DE60038139D1 - ozone cleaning - Google Patents

ozone cleaning

Info

Publication number
DE60038139D1
DE60038139D1 DE60038139T DE60038139T DE60038139D1 DE 60038139 D1 DE60038139 D1 DE 60038139D1 DE 60038139 T DE60038139 T DE 60038139T DE 60038139 T DE60038139 T DE 60038139T DE 60038139 D1 DE60038139 D1 DE 60038139D1
Authority
DE
Germany
Prior art keywords
ozone cleaning
ozone
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60038139T
Other languages
German (de)
Inventor
Wenchang Ji
Robert James Ferrell
Piotr J Sadkowski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Linde LLC
Original Assignee
BOC Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/263,614 external-priority patent/US6197091B1/en
Application filed by BOC Group Inc filed Critical BOC Group Inc
Application granted granted Critical
Publication of DE60038139D1 publication Critical patent/DE60038139D1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D53/228—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion characterised by specific membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D53/229—Integrated processes (Diffusion and at least one other process, e.g. adsorption, absorption)
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10—Preparation of ozone
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/72—Treatment of water, waste water, or sewage by oxidation
    • C02F1/78—Treatment of water, waste water, or sewage by oxidation with ozone
DE60038139T 1999-03-05 2000-02-28 ozone cleaning Expired - Fee Related DE60038139D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/263,614 US6197091B1 (en) 1999-03-05 1999-03-05 Ozone purification process

Publications (1)

Publication Number Publication Date
DE60038139D1 true DE60038139D1 (en) 2008-04-10

Family

ID=23002511

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60038139T Expired - Fee Related DE60038139D1 (en) 1999-03-05 2000-02-28 ozone cleaning

Country Status (3)

Country Link
AT (1) ATE387408T1 (en)
AU (1) AU757075C (en)
DE (1) DE60038139D1 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5352272A (en) * 1991-01-30 1994-10-04 The Dow Chemical Company Gas separations utilizing glassy polymer membranes at sub-ambient temperatures
US5756054A (en) * 1995-06-07 1998-05-26 Primex Technologies Inc. Ozone generator with enhanced output
US5700375A (en) * 1996-04-29 1997-12-23 Minnesota Mining And Manufacturing Company Particle loaded membranes as oxidant scavengers

Also Published As

Publication number Publication date
AU757075B2 (en) 2003-01-30
AU2065900A (en) 2000-09-07
ATE387408T1 (en) 2008-03-15
AU757075C (en) 2004-01-29

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee