DE602004004112D1 - Vorrichtung zur bereichsweisen oberflächenbehandlung eines gegenstands mittels dielektrisch behinderter gasentladung - Google Patents

Vorrichtung zur bereichsweisen oberflächenbehandlung eines gegenstands mittels dielektrisch behinderter gasentladung

Info

Publication number
DE602004004112D1
DE602004004112D1 DE602004004112T DE602004004112T DE602004004112D1 DE 602004004112 D1 DE602004004112 D1 DE 602004004112D1 DE 602004004112 T DE602004004112 T DE 602004004112T DE 602004004112 T DE602004004112 T DE 602004004112T DE 602004004112 D1 DE602004004112 D1 DE 602004004112D1
Authority
DE
Germany
Prior art keywords
surface treatment
mixture
gas mixture
discharge
central axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004004112T
Other languages
English (en)
Other versions
DE602004004112T2 (de
Inventor
Alain Villermet
Francois Coeuret
Jacques Delumeau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA a Directoire et Conseil de Surveillance pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA a Directoire et Conseil de Surveillance pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Publication of DE602004004112D1 publication Critical patent/DE602004004112D1/de
Application granted granted Critical
Publication of DE602004004112T2 publication Critical patent/DE602004004112T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • External Artificial Organs (AREA)
DE602004004112T 2003-05-21 2004-05-07 Vorrichtung zur bereichsweisen oberflächenbehandlung eines gegenstands mittels dielektrisch behinderter gasentladung Expired - Lifetime DE602004004112T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0306084 2003-05-21
FR0306084A FR2855322B1 (fr) 2003-05-21 2003-05-21 Dispositif de traitement de surface par zone d'un article
PCT/FR2004/001121 WO2004105079A1 (fr) 2003-05-21 2004-05-07 Dispositif de traitement de surface par zone d'un article par decharge electrique a barriere dielectrique

Publications (2)

Publication Number Publication Date
DE602004004112D1 true DE602004004112D1 (de) 2007-02-15
DE602004004112T2 DE602004004112T2 (de) 2007-07-12

Family

ID=33396625

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004004112T Expired - Lifetime DE602004004112T2 (de) 2003-05-21 2004-05-07 Vorrichtung zur bereichsweisen oberflächenbehandlung eines gegenstands mittels dielektrisch behinderter gasentladung

Country Status (10)

Country Link
US (1) US7699022B2 (de)
EP (1) EP1629517B1 (de)
JP (1) JP4728241B2 (de)
AT (1) ATE350760T1 (de)
CA (1) CA2526257C (de)
DE (1) DE602004004112T2 (de)
DK (1) DK1629517T3 (de)
ES (1) ES2280035T3 (de)
FR (1) FR2855322B1 (de)
WO (1) WO2004105079A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5911178B2 (ja) * 2013-05-07 2016-04-27 株式会社イー・スクエア プラズマ表面処理装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3760153A (en) * 1972-02-16 1973-09-18 Du Pont Apparatus for perforating thermoplastic sheet materials with an electric arc
IT1103665B (it) 1978-01-12 1985-10-14 Gianfranco Galimberti Dispositivo per attuare un trattamento superficiale uniforme su materie plastiche mediante scariche elettriche ad effetto corona
US4636640A (en) * 1983-07-01 1987-01-13 Pillar Corporation Corona discharge electrode assembly
US4684803A (en) * 1985-12-09 1987-08-04 Pillar Technologies, Inc. Electrode segments for corona discharge devices
FR2704558B1 (fr) * 1993-04-29 1995-06-23 Air Liquide Procede et dispositif pour creer un depot d'oxyde de silicium sur un substrat solide en defilement.
US6007784A (en) * 1997-07-11 1999-12-28 3Dt, Inc. Electric discharge surface treating electrode and system
FR2782837B1 (fr) * 1998-08-28 2000-09-29 Air Liquide Procede et dispositif de traitement de surface par plasma a pression atmospherique
AU6784600A (en) 1999-08-17 2001-03-13 Progress Software, Inc. Concurrent commit lock
EP1125972A1 (de) 2000-02-11 2001-08-22 L'air Liquide Société Anonyme pour l'étude et l'exploitation des procédés Georges Claude Verfahren zur Oberflächenbehandlung polymerer Substrate
FR2816726B1 (fr) 2000-11-16 2006-06-23 Air Liquide Installation dans laquelle est realisee une operation necessitant un controle de l'atmosphere a l'interieur d'une enceinte
TW200308187A (en) * 2002-04-10 2003-12-16 Dow Corning Ireland Ltd An atmospheric pressure plasma assembly

Also Published As

Publication number Publication date
CA2526257A1 (fr) 2004-12-02
FR2855322A1 (fr) 2004-11-26
ATE350760T1 (de) 2007-01-15
EP1629517A1 (de) 2006-03-01
US20070119374A1 (en) 2007-05-31
CA2526257C (fr) 2014-03-25
WO2004105079A8 (fr) 2005-04-14
JP2007502524A (ja) 2007-02-08
FR2855322B1 (fr) 2005-07-01
EP1629517B1 (de) 2007-01-03
DE602004004112T2 (de) 2007-07-12
WO2004105079A1 (fr) 2004-12-02
DK1629517T3 (da) 2007-05-07
US7699022B2 (en) 2010-04-20
ES2280035T3 (es) 2007-09-01
JP4728241B2 (ja) 2011-07-20

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