DE60037127D1 - Magnetische messeinrichtung in mikromechanisch hergestellten vorrichtungen - Google Patents

Magnetische messeinrichtung in mikromechanisch hergestellten vorrichtungen

Info

Publication number
DE60037127D1
DE60037127D1 DE60037127T DE60037127T DE60037127D1 DE 60037127 D1 DE60037127 D1 DE 60037127D1 DE 60037127 T DE60037127 T DE 60037127T DE 60037127 T DE60037127 T DE 60037127T DE 60037127 D1 DE60037127 D1 DE 60037127D1
Authority
DE
Germany
Prior art keywords
micromechanic
measuring device
magnetic measuring
manufactured devices
manufactured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60037127T
Other languages
English (en)
Other versions
DE60037127T2 (de
Inventor
Peter Bloechl
Christophe P Rossel
Michel Willemin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HGST Netherlands BV
Original Assignee
Hitachi Global Storage Technologies Netherlands BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Global Storage Technologies Netherlands BV filed Critical Hitachi Global Storage Technologies Netherlands BV
Priority claimed from PCT/IB2000/001256 external-priority patent/WO2001020616A1/en
Application granted granted Critical
Publication of DE60037127D1 publication Critical patent/DE60037127D1/de
Publication of DE60037127T2 publication Critical patent/DE60037127T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

DE60037127T 1999-09-10 2000-09-06 Magnetische messeinrichtung in mikromechanisch hergestellten vorrichtungen Expired - Fee Related DE60037127T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP99810814 1999-09-10
EP99810814 1999-09-10
PCT/IB2000/001256 WO2001020616A1 (en) 1999-09-10 2000-09-06 Magnetic sensing of motion in microfabricated devices

Publications (2)

Publication Number Publication Date
DE60037127D1 true DE60037127D1 (de) 2007-12-27
DE60037127T2 DE60037127T2 (de) 2008-10-02

Family

ID=38721437

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60037127T Expired - Fee Related DE60037127T2 (de) 1999-09-10 2000-09-06 Magnetische messeinrichtung in mikromechanisch hergestellten vorrichtungen

Country Status (2)

Country Link
DE (1) DE60037127T2 (de)
MY (1) MY125320A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009048272B3 (de) * 2009-10-05 2011-04-21 Sick Ag Verfahren zum Positionieren eines magnetischen Sensors

Also Published As

Publication number Publication date
DE60037127T2 (de) 2008-10-02
MY125320A (en) 2006-07-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee