DE60034465D1 - Ein normalerweise geschlossenes einbaumikrorückschlagventil - Google Patents

Ein normalerweise geschlossenes einbaumikrorückschlagventil

Info

Publication number
DE60034465D1
DE60034465D1 DE60034465T DE60034465T DE60034465D1 DE 60034465 D1 DE60034465 D1 DE 60034465D1 DE 60034465 T DE60034465 T DE 60034465T DE 60034465 T DE60034465 T DE 60034465T DE 60034465 D1 DE60034465 D1 DE 60034465D1
Authority
DE
Germany
Prior art keywords
check valve
mum
channel
valve
normally closed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60034465T
Other languages
English (en)
Other versions
DE60034465T2 (de
Inventor
Yu-Chong Tai
Xuan-Qi Wang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
California Institute of Technology CalTech
Original Assignee
California Institute of Technology CalTech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by California Institute of Technology CalTech filed Critical California Institute of Technology CalTech
Publication of DE60034465D1 publication Critical patent/DE60034465D1/de
Application granted granted Critical
Publication of DE60034465T2 publication Critical patent/DE60034465T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K15/00—Check valves
    • F16K15/14—Check valves with flexible valve members
    • F16K15/148—Check valves with flexible valve members the closure elements being fixed in their centre
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F16K99/0007—Lift valves of cantilever type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0057—Operating means specially adapted for microvalves actuated by fluids the fluid being the circulating fluid itself, e.g. check valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0094—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S137/00—Fluid handling
    • Y10S137/907—Vacuum-actuated valves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0402—Cleaning, repairing, or assembling
    • Y10T137/0491—Valve or valve element assembling, disassembling, or replacing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7837—Direct response valves [i.e., check valve type]
    • Y10T137/7879—Resilient material valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7837—Direct response valves [i.e., check valve type]
    • Y10T137/7879—Resilient material valve
    • Y10T137/7888—With valve member flexing about securement
    • Y10T137/789—Central mount

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Check Valves (AREA)
  • Micromachines (AREA)
  • Burglar Alarm Systems (AREA)
  • Float Valves (AREA)
  • Pens And Brushes (AREA)
DE60034465T 1999-09-24 2000-09-25 Ein normalerweise geschlossenes einbaumikrorückschlagventil Expired - Fee Related DE60034465T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15607799P 1999-09-24 1999-09-24
US156077P 1999-09-24
PCT/US2000/026391 WO2001021988A1 (en) 1999-09-24 2000-09-25 A normally closed in-channel micro check valve

Publications (2)

Publication Number Publication Date
DE60034465D1 true DE60034465D1 (de) 2007-05-31
DE60034465T2 DE60034465T2 (de) 2008-01-03

Family

ID=22558008

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60034465T Expired - Fee Related DE60034465T2 (de) 1999-09-24 2000-09-25 Ein normalerweise geschlossenes einbaumikrorückschlagventil

Country Status (7)

Country Link
US (1) US6470904B1 (de)
EP (1) EP1216373B1 (de)
AT (1) ATE360167T1 (de)
AU (1) AU7716800A (de)
CA (1) CA2391842C (de)
DE (1) DE60034465T2 (de)
WO (1) WO2001021988A1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6829753B2 (en) * 2000-06-27 2004-12-07 Fluidigm Corporation Microfluidic design automation method and system
US6834677B2 (en) * 2002-04-30 2004-12-28 Hewlett-Packard Development Company, L.P. Over-molded check valves for fluid delivery systems
US7514048B2 (en) * 2002-08-22 2009-04-07 Industrial Technology Research Institute Controlled odor generator
US6749407B2 (en) * 2002-08-22 2004-06-15 Motorola, Inc. Method of installing valves in a micro-pump
US7302971B2 (en) * 2004-12-22 2007-12-04 Vernay Laboratories, Inc. Umbrella valve and assembly
KR20080063268A (ko) * 2005-07-27 2008-07-03 더 보오드 오브 트러스티스 오브 더 유니버시티 오브 일리노이즈 정전기적으로 작동되는 양방향 고속 동작의 마이크로밸브
US8628055B2 (en) 2005-07-27 2014-01-14 The Board Of Trustees Of The University Of Illinois Bi-direction rapid action electrostatically actuated microvalve
US8123834B2 (en) 2005-10-06 2012-02-28 The Board Of Trustees Of The University Of Illinois High gain selective metal organic framework preconcentrators
WO2007117672A2 (en) 2006-04-07 2007-10-18 Qd Vision, Inc. Methods of depositing nanomaterial & methods of making a device
WO2008111947A1 (en) 2006-06-24 2008-09-18 Qd Vision, Inc. Methods and articles including nanomaterial
EP2884141A1 (de) 2006-08-10 2015-06-17 California Institute of Technology Mikrofluidisches Ventil mit freischwebendem Teil und Herstellungsverfahren
WO2008043046A2 (en) * 2006-10-04 2008-04-10 Fluidigm Corporation Microfluidic check valves
US7708031B2 (en) 2006-11-13 2010-05-04 International Business Machines Corporation Check valve
US8123841B2 (en) 2008-01-16 2012-02-28 The Board Of Trustees Of The University Of Illinois Column design for micro gas chromatograph
US8269029B2 (en) 2008-04-08 2012-09-18 The Board Of Trustees Of The University Of Illinois Water repellent metal-organic frameworks, process for making and uses regarding same
DE102009005874A1 (de) * 2009-01-21 2010-07-22 Thinxxs Microtechnology Ag Ventil, insbesondere für ein Bauelement der Mikrofluidtechnik
US9222819B2 (en) 2009-02-20 2015-12-29 University Of Southern California Tracking and controlling fluid delivery from chamber
WO2010099210A2 (en) * 2009-02-24 2010-09-02 University Of Southern California Flexible polymer-based encapsulated-fluid devices
ES2582462T3 (es) 2010-09-15 2016-09-13 Minipumps, Llc Válvula de retención de elastómero moldeada y encapsulada
KR101219443B1 (ko) 2010-12-02 2013-01-11 광주과학기술원 마이크로 체크 밸브 및 그 제조방법
CN104169583B (zh) * 2012-12-21 2017-03-01 弗劳恩霍夫应用研究促进协会 包括安全阀布置的泵布置结构
US9845895B2 (en) 2013-01-11 2017-12-19 Minipumps, Llc Diaphragm check valves and methods of manufacture thereof

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4143853A (en) * 1977-07-14 1979-03-13 Metatech Corporation Valve for use with a catheter or the like
US4479762A (en) * 1982-12-28 1984-10-30 Baxter Travenol Laboratories, Inc. Prepackaged fluid processing module having pump and valve elements operable in response to applied pressures
US4585209A (en) * 1983-10-27 1986-04-29 Harry E. Aine Miniature valve and method of making same
US4826131A (en) * 1988-08-22 1989-05-02 Ford Motor Company Electrically controllable valve etched from silicon substrates
US5244537A (en) * 1989-12-27 1993-09-14 Honeywell, Inc. Fabrication of an electronic microvalve apparatus
US5171132A (en) * 1989-12-27 1992-12-15 Seiko Epson Corporation Two-valve thin plate micropump
US5259737A (en) * 1990-07-02 1993-11-09 Seiko Epson Corporation Micropump with valve structure
JP3039583B2 (ja) 1991-05-30 2000-05-08 株式会社日立製作所 バルブ及びそれを用いた半導体製造装置
US5441597A (en) * 1992-12-01 1995-08-15 Honeywell Inc. Microstructure gas valve control forming method
US5309943A (en) * 1992-12-07 1994-05-10 Ford Motor Company Micro-valve and method of manufacturing
US5261459A (en) * 1992-12-07 1993-11-16 Vernay Laboratories, Inc. Miniature duckbill valve having a low cracking pressure and high flow rate
US5453097A (en) * 1994-08-15 1995-09-26 Paradis; Joseph R. Control of fluid flow
US5660205A (en) * 1994-12-15 1997-08-26 Epstein; Alan B. One-way valve
US5967163A (en) * 1996-01-30 1999-10-19 Abbott Laboratories Actuator and method
US5725017A (en) * 1997-01-27 1998-03-10 Medtronic, Inc. In-line pressure check valve for drug-delivery systems
US6116863A (en) 1997-05-30 2000-09-12 University Of Cincinnati Electromagnetically driven microactuated device and method of making the same

Also Published As

Publication number Publication date
CA2391842A1 (en) 2001-03-29
US6470904B1 (en) 2002-10-29
EP1216373A4 (de) 2002-10-09
ATE360167T1 (de) 2007-05-15
WO2001021988A1 (en) 2001-03-29
EP1216373A1 (de) 2002-06-26
CA2391842C (en) 2005-08-16
WO2001021988A9 (en) 2002-01-24
EP1216373B1 (de) 2007-04-18
DE60034465T2 (de) 2008-01-03
AU7716800A (en) 2001-04-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee