DE602005005007D1 - FET-Biosensor mit Oberflächenänderung - Google Patents

FET-Biosensor mit Oberflächenänderung

Info

Publication number
DE602005005007D1
DE602005005007D1 DE602005005007T DE602005005007T DE602005005007D1 DE 602005005007 D1 DE602005005007 D1 DE 602005005007D1 DE 602005005007 T DE602005005007 T DE 602005005007T DE 602005005007 T DE602005005007 T DE 602005005007T DE 602005005007 D1 DE602005005007 D1 DE 602005005007D1
Authority
DE
Germany
Prior art keywords
surface modification
fet biosensor
biosensor
fet
modification
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005005007T
Other languages
English (en)
Other versions
DE602005005007T2 (de
Inventor
Jeo-Young Shim
Ji-Na Namgoong
Kyu-Tae Yoo
Sung-Ouk Jung
Joon-Shik Park
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of DE602005005007D1 publication Critical patent/DE602005005007D1/de
Application granted granted Critical
Publication of DE602005005007T2 publication Critical patent/DE602005005007T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4145—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for biomolecules, e.g. gate electrode with immobilised receptors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12Q—MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
    • C12Q1/00—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
    • C12Q1/68—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions involving nucleic acids
    • C12Q1/6813—Hybridisation assays
    • C12Q1/6834—Enzymatic or biochemical coupling of nucleic acids to a solid phase

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • General Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Electrochemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Pathology (AREA)
  • Materials Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Composite Materials (AREA)
  • Proteomics, Peptides & Aminoacids (AREA)
  • Wood Science & Technology (AREA)
  • Zoology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Microbiology (AREA)
  • Genetics & Genomics (AREA)
  • General Engineering & Computer Science (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Biotechnology (AREA)
  • Biophysics (AREA)
  • Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Light Receiving Elements (AREA)
DE602005005007T 2005-01-20 2005-12-14 FET-Biosensor mit Oberflächenänderung Active DE602005005007T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020050005531A KR100682918B1 (ko) 2005-01-20 2005-01-20 표면 개질을 갖는 ｆｅｔ형 바이오 센서
KR2005005531 2005-01-20

Publications (2)

Publication Number Publication Date
DE602005005007D1 true DE602005005007D1 (de) 2008-04-10
DE602005005007T2 DE602005005007T2 (de) 2009-03-19

Family

ID=35708373

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005005007T Active DE602005005007T2 (de) 2005-01-20 2005-12-14 FET-Biosensor mit Oberflächenänderung

Country Status (7)

Country Link
US (1) US8735077B2 (de)
EP (1) EP1684066B1 (de)
JP (1) JP2006201178A (de)
KR (1) KR100682918B1 (de)
CN (1) CN1811398A (de)
DE (1) DE602005005007T2 (de)
TW (1) TW200638034A (de)

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KR100738081B1 (ko) * 2005-11-22 2007-07-12 삼성전자주식회사 무기막을 구비하는 ｆｅｔ 기반 바이오 센서, 그의 제조방법 및 그를 이용한 생분자 검출 방법
WO2014160962A2 (en) * 2013-03-29 2014-10-02 Life Technologies Corporation Method for treating a semiconductor device
KR100889564B1 (ko) * 2006-12-04 2009-03-23 한국전자통신연구원 바이오 센서 및 그 제조 방법
US8198658B2 (en) * 2007-06-13 2012-06-12 Samsung Electronics Co., Ltd. Device and method for detecting biomolecules using adsorptive medium and field effect transistor
WO2009041914A1 (en) * 2007-09-26 2009-04-02 Agency For Science, Technology And Research A biosensor and a method for determining the ohmic resistance of a sensing circuit of a biosensor
KR100940524B1 (ko) 2007-12-13 2010-02-10 한국전자통신연구원 고감도 반도체 ｆｅｔ 센서 및 그 제조방법
JP2009156827A (ja) * 2007-12-28 2009-07-16 Univ Waseda 半導体センシング用電界効果型トランジスタ及びこれを用いた半導体センシングデバイス
TWI362488B (en) * 2008-02-13 2012-04-21 Ind Tech Res Inst Transistor type pressure sensor and method for making the same
JP5181837B2 (ja) 2008-05-28 2013-04-10 ミツミ電機株式会社 センサ及びその製造方法
WO2010059126A1 (en) * 2008-11-20 2010-05-27 Agency For Science, Technology And Research Sensor for detection of nucleic acid
KR101217576B1 (ko) * 2009-09-22 2013-01-03 한국전자통신연구원 바이오 센서 및 그의 구동 방법
JP2011169692A (ja) 2010-02-17 2011-09-01 Mitsumi Electric Co Ltd バイオセンサの製造方法
JP5402758B2 (ja) 2010-03-19 2014-01-29 ミツミ電機株式会社 バイオセンサキット
US8450131B2 (en) 2011-01-11 2013-05-28 Nanohmics, Inc. Imprinted semiconductor multiplex detection array
US9676621B2 (en) 2011-02-18 2017-06-13 Uwm Research Foundation, Inc. Graphene-based field-effect transistor biosensors
EP2700937A4 (de) * 2011-04-20 2014-09-03 Nat Univ Corp Tokyo Med & Dent Elektrodenchip zum nachweis biologischer moleküle und verfahren zum nachweis biologischer moleküle
CN111678964B (zh) 2014-07-02 2023-12-05 生命技术公司 半导体传感器的表面处理
US10281464B2 (en) 2014-08-01 2019-05-07 Uwm Research Foundation, Inc. Real-time detection of water contaminants
US9555451B2 (en) 2015-03-26 2017-01-31 Life Technologies Corporation Method for treating a semiconductor device
WO2017073665A1 (ja) * 2015-10-30 2017-05-04 Ｎｅｃソリューションイノベータ株式会社 検出デバイスおよびこれを用いたターゲットの検出方法
US10656088B2 (en) 2016-08-12 2020-05-19 Silanna UV Technologies Pte Ltd Ultraviolet biosensor
TWI661568B (zh) 2017-10-05 2019-06-01 國立清華大學 感測裝置及生物檢測方法
KR102067780B1 (ko) 2018-04-26 2020-01-17 고려대학교 산학협력단 다환 방향족 탄화수소 기반의 분자 전자 소자용 화합물 및 이를 포함하는 분자 전자 소자
CN108957007B (zh) * 2018-07-24 2021-08-17 无锡市人民医院 一种联合透析装置和硅纳米线场效应管的生物传感器
US10679851B2 (en) * 2018-07-25 2020-06-09 Wuhan China Star Optoelectronics Technology Co., Ltd. Poly-silicon thin film and preparation method of thin film transistor
WO2020240041A1 (en) 2019-05-31 2020-12-03 Life Science Inkubator Sachsen Gmbh & Co. Kg Semiconductor based biosensor utilizing the field effect of a novel complex comprising a charged nanoparticle
CN110942981A (zh) * 2019-12-10 2020-03-31 上海华力微电子有限公司 涂胶方法及半导体结构
WO2022246261A2 (en) * 2021-05-20 2022-11-24 Cardea Bio, Inc. Ntegrated circuit with 2d fets for direct and indirect target signal measurement
WO2023102062A1 (en) * 2021-12-01 2023-06-08 Board Of Regents, The University Of Texas System Multi-targeted, modular virus sensing platform

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US4238757A (en) * 1976-03-19 1980-12-09 General Electric Company Field effect transistor for detection of biological reactions
DE3513168A1 (de) * 1985-04-12 1986-10-16 Thomas 8000 München Dandekar Biosensor bestehend aus einem halbleiter auf silizium oder kohlenstoffbasis (elektronischer teil) und nukleinbasen (od. anderen biol. monomeren)
US5998135A (en) * 1989-02-24 1999-12-07 Enzo Diagnostics, Inc. Energy transfer hybridization assay using intercalators and lanthanide metals
FR2672158B1 (fr) * 1991-01-24 1993-04-09 Commissariat Energie Atomique Capteur pour la detection d'especes chimiques ou de photons utilisant un transistor a effet de champ.
US5827482A (en) * 1996-08-20 1998-10-27 Motorola Corporation Transistor-based apparatus and method for molecular detection and field enhancement
US6602399B1 (en) * 2000-03-22 2003-08-05 Max-Planck-Gesellschaft Zur Forderung Der Wissenchaften E.V. Signal recording of a receptor-effector-system by an extracellular planar potential-sensitive electrode
US6429040B1 (en) * 2000-04-06 2002-08-06 Agere Systems Guardian Corp. Device comprising a bipolar semi-conducting film
KR100442838B1 (ko) * 2001-12-11 2004-08-02 삼성전자주식회사 프로브의 고정화 검출방법 및 상기 프로브와 표적시료의결합정도 검출방법
US7198754B2 (en) * 2001-08-31 2007-04-03 Kabushiki Kaisha Toshiba Biological material detection element, biological material detection method and apparatus, charged material moving apparatus
JP2003144152A (ja) * 2001-11-09 2003-05-20 Fuji Photo Film Co Ltd ターゲット核酸断片の検出方法及びターゲット核酸断片の検出キット
US20050170347A1 (en) 2001-12-19 2005-08-04 Yuji Miyahara Potentiometric dna microarray, process for producing the same and method of analyzing nucleic acid
US7273704B2 (en) * 2002-08-12 2007-09-25 Hitachi High-Technologies Corporation Method of detecting nucleic acid by using DNA microarrays and nucleic acid detection apparatus
US7189987B2 (en) * 2003-04-02 2007-03-13 Lucent Technologies Inc. Electrical detection of selected species
WO2004106890A2 (en) * 2003-05-22 2004-12-09 Ciphergen Biosystems, Inc. Trace incorporation of fluorescent monomer facilitating quality control of polymerization reactions
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Also Published As

Publication number Publication date
EP1684066A1 (de) 2006-07-26
KR20060084735A (ko) 2006-07-25
EP1684066B1 (de) 2008-02-27
JP2006201178A (ja) 2006-08-03
US8735077B2 (en) 2014-05-27
CN1811398A (zh) 2006-08-02
TW200638034A (en) 2006-11-01
KR100682918B1 (ko) 2007-02-15
US20060205013A1 (en) 2006-09-14
DE602005005007T2 (de) 2009-03-19

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