DE602005004124D1 - Plasmaerzeuger - Google Patents

Plasmaerzeuger

Info

Publication number
DE602005004124D1
DE602005004124D1 DE602005004124T DE602005004124T DE602005004124D1 DE 602005004124 D1 DE602005004124 D1 DE 602005004124D1 DE 602005004124 T DE602005004124 T DE 602005004124T DE 602005004124 T DE602005004124 T DE 602005004124T DE 602005004124 D1 DE602005004124 D1 DE 602005004124D1
Authority
DE
Germany
Prior art keywords
waveguide
supporting element
duct
region
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005004124T
Other languages
English (en)
Other versions
DE602005004124T2 (de
Inventor
Paolo Veronesi
Cristina Leonelli
Marco Garuti
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alter SRL
Original Assignee
Alter SRL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alter SRL filed Critical Alter SRL
Publication of DE602005004124D1 publication Critical patent/DE602005004124D1/de
Application granted granted Critical
Publication of DE602005004124T2 publication Critical patent/DE602005004124T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
  • Developing Agents For Electrophotography (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
  • Permanent Magnet Type Synchronous Machine (AREA)
DE602005004124T 2005-04-29 2005-04-29 Plasmaerzeuger Active DE602005004124T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP05425273A EP1718135B1 (de) 2005-04-29 2005-04-29 Plasmaerzeuger

Publications (2)

Publication Number Publication Date
DE602005004124D1 true DE602005004124D1 (de) 2008-02-14
DE602005004124T2 DE602005004124T2 (de) 2008-12-24

Family

ID=34981151

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005004124T Active DE602005004124T2 (de) 2005-04-29 2005-04-29 Plasmaerzeuger

Country Status (3)

Country Link
EP (1) EP1718135B1 (de)
AT (1) ATE383063T1 (de)
DE (1) DE602005004124T2 (de)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4217900A1 (de) * 1992-05-29 1993-12-02 Leybold Ag Anordnung einer mikrowellendurchlässigen Scheibe in einem Hohlleiter und Verfahren zur Einbringung dieser Scheibe
US5714009A (en) * 1995-01-11 1998-02-03 Deposition Sciences, Inc. Apparatus for generating large distributed plasmas by means of plasma-guided microwave power
FR2815888B1 (fr) * 2000-10-27 2003-05-30 Air Liquide Dispositif de traitement de gaz par plasma

Also Published As

Publication number Publication date
DE602005004124T2 (de) 2008-12-24
ATE383063T1 (de) 2008-01-15
EP1718135A1 (de) 2006-11-02
EP1718135B1 (de) 2008-01-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition