DE602004019153D1 - Plasmabogen-beschichtungssystem - Google Patents

Plasmabogen-beschichtungssystem

Info

Publication number
DE602004019153D1
DE602004019153D1 DE602004019153T DE602004019153T DE602004019153D1 DE 602004019153 D1 DE602004019153 D1 DE 602004019153D1 DE 602004019153 T DE602004019153 T DE 602004019153T DE 602004019153 T DE602004019153 T DE 602004019153T DE 602004019153 D1 DE602004019153 D1 DE 602004019153D1
Authority
DE
Germany
Prior art keywords
coating system
plasma arc
arc coating
plasma
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004019153T
Other languages
English (en)
Inventor
Steven M Gasworth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Exatec LLC
Original Assignee
Exatec LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Exatec LLC filed Critical Exatec LLC
Publication of DE602004019153D1 publication Critical patent/DE602004019153D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/02—Pretreatment of the material to be coated, e.g. for coating on selected surface areas
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134—Plasma spraying
DE602004019153T 2004-08-03 2004-10-27 Plasmabogen-beschichtungssystem Active DE602004019153D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/910,143 US7521653B2 (en) 2004-08-03 2004-08-03 Plasma arc coating system
PCT/US2004/035572 WO2006022778A2 (en) 2004-08-03 2004-10-27 Plasma arc coating system

Publications (1)

Publication Number Publication Date
DE602004019153D1 true DE602004019153D1 (de) 2009-03-05

Family

ID=34979990

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004019153T Active DE602004019153D1 (de) 2004-08-03 2004-10-27 Plasmabogen-beschichtungssystem

Country Status (7)

Country Link
US (3) US7521653B2 (de)
EP (2) EP2048264A1 (de)
JP (2) JP5069113B2 (de)
KR (1) KR101181179B1 (de)
CN (1) CN101218372A (de)
DE (1) DE602004019153D1 (de)
WO (1) WO2006022778A2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7521653B2 (en) * 2004-08-03 2009-04-21 Exatec Llc Plasma arc coating system
CN101198463A (zh) * 2005-02-23 2008-06-11 埃克阿泰克有限责任公司 具有均匀耐候特性的塑料板
KR101482805B1 (ko) 2006-12-28 2015-01-14 엑사테크 엘.엘.씨. 플라즈마 아크 코팅용 장치와 방법
JP5916287B2 (ja) * 2007-05-17 2016-05-11 エグザテック・リミテッド・ライアビリティー・カンパニーＥｘａｔｅｃ，ＬＬＣ． 基板をコーティングする方法
WO2010151816A1 (en) * 2009-06-26 2010-12-29 Eric Kuhrts Water-soluble dietary fatty acids
JP2011144412A (ja) * 2010-01-13 2011-07-28 Honda Motor Co Ltd プラズマ成膜装置
EP2697295B1 (de) 2011-04-14 2018-12-19 Exatec, LLC. Organisches harzlaminat
CN103337457B (zh) * 2013-05-29 2016-05-25 京东方科技集团股份有限公司 退火装置和退火工艺
US9631981B2 (en) * 2013-09-30 2017-04-25 Electronics And Telecommunications Research Institute Apparatus and method for measuring thermoelectric device
US10683433B2 (en) 2014-10-29 2020-06-16 Ppg Industries Ohio, Inc. Protective coating system for plastic substrate
US11812540B1 (en) * 2019-09-30 2023-11-07 Board Of Trustees Of The University Of Alabama, For And On Behalf Of The University Of Alabama In Huntsville Continuous large area cold atmospheric pressure plasma sheet source

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Publication number Priority date Publication date Assignee Title
BE814046A (fr) * 1974-04-22 1974-08-16 Procede et installation pour l'application en continu d'un revetement metallique sur une tole en bande.
FR2590808B1 (fr) * 1985-12-04 1989-09-15 Canon Kk Dispositif de soufflage de particules fines
US5047612A (en) * 1990-02-05 1991-09-10 General Electric Company Apparatus and method for controlling powder deposition in a plasma spray process
FR2674450B1 (fr) * 1991-03-26 1994-01-21 Agence Spatiale Europeenne Procede pour deposer un revetement sur un substrat par projection au plasma, et dispositif pour la mise en óoeuvre du procede.
US5670224A (en) 1992-11-13 1997-09-23 Energy Conversion Devices, Inc. Modified silicon oxide barrier coatings produced by microwave CVD deposition on polymeric substrates
US6110544A (en) 1997-06-26 2000-08-29 General Electric Company Protective coating by high rate arc plasma deposition
US5993915A (en) * 1997-08-14 1999-11-30 Adaptive Coating Technologies, Llc Fusing thermal spray coating and heat treating base material using infrared heating
JP2000167484A (ja) 1998-11-30 2000-06-20 Nakashima:Kk ガラス溶射方法および装置
US6793981B2 (en) * 1999-03-23 2004-09-21 Dai Nippon Printing Co., Ltd. Process for producing laminated film, and reflection reducing film
US6259072B1 (en) * 1999-11-09 2001-07-10 Axcelis Technologies, Inc. Zone controlled radiant heating system utilizing focused reflector
KR100436297B1 (ko) * 2000-03-14 2004-06-18 주성엔지니어링(주) 반도체 소자 제조용 플라즈마 스프레이 장치 및 이를이용한 반도체 소자 제조방법
US6947802B2 (en) * 2000-04-10 2005-09-20 Hypertherm, Inc. Centralized control architecture for a laser materials processing system
US7223676B2 (en) * 2002-06-05 2007-05-29 Applied Materials, Inc. Very low temperature CVD process with independently variable conformality, stress and composition of the CVD layer
US6397776B1 (en) * 2001-06-11 2002-06-04 General Electric Company Apparatus for large area chemical vapor deposition using multiple expanding thermal plasma generators
US6681716B2 (en) * 2001-11-27 2004-01-27 General Electric Company Apparatus and method for depositing large area coatings on non-planar surfaces
US6948448B2 (en) * 2001-11-27 2005-09-27 General Electric Company Apparatus and method for depositing large area coatings on planar surfaces
US6818864B2 (en) * 2002-08-09 2004-11-16 Asm America, Inc. LED heat lamp arrays for CVD heating
KR100977955B1 (ko) 2003-02-20 2010-08-24 사빅 이노베이티브 플라스틱스 아이피 비.브이. 큰 면적의 코팅재를 평면에 침착시키기 위한 장치 및 방법
WO2005087977A1 (en) 2004-03-09 2005-09-22 Exatec, Llc Expanding thermal plasma deposition system
US7521653B2 (en) * 2004-08-03 2009-04-21 Exatec Llc Plasma arc coating system
US20060156983A1 (en) * 2005-01-19 2006-07-20 Surfx Technologies Llc Low temperature, atmospheric pressure plasma generation and applications
US7312422B2 (en) * 2006-03-17 2007-12-25 Momentive Performance Materials Inc. Semiconductor batch heating assembly
KR101482805B1 (ko) 2006-12-28 2015-01-14 엑사테크 엘.엘.씨. 플라즈마 아크 코팅용 장치와 방법
JP5916287B2 (ja) * 2007-05-17 2016-05-11 エグザテック・リミテッド・ライアビリティー・カンパニーＥｘａｔｅｃ，ＬＬＣ． 基板をコーティングする方法

Also Published As

Publication number Publication date
CN101218372A (zh) 2008-07-09
EP2048264A1 (de) 2009-04-15
JP2011137237A (ja) 2011-07-14
JP5069113B2 (ja) 2012-11-07
US20060029746A1 (en) 2006-02-09
US8203103B2 (en) 2012-06-19
US20090181186A1 (en) 2009-07-16
EP1781837A2 (de) 2007-05-09
WO2006022778A2 (en) 2006-03-02
US8049144B2 (en) 2011-11-01
WO2006022778A3 (en) 2007-09-20
KR20070048224A (ko) 2007-05-08
US20110165333A1 (en) 2011-07-07
US7521653B2 (en) 2009-04-21
JP2008509283A (ja) 2008-03-27
EP1781837B1 (de) 2009-01-14
KR101181179B1 (ko) 2012-09-18
JP5436472B2 (ja) 2014-03-05

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