ATE350760T1 - Vorrichtung zur bereichsweisen oberflächenbehandlung eines gegenstands mittels dielektrisch behinderter gasentladung - Google Patents
Vorrichtung zur bereichsweisen oberflächenbehandlung eines gegenstands mittels dielektrisch behinderter gasentladungInfo
- Publication number
- ATE350760T1 ATE350760T1 AT04742679T AT04742679T ATE350760T1 AT E350760 T1 ATE350760 T1 AT E350760T1 AT 04742679 T AT04742679 T AT 04742679T AT 04742679 T AT04742679 T AT 04742679T AT E350760 T1 ATE350760 T1 AT E350760T1
- Authority
- AT
- Austria
- Prior art keywords
- surface treatment
- mixture
- gas mixture
- discharge
- central axis
- Prior art date
Links
- 238000004381 surface treatment Methods 0.000 title abstract 3
- 230000001771 impaired effect Effects 0.000 title 1
- 239000000203 mixture Substances 0.000 abstract 7
- 239000007789 gas Substances 0.000 abstract 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- 229910000077 silane Inorganic materials 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Chemical Vapour Deposition (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- External Artificial Organs (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0306084A FR2855322B1 (fr) | 2003-05-21 | 2003-05-21 | Dispositif de traitement de surface par zone d'un article |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE350760T1 true ATE350760T1 (de) | 2007-01-15 |
Family
ID=33396625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT04742679T ATE350760T1 (de) | 2003-05-21 | 2004-05-07 | Vorrichtung zur bereichsweisen oberflächenbehandlung eines gegenstands mittels dielektrisch behinderter gasentladung |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US7699022B2 (de) |
| EP (1) | EP1629517B1 (de) |
| JP (1) | JP4728241B2 (de) |
| AT (1) | ATE350760T1 (de) |
| CA (1) | CA2526257C (de) |
| DE (1) | DE602004004112T2 (de) |
| DK (1) | DK1629517T3 (de) |
| ES (1) | ES2280035T3 (de) |
| FR (1) | FR2855322B1 (de) |
| WO (1) | WO2004105079A1 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5911178B2 (ja) * | 2013-05-07 | 2016-04-27 | 株式会社イー・スクエア | プラズマ表面処理装置 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3760153A (en) * | 1972-02-16 | 1973-09-18 | Du Pont | Apparatus for perforating thermoplastic sheet materials with an electric arc |
| IT1103665B (it) | 1978-01-12 | 1985-10-14 | Gianfranco Galimberti | Dispositivo per attuare un trattamento superficiale uniforme su materie plastiche mediante scariche elettriche ad effetto corona |
| US4636640A (en) * | 1983-07-01 | 1987-01-13 | Pillar Corporation | Corona discharge electrode assembly |
| US4684803A (en) * | 1985-12-09 | 1987-08-04 | Pillar Technologies, Inc. | Electrode segments for corona discharge devices |
| FR2704558B1 (fr) | 1993-04-29 | 1995-06-23 | Air Liquide | Procede et dispositif pour creer un depot d'oxyde de silicium sur un substrat solide en defilement. |
| US6007784A (en) * | 1997-07-11 | 1999-12-28 | 3Dt, Inc. | Electric discharge surface treating electrode and system |
| FR2782837B1 (fr) | 1998-08-28 | 2000-09-29 | Air Liquide | Procede et dispositif de traitement de surface par plasma a pression atmospherique |
| AU6784600A (en) | 1999-08-17 | 2001-03-13 | Progress Software, Inc. | Concurrent commit lock |
| EP1125972A1 (de) | 2000-02-11 | 2001-08-22 | L'air Liquide Société Anonyme pour l'étude et l'exploitation des procédés Georges Claude | Verfahren zur Oberflächenbehandlung polymerer Substrate |
| FR2816726B1 (fr) | 2000-11-16 | 2006-06-23 | Air Liquide | Installation dans laquelle est realisee une operation necessitant un controle de l'atmosphere a l'interieur d'une enceinte |
| TW200308187A (en) * | 2002-04-10 | 2003-12-16 | Dow Corning Ireland Ltd | An atmospheric pressure plasma assembly |
-
2003
- 2003-05-21 FR FR0306084A patent/FR2855322B1/fr not_active Expired - Fee Related
-
2004
- 2004-05-07 EP EP04742679A patent/EP1629517B1/de not_active Expired - Lifetime
- 2004-05-07 ES ES04742679T patent/ES2280035T3/es not_active Expired - Lifetime
- 2004-05-07 CA CA2526257A patent/CA2526257C/fr not_active Expired - Lifetime
- 2004-05-07 JP JP2006530337A patent/JP4728241B2/ja not_active Expired - Fee Related
- 2004-05-07 DK DK04742679T patent/DK1629517T3/da active
- 2004-05-07 DE DE602004004112T patent/DE602004004112T2/de not_active Expired - Lifetime
- 2004-05-07 WO PCT/FR2004/001121 patent/WO2004105079A1/fr active Application Filing
- 2004-05-07 AT AT04742679T patent/ATE350760T1/de not_active IP Right Cessation
- 2004-05-07 US US10/556,949 patent/US7699022B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP1629517A1 (de) | 2006-03-01 |
| JP4728241B2 (ja) | 2011-07-20 |
| JP2007502524A (ja) | 2007-02-08 |
| CA2526257A1 (fr) | 2004-12-02 |
| US20070119374A1 (en) | 2007-05-31 |
| FR2855322B1 (fr) | 2005-07-01 |
| WO2004105079A8 (fr) | 2005-04-14 |
| CA2526257C (fr) | 2014-03-25 |
| DK1629517T3 (da) | 2007-05-07 |
| DE602004004112T2 (de) | 2007-07-12 |
| EP1629517B1 (de) | 2007-01-03 |
| ES2280035T3 (es) | 2007-09-01 |
| WO2004105079A1 (fr) | 2004-12-02 |
| US7699022B2 (en) | 2010-04-20 |
| FR2855322A1 (fr) | 2004-11-26 |
| DE602004004112D1 (de) | 2007-02-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |