DE602005008351D1 - Pneumatisches Gewichtsausgleichssystem - Google Patents

Pneumatisches Gewichtsausgleichssystem

Info

Publication number
DE602005008351D1
DE602005008351D1 DE602005008351T DE602005008351T DE602005008351D1 DE 602005008351 D1 DE602005008351 D1 DE 602005008351D1 DE 602005008351 T DE602005008351 T DE 602005008351T DE 602005008351 T DE602005008351 T DE 602005008351T DE 602005008351 D1 DE602005008351 D1 DE 602005008351D1
Authority
DE
Germany
Prior art keywords
counterweight system
pneumatic
pneumatic counterweight
counterweight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005008351T
Other languages
English (en)
Inventor
Tomohiko Kawai
Kenzo Fanuc Ebihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fanuc Corp
Original Assignee
Fanuc Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fanuc Corp filed Critical Fanuc Corp
Publication of DE602005008351D1 publication Critical patent/DE602005008351D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G5/00—Weighing apparatus wherein the balancing is effected by fluid action
    • G01G5/006—Weighing apparatus wherein the balancing is effected by fluid action with pneumatic means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S92/00—Expansible chamber devices
    • Y10S92/02—Fluid bearing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Actuator (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Machine Tool Units (AREA)
DE602005008351T 2004-12-22 2005-12-21 Pneumatisches Gewichtsausgleichssystem Active DE602005008351D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004371144A JP2006177437A (ja) 2004-12-22 2004-12-22 エアバランス構造

Publications (1)

Publication Number Publication Date
DE602005008351D1 true DE602005008351D1 (de) 2008-09-04

Family

ID=35998555

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005008351T Active DE602005008351D1 (de) 2004-12-22 2005-12-21 Pneumatisches Gewichtsausgleichssystem

Country Status (5)

Country Link
US (1) US7578228B2 (de)
EP (1) EP1674198B1 (de)
JP (1) JP2006177437A (de)
CN (1) CN1815633A (de)
DE (1) DE602005008351D1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006196065A (ja) * 2005-01-12 2006-07-27 Fuji Photo Film Co Ltd サーボライタ
JP4382133B2 (ja) * 2008-03-11 2009-12-09 ファナック株式会社 シャトルを備えた加工機
JP5473319B2 (ja) * 2008-12-26 2014-04-16 キヤノン株式会社 位置決め装置
JP5221719B2 (ja) * 2011-08-18 2013-06-26 ファナック株式会社 エアバランスを利用して退避動作を行う位置決め装置
JP6123579B2 (ja) * 2013-08-28 2017-05-10 三星ダイヤモンド工業株式会社 加工装置
CN104908981B (zh) * 2015-07-13 2017-03-15 哈尔滨工业大学 多自由度气浮平台的垂向气压补偿装置及垂向气压补偿方法
CN105083595A (zh) * 2015-09-21 2015-11-25 黑龙江大学 一种气浮台垂向气压控制系统及其控制方法
CN105526346B (zh) * 2016-01-20 2017-05-24 江苏浙南装备技术有限公司 一种c型气缸活塞组合

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US397393A (en) * 1889-02-05 Baling-press
DE2629431C2 (de) 1976-06-30 1981-10-08 Friedrich Wilhelm 8900 Augsburg Ortmann Schlittenständereinheit für Sonderwerkzeugmaschinen
JPS56166122U (de) 1980-05-08 1981-12-09
US5218896A (en) 1986-11-06 1993-06-15 Canon Kabushiki Kaisha Driving mechanism with gas bearing
JPS6435108A (en) 1987-07-30 1989-02-06 Canon Kk Drive mechanism
JPH01181522A (ja) 1988-01-12 1989-07-19 Sumitomo Heavy Ind Ltd 半導体素子製造用ｘ線露光装置
JPH0517876Y2 (de) 1988-01-22 1993-05-13
JPH08267329A (ja) * 1995-01-31 1996-10-15 Kyocera Corp 位置決め装置
JP3044196B2 (ja) 1996-11-11 2000-05-22 ファナック株式会社 被駆動体のバランス機構
JP2001050210A (ja) 1999-08-09 2001-02-23 Sumitomo Heavy Ind Ltd Ｘ−ｙテーブル
JP4335425B2 (ja) 2000-08-28 2009-09-30 住友重機械工業株式会社 ステージ装置

Also Published As

Publication number Publication date
US7578228B2 (en) 2009-08-25
US20060219095A1 (en) 2006-10-05
EP1674198B1 (de) 2008-07-23
EP1674198A1 (de) 2006-06-28
JP2006177437A (ja) 2006-07-06
CN1815633A (zh) 2006-08-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition