DE60142930D1 - Doppelresonanzbalkenkraftwandler mit verringertem longitudinalem pumpen - Google Patents

Doppelresonanzbalkenkraftwandler mit verringertem longitudinalem pumpen

Info

Publication number
DE60142930D1
DE60142930D1 DE60142930T DE60142930T DE60142930D1 DE 60142930 D1 DE60142930 D1 DE 60142930D1 DE 60142930 T DE60142930 T DE 60142930T DE 60142930 T DE60142930 T DE 60142930T DE 60142930 D1 DE60142930 D1 DE 60142930D1
Authority
DE
Germany
Prior art keywords
tines
base region
ducting
converter
reduced longitudinal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60142930T
Other languages
English (en)
Inventor
Graeme Blake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Application granted granted Critical
Publication of DE60142930D1 publication Critical patent/DE60142930D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468Tuning fork resonators
    • H03H9/2473Double-Ended Tuning Fork [DETF] resonators
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/10Measuring force or stress, in general by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings
    • G01L1/106Constructional details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
DE60142930T 2001-01-17 2001-07-17 Doppelresonanzbalkenkraftwandler mit verringertem longitudinalem pumpen Expired - Lifetime DE60142930D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US26247001P 2001-01-17 2001-01-17
PCT/US2001/022581 WO2002057728A1 (en) 2001-01-17 2001-07-17 Double resonating beam force transducer with reduced longitudinal pumping

Publications (1)

Publication Number Publication Date
DE60142930D1 true DE60142930D1 (de) 2010-10-07

Family

ID=22997656

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60142930T Expired - Lifetime DE60142930D1 (de) 2001-01-17 2001-07-17 Doppelresonanzbalkenkraftwandler mit verringertem longitudinalem pumpen

Country Status (5)

Country Link
US (1) US6553834B2 (de)
EP (1) EP1352222B1 (de)
AT (1) ATE479084T1 (de)
DE (1) DE60142930D1 (de)
WO (1) WO2002057728A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2864226B1 (fr) 2003-12-19 2006-06-09 Commissariat Energie Atomique Structure vibrante micro-usinee et microgyrometre associe
FR2953025B1 (fr) * 2009-11-23 2012-06-08 Commissariat Energie Atomique Capteur de force resonant sensible a des micro-forces
US11119115B2 (en) 2018-08-27 2021-09-14 Honeywell International Inc. Vibrating beam accelerometer

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856425B2 (ja) 1978-10-11 1983-12-14 横河電機株式会社 力変換機構
US4321500A (en) 1979-12-17 1982-03-23 Paroscientific, Inc. Longitudinal isolation system for flexurally vibrating force transducers
US4658174A (en) 1986-03-20 1987-04-14 The Singer Company-Kearfott Division Vibrating beam force transducer with angled isolator springs
ATE72897T1 (de) * 1986-07-01 1992-03-15 Sensor Int Vibrationskraftsensor.
JPH02262874A (ja) * 1988-11-30 1990-10-25 Rion Co Ltd 超音波モータ
IL113556A (en) * 1994-05-11 1998-04-05 Allied Signal Inc A double-ended collar

Also Published As

Publication number Publication date
EP1352222B1 (de) 2010-08-25
US20020125791A1 (en) 2002-09-12
WO2002057728A1 (en) 2002-07-25
EP1352222A1 (de) 2003-10-15
US6553834B2 (en) 2003-04-29
ATE479084T1 (de) 2010-09-15

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