DE60041951D1 - Verwendung einer Kathode zur Vakuumbogenverdampfung - Google Patents

Verwendung einer Kathode zur Vakuumbogenverdampfung

Info

Publication number
DE60041951D1
DE60041951D1 DE60041951T DE60041951T DE60041951D1 DE 60041951 D1 DE60041951 D1 DE 60041951D1 DE 60041951 T DE60041951 T DE 60041951T DE 60041951 T DE60041951 T DE 60041951T DE 60041951 D1 DE60041951 D1 DE 60041951D1
Authority
DE
Germany
Prior art keywords
cathode
vacuum arc
arc evaporation
evaporation
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60041951T
Other languages
English (en)
Inventor
Russell A Beers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Technologies Corp
Original Assignee
United Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Technologies Corp filed Critical United Technologies Corp
Application granted granted Critical
Publication of DE60041951D1 publication Critical patent/DE60041951D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D11/00—Continuous casting of metals, i.e. casting in indefinite lengths
    • B22D11/10—Supplying or treating molten metal
    • B22D11/11—Treating the molten metal
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
    • C22B9/16—Remelting metals
    • C22B9/22—Remelting metals with heating by wave energy or particle radiation
    • C22B9/228—Remelting metals with heating by wave energy or particle radiation by particle radiation, e.g. electron beams
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Toxicology (AREA)
  • Manufacturing & Machinery (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Continuous Casting (AREA)
DE60041951T 1999-12-20 2000-12-05 Verwendung einer Kathode zur Vakuumbogenverdampfung Expired - Lifetime DE60041951D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US46756799A 1999-12-20 1999-12-20

Publications (1)

Publication Number Publication Date
DE60041951D1 true DE60041951D1 (de) 2009-05-20

Family

ID=23856236

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60041951T Expired - Lifetime DE60041951D1 (de) 1999-12-20 2000-12-05 Verwendung einer Kathode zur Vakuumbogenverdampfung

Country Status (4)

Country Link
EP (1) EP1111086B1 (de)
JP (1) JP2001232447A (de)
DE (1) DE60041951D1 (de)
MX (1) MXPA00012781A (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3759933B2 (ja) * 2003-03-13 2006-03-29 東邦チタニウム株式会社 高融点金属の電子ビーム溶解方法
EP1793008A1 (de) * 2005-12-02 2007-06-06 Siemens Aktiengesellschaft Legierung, Schutzschicht zum Schutz eines Bauteils gegen Korrosion und Oxidation bei hohen Temperaturen und Bauteil
EP1806418A1 (de) * 2006-01-10 2007-07-11 Siemens Aktiengesellschaft Legierung, Schutzschicht zum Schutz eines Bauteils gegen Korrosion und Oxidation bei hohen Temperaturen und Bauteil
US7931759B2 (en) * 2007-01-09 2011-04-26 General Electric Company Metal alloy compositions and articles comprising the same
US8088260B2 (en) 2007-08-14 2012-01-03 United Technologies Corporation Puck for cathodic arc coating with continuous groove to control arc
DE102007048484A1 (de) * 2007-10-09 2009-04-16 Man Turbo Ag Heißgasgeführte Komponente einer Strömungsmaschine
US8545185B2 (en) * 2007-12-19 2013-10-01 General Electric Company Turbine engine components with environmental protection for interior passages
US20090191422A1 (en) * 2008-01-30 2009-07-30 United Technologies Corporation Cathodic ARC deposition coatings for turbine engine components
CN102037204B (zh) 2008-05-21 2014-08-20 奥蒂斯电梯公司 门区保护
EP2216421A1 (de) * 2009-01-29 2010-08-11 Siemens Aktiengesellschaft Legierung, Schutzschicht und Bauteil
EP2392684A1 (de) * 2010-06-02 2011-12-07 Siemens Aktiengesellschaft Legierung, Schutzchicht und Bauteil
US20130164558A1 (en) * 2011-12-27 2013-06-27 United Technologies Corporation Oxidation Resistant Coating with Substrate Compatibility
CN104550960B (zh) * 2014-12-23 2017-03-08 中国航空工业集团公司北京航空制造工程研究所 应用冷床熔炼的金属增材制造方法及金属零件和应用

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4109061A (en) * 1977-12-08 1978-08-22 United Technologies Corporation Method for altering the composition and structure of aluminum bearing overlay alloy coatings during deposition from metallic vapor
GB2106545B (en) * 1981-02-23 1985-06-26 Rimma Ivanovna Stupak Consumable cathode for electric-arc evaporator of metal
US4419416A (en) * 1981-08-05 1983-12-06 United Technologies Corporation Overlay coatings for superalloys
US4690875A (en) * 1984-01-12 1987-09-01 Degussa Electronics Inc., Materials Division High vacuum cast ingots
US4558729A (en) * 1984-01-12 1985-12-17 Demetron, Inc. Method for high vacuum casting
US4681787A (en) * 1984-09-28 1987-07-21 Degussa Electronics Inc. Ingot produced by a continuous casting method
US4641704A (en) * 1985-01-25 1987-02-10 Degussa Electronics Inc. Continuous casting method and ingot produced thereby
JPS6260863A (ja) * 1985-09-09 1987-03-17 Mitsubishi Heavy Ind Ltd スパツタリング用タ−ゲツト
DD293145A5 (de) * 1989-03-23 1991-08-22 Tu Chemnitz,De Verfahren zur herstellung von mehrkomponentenschichten
JPH02311394A (ja) * 1989-05-25 1990-12-26 Daido Steel Co Ltd Ｗターゲット材
AU1474692A (en) * 1991-06-05 1992-12-10 General Electric Company Method and apparatus for casting an electron beam melted metallic material in ingot form
JP3250241B2 (ja) * 1991-11-06 2002-01-28 大同特殊鋼株式会社 ターゲット材とその製造方法
US6009829A (en) * 1997-08-30 2000-01-04 United Technologies Corporation Apparatus for driving the arc in a cathodic arc coater
US6036828A (en) * 1997-08-30 2000-03-14 United Technologies Corporation Apparatus for steering the arc in a cathodic arc coater
US5932078A (en) * 1997-08-30 1999-08-03 United Technologies Corporation Cathodic arc vapor deposition apparatus

Also Published As

Publication number Publication date
EP1111086B1 (de) 2009-04-08
MXPA00012781A (es) 2003-04-25
JP2001232447A (ja) 2001-08-28
EP1111086A1 (de) 2001-06-27

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