DE60142930D1 - Doppelresonanzbalkenkraftwandler mit verringertem longitudinalem pumpen - Google Patents
Doppelresonanzbalkenkraftwandler mit verringertem longitudinalem pumpenInfo
- Publication number
- DE60142930D1 DE60142930D1 DE60142930T DE60142930T DE60142930D1 DE 60142930 D1 DE60142930 D1 DE 60142930D1 DE 60142930 T DE60142930 T DE 60142930T DE 60142930 T DE60142930 T DE 60142930T DE 60142930 D1 DE60142930 D1 DE 60142930D1
- Authority
- DE
- Germany
- Prior art keywords
- tines
- base region
- ducting
- converter
- reduced longitudinal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000008878 coupling Effects 0.000 abstract 3
- 238000010168 coupling process Methods 0.000 abstract 3
- 238000005859 coupling reaction Methods 0.000 abstract 3
- 238000000034 method Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H9/2468—Tuning fork resonators
- H03H9/2473—Double-Ended Tuning Fork [DETF] resonators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/10—Measuring force or stress, in general by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings
- G01L1/106—Constructional details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US26247001P | 2001-01-17 | 2001-01-17 | |
PCT/US2001/022581 WO2002057728A1 (en) | 2001-01-17 | 2001-07-17 | Double resonating beam force transducer with reduced longitudinal pumping |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60142930D1 true DE60142930D1 (de) | 2010-10-07 |
Family
ID=22997656
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60142930T Expired - Lifetime DE60142930D1 (de) | 2001-01-17 | 2001-07-17 | Doppelresonanzbalkenkraftwandler mit verringertem longitudinalem pumpen |
Country Status (5)
Country | Link |
---|---|
US (1) | US6553834B2 (de) |
EP (1) | EP1352222B1 (de) |
AT (1) | ATE479084T1 (de) |
DE (1) | DE60142930D1 (de) |
WO (1) | WO2002057728A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2864226B1 (fr) | 2003-12-19 | 2006-06-09 | Commissariat Energie Atomique | Structure vibrante micro-usinee et microgyrometre associe |
FR2953025B1 (fr) * | 2009-11-23 | 2012-06-08 | Commissariat Energie Atomique | Capteur de force resonant sensible a des micro-forces |
US11119115B2 (en) | 2018-08-27 | 2021-09-14 | Honeywell International Inc. | Vibrating beam accelerometer |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5856425B2 (ja) | 1978-10-11 | 1983-12-14 | 横河電機株式会社 | 力変換機構 |
US4321500A (en) | 1979-12-17 | 1982-03-23 | Paroscientific, Inc. | Longitudinal isolation system for flexurally vibrating force transducers |
US4658174A (en) | 1986-03-20 | 1987-04-14 | The Singer Company-Kearfott Division | Vibrating beam force transducer with angled isolator springs |
ATE72897T1 (de) * | 1986-07-01 | 1992-03-15 | Sensor Int | Vibrationskraftsensor. |
JPH02262874A (ja) * | 1988-11-30 | 1990-10-25 | Rion Co Ltd | 超音波モータ |
IL113556A (en) * | 1994-05-11 | 1998-04-05 | Allied Signal Inc | A double-ended collar |
-
2001
- 2001-07-17 EP EP01273372A patent/EP1352222B1/de not_active Expired - Lifetime
- 2001-07-17 AT AT01273372T patent/ATE479084T1/de not_active IP Right Cessation
- 2001-07-17 DE DE60142930T patent/DE60142930D1/de not_active Expired - Lifetime
- 2001-07-17 WO PCT/US2001/022581 patent/WO2002057728A1/en active Application Filing
- 2001-07-17 US US09/907,729 patent/US6553834B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1352222B1 (de) | 2010-08-25 |
US20020125791A1 (en) | 2002-09-12 |
WO2002057728A1 (en) | 2002-07-25 |
EP1352222A1 (de) | 2003-10-15 |
US6553834B2 (en) | 2003-04-29 |
ATE479084T1 (de) | 2010-09-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EA200000830A1 (ru) | Акустическое устройство, содержащее панельный элемент, основанное на действии изгибных волн | |
EP1478090A3 (de) | Piezoelektrisches Stimmgabel-Resonatorbauelement | |
EA200100102A1 (ru) | Громкоговоритель с панелеобразным резонатором | |
DE60220541D1 (de) | Externer resonator mit retro-reflektierender vorrichtung insbesondere für abstimmbare laser | |
DE60214463D1 (de) | Elektromechanischer Schwingbalkenresonator | |
EP1229515A3 (de) | Verfahren und Wellenleiter zur Richtungsänderung von longitudinalen Schwingungen | |
DE50014572D1 (de) | Piezoelektrischer antrieb | |
ATE460753T1 (de) | Gewölbtes gehäuse für eine implantierbare medizinische vorrichtung | |
DE60036264D1 (de) | Piezoelektrischer Resonator | |
RU2006118927A (ru) | Ультразвуковое устройство для обработки волос | |
ATE423333T1 (de) | Federscharnier | |
DE59811745D1 (de) | Mechanischer Resonator mit variabler Resonanzfrequenz | |
DE60215803D1 (de) | Ultraschall-bearbeitungsinstrument | |
DE50211054D1 (de) | Frequenzabstimmbarer resonator | |
DE50212769D1 (de) | Kältegerät | |
ATE306020T1 (de) | Resonanzpumpe | |
DE60201382D1 (de) | Resonator für Ultraschallschweissen | |
KR930020617A (ko) | 와이어 본딩장치 | |
DE60142930D1 (de) | Doppelresonanzbalkenkraftwandler mit verringertem longitudinalem pumpen | |
NL1010853A1 (nl) | Piezo-elektrische resonator. | |
ITMI20000832A0 (it) | Dispositivo di test e calibrazione della frequenza di oscillazione diun oscillatore integrato. | |
DE60139434D1 (de) | Laserresonator | |
DE60006623D1 (de) | Aktiver abgestimmter Helmholtz Resonator mit gezwungener Response | |
TW200644365A (en) | External resonance type semiconductor laser | |
DE69701595D1 (de) | Piezoelektrischer Vibrationskreisel welcher einen Energie-Einfangsvibrationsmodus verwendet |