlement aluminum alloy coatings on steel by magnetron sputtering |
WO2019152936A1 (en) * | 2018-02-02 | 2019-08-08 | Lockheed Martin Corporation | Tribological optimized cutter tool for milling titanium or titanium alloys |
CN113529038A (zh) * | 2021-07-19 | 2021-10-22 | 中山市气相科技有限公司 | 一种耐摩擦、耐腐蚀TiN薄膜的制备方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0008234A1 (de) * | 1978-08-11 | 1980-02-20 | Mackay, Simon Brooke, The Baron Tanlaw | Elektronische Kalenderanordnung |
US4842710A (en) * | 1987-03-23 | 1989-06-27 | Siemens Aktiengesellschaft | Method of making mixed nitride films with at least two metals |
JPH02138458A (ja) | 1988-11-16 | 1990-05-28 | Raimuzu:Kk | 複合硬質材料及びその製造方法 |
JP3045184B2 (ja) * | 1990-12-21 | 2000-05-29 | エムエムシーコベルコツール株式会社 | 耐摩耗性硬質皮膜及びその形成方法と、耐摩耗性硬質皮膜被覆工具 |
EP0496053B1 (de) * | 1991-01-21 | 1995-07-26 | Balzers Aktiengesellschaft | Beschichtetes hochverschleissfestes Werkzeug und physikalisches Beschichtungsverfahren zur Beschichtung von hochverschleissfesten Werkzeugen |
EP0846784B1 (de) * | 1996-12-04 | 2004-09-08 | Sumitomo Electric Industries, Ltd. | Beschichtetes Werkzeug und Verfahren zu seiner Herstellung |
JP3165658B2 (ja) | 1997-04-10 | 2001-05-14 | 三菱重工業株式会社 | 歯車加工方法 |
SE518145C2 (sv) * | 1997-04-18 | 2002-09-03 | Sandvik Ab | Multiskiktbelagt skärverktyg |
US6296928B1 (en) * | 1998-10-27 | 2001-10-02 | Mmc Kobelco Tool Co., Ltd. | Hard coating coated member having excellent wear resistance |
US7300559B2 (en) * | 2000-04-10 | 2007-11-27 | G & H Technologies Llc | Filtered cathodic arc deposition method and apparatus |
SE0004203D0 (sv) | 2000-11-16 | 2000-11-16 | Haakan Hugosson | A surface coating |
DE10233222B4 (de) * | 2001-07-23 | 2007-03-01 | Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.), Kobe | Harte verschleissfeste Schicht, Verfahren zum Bilden derselben und Verwendung |
-
2005
- 2005-04-27 GB GB0508485A patent/GB2425780B/en not_active Expired - Fee Related
-
2006
- 2006-04-25 US US11/912,549 patent/US8173248B2/en not_active Expired - Fee Related
- 2006-04-25 EP EP06726898A patent/EP1874981B1/de active Active
- 2006-04-25 WO PCT/GB2006/001509 patent/WO2006114610A1/en active Application Filing
- 2006-04-25 AT AT06726898T patent/ATE420983T1/de not_active IP Right Cessation
- 2006-04-25 DE DE200660004862 patent/DE602006004862D1/de active Active
Also Published As
Publication number | Publication date |
---|---|
WO2006114610A1 (en) | 2006-11-02 |
US8173248B2 (en) | 2012-05-08 |
GB2425780A (en) | 2006-11-08 |
ATE420983T1 (de) | 2009-01-15 |
EP1874981B1 (de) | 2009-01-14 |
GB2425780A8 (en) | 2007-01-09 |
GB2425780B (en) | 2007-09-05 |
US20080260478A1 (en) | 2008-10-23 |
EP1874981A1 (de) | 2008-01-09 |
GB0508485D0 (en) | 2005-06-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |