DE602004030748D1 - Doppel-Para-Xylylene Schichten für einen Röntgenstrahlungsdetektor - Google Patents

Doppel-Para-Xylylene Schichten für einen Röntgenstrahlungsdetektor

Info

Publication number
DE602004030748D1
DE602004030748D1 DE602004030748T DE602004030748T DE602004030748D1 DE 602004030748 D1 DE602004030748 D1 DE 602004030748D1 DE 602004030748 T DE602004030748 T DE 602004030748T DE 602004030748 T DE602004030748 T DE 602004030748T DE 602004030748 D1 DE602004030748 D1 DE 602004030748D1
Authority
DE
Germany
Prior art keywords
xylylene
layers
ray detector
double para
para
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004030748T
Other languages
German (de)
English (en)
Inventor
Jeffrey Jon Shaw
David Francis Fobare
Ching-Yeu Wei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of DE602004030748D1 publication Critical patent/DE602004030748D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2002—Optical details, e.g. reflecting or diffusing layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
    • G01T1/2914—Measurement of spatial distribution of radiation
    • G01T1/2921—Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras
    • G01T1/2928—Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras using solid state detectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/189—X-ray, gamma-ray or corpuscular radiation imagers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/805—Coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/40—Optical elements or arrangements
    • H10F77/496—Luminescent members, e.g. fluorescent sheets

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
DE602004030748T 2003-07-30 2004-07-27 Doppel-Para-Xylylene Schichten für einen Röntgenstrahlungsdetektor Expired - Lifetime DE602004030748D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/631,197 US7053381B2 (en) 2001-12-06 2003-07-30 Dual para-xylylene layers for an X-ray detector

Publications (1)

Publication Number Publication Date
DE602004030748D1 true DE602004030748D1 (de) 2011-02-10

Family

ID=33541516

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004030748T Expired - Lifetime DE602004030748D1 (de) 2003-07-30 2004-07-27 Doppel-Para-Xylylene Schichten für einen Röntgenstrahlungsdetektor

Country Status (4)

Country Link
US (1) US7053381B2 (https=)
EP (1) EP1503419B1 (https=)
JP (1) JP4512439B2 (https=)
DE (1) DE602004030748D1 (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1647595A (zh) * 2002-04-11 2005-07-27 皇家飞利浦电子股份有限公司 电绝缘体和电子器件
JP4112448B2 (ja) * 2003-07-28 2008-07-02 株式会社東芝 電気光配線基板及び半導体装置
JP5905672B2 (ja) * 2011-06-28 2016-04-20 株式会社東芝 放射線検出器及びその製造方法
US8415628B1 (en) 2011-10-31 2013-04-09 General Electric Company Hermetically sealed radiation detector and methods for making
JP6041594B2 (ja) * 2012-09-14 2016-12-14 浜松ホトニクス株式会社 シンチレータパネル、及び、放射線検出器
US9935152B2 (en) 2012-12-27 2018-04-03 General Electric Company X-ray detector having improved noise performance
US9917133B2 (en) 2013-12-12 2018-03-13 General Electric Company Optoelectronic device with flexible substrate
US10732131B2 (en) 2014-03-13 2020-08-04 General Electric Company Curved digital X-ray detector for weld inspection
US9515276B2 (en) 2014-09-02 2016-12-06 General Electric Company Organic X-ray detector and X-ray systems
US9535173B2 (en) 2014-09-11 2017-01-03 General Electric Company Organic x-ray detector and x-ray systems
US9513383B1 (en) * 2015-06-03 2016-12-06 Perkinelmer Holdings, Inc. Scintillator sealing with foil

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4011454A (en) 1975-04-28 1977-03-08 General Electric Company Structured X-ray phosphor screen
JPH03211757A (ja) 1989-12-21 1991-09-17 General Electric Co <Ge> 気密封じの物体
US5153438A (en) 1990-10-01 1992-10-06 General Electric Company Method of forming an x-ray imaging array and the array
US5187369A (en) 1990-10-01 1993-02-16 General Electric Company High sensitivity, high resolution, solid state x-ray imaging device with barrier layer
US5171996A (en) 1991-07-31 1992-12-15 Regents Of The University Of California Particle detector spatial resolution
US5179284A (en) 1991-08-21 1993-01-12 General Electric Company Solid state radiation imager having a reflective and protective coating
US5132539A (en) 1991-08-29 1992-07-21 General Electric Company Planar X-ray imager having a moisture-resistant sealing structure
US5227635A (en) 1991-11-22 1993-07-13 Xsirious, Inc. Mercuric iodide x-ray detector
US5336928A (en) 1992-09-18 1994-08-09 General Electric Company Hermetically sealed packaged electronic system
US5368882A (en) 1993-08-25 1994-11-29 Minnesota Mining And Manufacturing Company Process for forming a radiation detector
US5401668A (en) 1993-09-02 1995-03-28 General Electric Company Method for fabrication solid state radiation imager having improved scintillator adhesion
CA2131243A1 (en) 1993-09-27 1995-03-28 Kenneth R. Paulson Process for forming a phosphor
US5654084A (en) 1994-07-22 1997-08-05 Martin Marietta Energy Systems, Inc. Protective coatings for sensitive materials
CN1133881C (zh) 1997-02-14 2004-01-07 浜松光子学株式会社 放射线检测元件及其制造方法
DE69817035T2 (de) 1997-02-14 2004-06-09 Hamamatsu Photonics K.K., Hamamatsu Strahlungsdetektor und Verfahren zu seiner Herstellung
JP3405706B2 (ja) * 1997-02-14 2003-05-12 浜松ホトニクス株式会社 放射線検出素子
JP3924352B2 (ja) 1997-06-05 2007-06-06 浜松ホトニクス株式会社 裏面照射型受光デバイス
JP3789646B2 (ja) * 1998-06-19 2006-06-28 浜松ホトニクス株式会社 放射線イメージセンサ
US6146489A (en) 1998-11-19 2000-11-14 General Electric Company Method and apparatus for depositing scintillator material on radiation imager
JP3276614B2 (ja) * 1999-04-22 2002-04-22 浜松ホトニクス株式会社 光学素子、放射線イメージセンサ及び光学素子の製造方法
US6720561B2 (en) * 2001-12-06 2004-04-13 General Electric Company Direct CsI scintillator coating for improved digital X-ray detector assembly longevity

Also Published As

Publication number Publication date
EP1503419A2 (en) 2005-02-02
EP1503419B1 (en) 2010-12-29
US20040021084A1 (en) 2004-02-05
JP2005134370A (ja) 2005-05-26
JP4512439B2 (ja) 2010-07-28
EP1503419A3 (en) 2006-05-31
US7053381B2 (en) 2006-05-30

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