DE60143508D1 - Einstufiger Mikroantrieb für mehrdimensionale Betätigung - Google Patents

Einstufiger Mikroantrieb für mehrdimensionale Betätigung

Info

Publication number
DE60143508D1
DE60143508D1 DE60143508T DE60143508T DE60143508D1 DE 60143508 D1 DE60143508 D1 DE 60143508D1 DE 60143508 T DE60143508 T DE 60143508T DE 60143508 T DE60143508 T DE 60143508T DE 60143508 D1 DE60143508 D1 DE 60143508D1
Authority
DE
Germany
Prior art keywords
drive
dimensional operation
stage micro
micro
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60143508T
Other languages
English (en)
Inventor
Hee-Moon Jeong
Jong Up Jeon
Jae-Joon Choi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Application granted granted Critical
Publication of DE60143508D1 publication Critical patent/DE60143508D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Micromachines (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Microscoopes, Condenser (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DE60143508T 2000-07-18 2001-06-22 Einstufiger Mikroantrieb für mehrdimensionale Betätigung Expired - Lifetime DE60143508D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2000-0040985A KR100474835B1 (ko) 2000-07-18 2000-07-18 다축 구동을 위한 싱글스테이지 마이크로구동기

Publications (1)

Publication Number Publication Date
DE60143508D1 true DE60143508D1 (de) 2011-01-05

Family

ID=19678435

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60143508T Expired - Lifetime DE60143508D1 (de) 2000-07-18 2001-06-22 Einstufiger Mikroantrieb für mehrdimensionale Betätigung

Country Status (5)

Country Link
US (1) US6445107B1 (de)
EP (1) EP1174994B1 (de)
JP (1) JP3840071B2 (de)
KR (1) KR100474835B1 (de)
DE (1) DE60143508D1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100493151B1 (ko) * 2000-07-19 2005-06-02 삼성전자주식회사 멀티폴디스 스프링을 이용한 다축 구동을 위한싱글스테이지 마이크로 구동기
KR100469062B1 (ko) * 2002-08-13 2005-02-02 한국전자통신연구원 광통신용 주사 미세거울 및 그 제조 방법
KR100486716B1 (ko) * 2002-10-18 2005-05-03 삼성전자주식회사 2-ｄ 액튜에이터 및 그 제조방법
KR100552687B1 (ko) 2003-08-22 2006-02-20 삼성전자주식회사 대면적 스테이지를 구비한 2축 액츄에이터
KR100552686B1 (ko) * 2003-08-22 2006-02-20 삼성전자주식회사 대면적 스테이지를 구비한 2축 액츄에이터
EP1591824B1 (de) * 2004-04-26 2012-05-09 Panasonic Corporation Microantrieb
US7187486B2 (en) 2004-04-27 2007-03-06 Intel Corporation Electromechanical drives adapted to provide two degrees of mobility
KR100694599B1 (ko) 2006-03-29 2007-03-14 삼성전자주식회사 메카닉 필터를 구비한 엑츄에이터
US20070291623A1 (en) * 2006-06-15 2007-12-20 Nanochip, Inc. Cantilever with control of vertical and lateral position of contact probe tip
US20070290282A1 (en) * 2006-06-15 2007-12-20 Nanochip, Inc. Bonded chip assembly with a micro-mover for microelectromechanical systems
KR100837405B1 (ko) * 2006-11-03 2008-06-12 삼성전자주식회사 멤스 콤 디바이스
US20090190254A1 (en) * 2008-01-29 2009-07-30 Seagate Technology Llc Micromachined mover
DE102008042964A1 (de) * 2008-10-20 2010-04-22 Robert Bosch Gmbh Elektrostatischer Antrieb, mikromechanisches Bauteil und Herstellungsverfahren für einen elektrostatischen Antrieb und ein mikromechanisches Bauteil
DE102008042967B4 (de) * 2008-10-20 2017-04-06 Robert Bosch Gmbh Kaskadierte mikromechanische Aktuatorstruktur
US9306475B1 (en) * 2014-08-01 2016-04-05 Faez Ba-Tis Piston-tube electrostatic microactuator
DE102017215276B4 (de) 2017-08-31 2023-02-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Multidirektionale Übersetzungs- und Neigungsplattform unter Verwendung von Biegeaktuatoren als aktive Entität

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5235187A (en) * 1991-05-14 1993-08-10 Cornell Research Foundation Methods of fabricating integrated, aligned tunneling tip pairs
US5179499A (en) * 1992-04-14 1993-01-12 Cornell Research Foundation, Inc. Multi-dimensional precision micro-actuator
JP3053971B2 (ja) * 1992-08-05 2000-06-19 キヤノン株式会社 トンネル電流発生用三次元変位素子、該トンネル電流発生用三次元変位素子を用いたマルチ探針ユニット、および情報処理装置
US5536988A (en) 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US5862003A (en) * 1995-06-23 1999-01-19 Saif; Muhammad T. A. Micromotion amplifier
US5801472A (en) * 1995-08-18 1998-09-01 Hitchi, Ltd. Micro-fabricated device with integrated electrostatic actuator
US5986381A (en) * 1997-03-14 1999-11-16 Hewlett-Packard Company Electrostatic actuator with spatially alternating voltage patterns
JP3050164B2 (ja) * 1997-05-23 2000-06-12 日本電気株式会社 マイクロアクチュエータおよびその製造方法
US6122961A (en) * 1997-09-02 2000-09-26 Analog Devices, Inc. Micromachined gyros
US5963367A (en) * 1997-09-23 1999-10-05 Lucent Technologies, Inc. Micromechanical xyz stage for use with optical elements
KR100254394B1 (ko) * 1997-10-22 2000-12-01 김덕중 초소형 마이크로 로봇 및 그 구동방법
KR100363785B1 (ko) * 1999-06-04 2002-12-11 삼성전기주식회사 마이크로 자이로스코프

Also Published As

Publication number Publication date
KR20020007603A (ko) 2002-01-29
US6445107B1 (en) 2002-09-03
JP3840071B2 (ja) 2006-11-01
EP1174994A1 (de) 2002-01-23
JP2002140844A (ja) 2002-05-17
KR100474835B1 (ko) 2005-03-08
US20020038984A1 (en) 2002-04-04
EP1174994B1 (de) 2010-11-24

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