DE60032772D1 - Integrierter chemischer Mikroreaktor mit thermisch isolierten Messelektroden und Verfahren zu dessen Herstellung - Google Patents

Integrierter chemischer Mikroreaktor mit thermisch isolierten Messelektroden und Verfahren zu dessen Herstellung

Info

Publication number
DE60032772D1
DE60032772D1 DE60032772T DE60032772T DE60032772D1 DE 60032772 D1 DE60032772 D1 DE 60032772D1 DE 60032772 T DE60032772 T DE 60032772T DE 60032772 T DE60032772 T DE 60032772T DE 60032772 D1 DE60032772 D1 DE 60032772D1
Authority
DE
Germany
Prior art keywords
production
thermally insulated
measuring electrodes
integrated chemical
chemical microreactor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60032772T
Other languages
English (en)
Other versions
DE60032772T2 (de
Inventor
Gabriele Barlocchi
Flavio Villa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SRL
Original Assignee
STMicroelectronics SRL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SRL filed Critical STMicroelectronics SRL
Publication of DE60032772D1 publication Critical patent/DE60032772D1/de
Application granted granted Critical
Publication of DE60032772T2 publication Critical patent/DE60032772T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L7/00—Heating or cooling apparatus; Heat insulating devices
    • B01L7/52—Heating or cooling apparatus; Heat insulating devices with provision for submitting samples to a predetermined sequence of different temperatures, e.g. for treating nucleic acid samples
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12—Specific details about manufacturing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/06—Auxiliary integrated devices, integrated components
    • B01L2300/0627—Sensor or part of a sensor is integrated
    • B01L2300/0645—Electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0809—Geometry, shape and general structure rectangular shaped
    • B01L2300/0825—Test strips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/18—Means for temperature control
    • B01L2300/1805—Conductive heating, heat from thermostatted solids is conducted to receptacles, e.g. heating plates, blocks
    • B01L2300/1827—Conductive heating, heat from thermostatted solids is conducted to receptacles, e.g. heating plates, blocks using resistive heater
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/18—Means for temperature control
    • B01L2300/1883—Means for temperature control using thermal insulation
DE60032772T 2000-09-27 2000-09-27 Integrierter chemischer Mikroreaktor mit thermisch isolierten Messelektroden und Verfahren zu dessen Herstellung Expired - Lifetime DE60032772T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP00830640A EP1193214B1 (de) 2000-09-27 2000-09-27 Integrierter chemischer Mikroreaktor mit thermisch isolierten Messelektroden und Verfahren zu dessen Herstellung

Publications (2)

Publication Number Publication Date
DE60032772D1 true DE60032772D1 (de) 2007-02-15
DE60032772T2 DE60032772T2 (de) 2007-11-08

Family

ID=8175493

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60032772T Expired - Lifetime DE60032772T2 (de) 2000-09-27 2000-09-27 Integrierter chemischer Mikroreaktor mit thermisch isolierten Messelektroden und Verfahren zu dessen Herstellung

Country Status (3)

Country Link
US (3) US6770471B2 (de)
EP (1) EP1193214B1 (de)
DE (1) DE60032772T2 (de)

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US7230315B2 (en) * 2000-02-29 2007-06-12 Stmicroelectronics S.R.L. Integrated chemical microreactor with large area channels and manufacturing process thereof
EP1535878A1 (de) * 2003-11-28 2005-06-01 STMicroelectronics S.r.l. Integrierter chemischer Mikroreaktor mit grossen Kanälen und Verfahren zu dessen Herstellung
US7452713B2 (en) * 2000-02-29 2008-11-18 Stmicroelectronics S.R.L. Process for manufacturing a microfluidic device with buried channels
US7732192B2 (en) * 2000-02-29 2010-06-08 Stmicroelectronics S.R.L. Integrated chemical microreactor with large area channels and manufacturing process thereof
EP1161985B1 (de) * 2000-06-05 2005-10-26 STMicroelectronics S.r.l. Verfahren zur Herstellung integrierter chemischer Mikroreaktoren aus Halbleitermaterial sowie integrierter Mikroreaktor
DE60032772T2 (de) * 2000-09-27 2007-11-08 Stmicroelectronics S.R.L., Agrate Brianza Integrierter chemischer Mikroreaktor mit thermisch isolierten Messelektroden und Verfahren zu dessen Herstellung
US6727479B2 (en) 2001-04-23 2004-04-27 Stmicroelectronics S.R.L. Integrated device based upon semiconductor technology, in particular chemical microreactor
US20030116552A1 (en) * 2001-12-20 2003-06-26 Stmicroelectronics Inc. Heating element for microfluidic and micromechanical applications
ITTO20020808A1 (it) * 2002-09-17 2004-03-18 St Microelectronics Srl Dispositivo integrato di analisi del dna.
ITTO20020809A1 (it) * 2002-09-17 2004-03-18 St Microelectronics Srl Micropompa, in particolare per un dispositivo integrato di analisi del dna.
DE102004006197B4 (de) * 2003-07-04 2013-10-17 Robert Bosch Gmbh Verfahren zur Herstellung eines mikromechanischen Drucksensors
EP1535665A1 (de) 2003-11-28 2005-06-01 STMicroelectronics S.r.l. Integrierter chemischer Mikroreaktor mit separaten Kanälen zum Einschliessen von Flüssigkeiten und Verfahren zu dessen Herstellung
EP1541991A1 (de) * 2003-12-12 2005-06-15 STMicroelectronics S.r.l. Integrierter chemischer Reaktor aus Halbleitermaterial zur Echtzeit-Überwachung von biologischen Reaktionen
US20050161327A1 (en) * 2003-12-23 2005-07-28 Michele Palmieri Microfluidic device and method for transporting electrically charged substances through a microchannel of a microfluidic device
EP1547688A1 (de) * 2003-12-23 2005-06-29 STMicroelectronics S.r.l. Vorrichtung und Verfahren zur lokalen Konzentrierung von geladenen Substanzen in einer mikrofluidischen Vorrichtung
US20050142565A1 (en) * 2003-12-30 2005-06-30 Agency For Science, Technology And Research Nucleic acid purification chip
CA2554539C (en) * 2004-01-28 2012-10-23 Ube Industries, Ltd. Method for producing aldehyde compound or ketone compound by using microreactor
EP1618955B1 (de) * 2004-07-19 2010-12-22 STMicroelectronics Srl Vorrichtung zur Detektion von biologischen Molekülen mit erhöhter Detektionsgeschwindigkeit und Verfahren zur schnellen Detektion von Biomolekülen
CN101223101A (zh) * 2005-05-12 2008-07-16 意法半导体股份有限公司 具有集成的微型泵尤其是生化微反应器的微流体装置及其制造方法
WO2006138211A2 (en) * 2005-06-17 2006-12-28 University Of Delaware Catalytic microcombustors for compact power or heat generation
DE602006018206D1 (de) * 2006-06-23 2010-12-23 St Microelectronics Srl Anordnung einer mikrofluidvorrichtung zur analyse von biologischem material
FR2906237B1 (fr) * 2006-09-22 2008-12-19 Commissariat Energie Atomique Composants fluidiques double-face
GB0623910D0 (en) * 2006-11-30 2007-01-10 Enigma Diagnostics Ltd Thermal cycler
US20110081367A1 (en) 2008-06-14 2011-04-07 Veredus Laboratories Pte Ltd Influenza sequences
US7915645B2 (en) * 2009-05-28 2011-03-29 International Rectifier Corporation Monolithic vertically integrated composite group III-V and group IV semiconductor device and method for fabricating same
US8727504B2 (en) 2011-11-11 2014-05-20 Stmicroelectronics, Inc. Microfluidic jetting device with piezoelectric actuator and method for making the same
US8956325B2 (en) 2011-12-07 2015-02-17 Stmicroelectronics, Inc. Piezoelectric microfluidic pumping device and method for using the same
ITTO20130502A1 (it) * 2013-06-18 2014-12-19 St Microelectronics Asia Dispositivo elettronico con sensore di temperatura integrato e relativo metodo di fabbricazione
US9435641B2 (en) * 2013-06-20 2016-09-06 Analog Devices, Inc. Optical angle measurement
US9274202B2 (en) 2013-06-20 2016-03-01 Analog Devices, Inc. Optical time-of-flight system

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EP1130631A1 (de) 2000-02-29 2001-09-05 STMicroelectronics S.r.l. Herstellungsverfahren eines vergrabenen Hohlraumes in einer Halbleiterscheibe
EP1161985B1 (de) * 2000-06-05 2005-10-26 STMicroelectronics S.r.l. Verfahren zur Herstellung integrierter chemischer Mikroreaktoren aus Halbleitermaterial sowie integrierter Mikroreaktor
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DE60032772T2 (de) 2000-09-27 2007-11-08 Stmicroelectronics S.R.L., Agrate Brianza Integrierter chemischer Mikroreaktor mit thermisch isolierten Messelektroden und Verfahren zu dessen Herstellung
US6727479B2 (en) 2001-04-23 2004-04-27 Stmicroelectronics S.R.L. Integrated device based upon semiconductor technology, in particular chemical microreactor

Also Published As

Publication number Publication date
US20020045244A1 (en) 2002-04-18
US20040226908A1 (en) 2004-11-18
US6770471B2 (en) 2004-08-03
US20040235149A1 (en) 2004-11-25
US6929968B2 (en) 2005-08-16
DE60032772T2 (de) 2007-11-08
EP1193214B1 (de) 2007-01-03
EP1193214A1 (de) 2002-04-03
US6974693B2 (en) 2005-12-13

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