DE60009171D1 - Ein positionsdetektor für eine abtastvorrichtung - Google Patents

Ein positionsdetektor für eine abtastvorrichtung

Info

Publication number
DE60009171D1
DE60009171D1 DE60009171T DE60009171T DE60009171D1 DE 60009171 D1 DE60009171 D1 DE 60009171D1 DE 60009171 T DE60009171 T DE 60009171T DE 60009171 T DE60009171 T DE 60009171T DE 60009171 D1 DE60009171 D1 DE 60009171D1
Authority
DE
Germany
Prior art keywords
light
blocker
reflector
detectors
position detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60009171T
Other languages
English (en)
Other versions
DE60009171T2 (de
Inventor
Norbert Petschik
Frank Burkhardt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Scanlab AG
Original Assignee
Scanlab AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Scanlab AG filed Critical Scanlab AG
Application granted granted Critical
Publication of DE60009171D1 publication Critical patent/DE60009171D1/de
Publication of DE60009171T2 publication Critical patent/DE60009171T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715Scale reading or illumination devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473Circular or rotary encoders

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Radar Systems Or Details Thereof (AREA)
DE60009171T 2000-06-15 2000-06-15 Ein positionsdetektor für eine abtastvorrichtung Expired - Lifetime DE60009171T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2000/005528 WO2001096816A1 (en) 2000-06-15 2000-06-15 A position detector for a scanning device

Publications (2)

Publication Number Publication Date
DE60009171D1 true DE60009171D1 (de) 2004-04-22
DE60009171T2 DE60009171T2 (de) 2004-10-14

Family

ID=8163989

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60009171T Expired - Lifetime DE60009171T2 (de) 2000-06-15 2000-06-15 Ein positionsdetektor für eine abtastvorrichtung

Country Status (7)

Country Link
US (1) US6921893B1 (de)
EP (1) EP1295090B1 (de)
JP (1) JP3884707B2 (de)
AT (1) ATE262163T1 (de)
AU (1) AU2000250781A1 (de)
DE (1) DE60009171T2 (de)
WO (1) WO2001096816A1 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004018106B4 (de) * 2004-04-14 2008-08-07 Markus Guggenmos Hochgenauer optischer Positionsdetektor für Galvanometer-Drehantiebe
FR2877124B1 (fr) * 2004-10-22 2006-12-29 Schneider Electric Ind Sas Detecteur photoelectrique
CN101636638B (zh) 2006-06-19 2013-06-05 杰斯集团公司 使用反射照明光的光学位置传感系统和方法
US8508726B2 (en) 2007-01-23 2013-08-13 William R. Benner, Jr. Rotary position detector and associated methods
US7688432B1 (en) 2007-01-23 2010-03-30 Benner Jr William R Rotary position detector and associated methods
US7940380B1 (en) * 2007-01-23 2011-05-10 Benner Jr William R Rotary position detector and associated methods
DE102007003852A1 (de) 2007-01-25 2008-07-31 Raylase Ag Galvanometrischer Motor mit optischer Positionsdetektionseinrichtung
PL1958659T3 (pl) * 2007-02-14 2010-01-29 Mt Derm Gmbh Moduł napędowy przyrządu do miejscowego nakłuwania ludzkiej lub zwierzęcej skóry i przyrząd ręczny
EP2654089A3 (de) 2007-02-16 2015-08-12 Nanogram Corporation Solarzellenstrukturen, Fotovoltaikmodule und entsprechende Verfahren
DE102008034792A1 (de) 2008-07-25 2010-02-04 Scanlab Ag Laserablenkvorrichtung
CN101387512B (zh) * 2008-08-28 2010-06-09 上海科勒电子科技有限公司 距离检测感应装置
CN101387514B (zh) * 2008-08-28 2010-07-28 上海科勒电子科技有限公司 距离检测感应装置
US20100294349A1 (en) * 2009-05-20 2010-11-25 Uma Srinivasan Back contact solar cells with effective and efficient designs and corresponding patterning processes
US20100294352A1 (en) * 2009-05-20 2010-11-25 Uma Srinivasan Metal patterning for electrically conductive structures based on alloy formation
EP2648665B1 (de) 2010-12-10 2017-10-11 WaveLight GmbH Lasereinrichtung, insbesondere für die ophthalmologische laserchirurgie
PT2648666T (pt) 2010-12-10 2017-04-21 Wavelight Gmbh Dispositivo de laser, especialmente para cirurgia oftalmológica a laser
US8912083B2 (en) 2011-01-31 2014-12-16 Nanogram Corporation Silicon substrates with doped surface contacts formed from doped silicon inks and corresponding processes
US8711345B2 (en) 2011-05-20 2014-04-29 Nutfield Technology, Inc. Optical angular position detection apparatus and method
DE102012222571A1 (de) 2012-12-07 2014-06-12 Scanlab Ag Optischer Winkeldetektor
DE102013208649A1 (de) 2013-05-10 2014-11-13 Scanlab Ag Optischer Winkeldetektor mit Strahlformungselement
JP6369042B2 (ja) * 2013-11-05 2018-08-08 日本精工株式会社 光学式エンコーダユニット及び光学式エンコーダ
US10500676B2 (en) 2016-02-19 2019-12-10 Faro Technologies, Inc. Voice coil motor operated linear actuator
WO2018051757A1 (ja) * 2016-09-13 2018-03-22 三菱電機株式会社 ガルバノスキャナおよびミラーユニット
EP3635611B1 (de) * 2017-06-06 2021-04-21 Sicpa Holding Sa Beleuchtungsvorrichtung für ein optisches system einer leseeinrichtung
RU2676722C1 (ru) * 2018-05-03 2019-01-10 Российская Федерация в лице Министерства промышленности и торговли Российской Федерации (Минромторг России) Система автоматической подстройки сканирующей системы установки селективного лазерного сплавления
DE102020201957A1 (de) * 2020-02-17 2021-08-19 Scanlab Gmbh Galvanometerantrieb mit spielfreier Lagerung
JP6869393B1 (ja) * 2020-03-12 2021-05-12 シチズン千葉精密株式会社 位置変換器、および検出器の製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3983391A (en) 1975-05-21 1976-09-28 Itek Corporation Optical encoder of the reflective type
US4152589A (en) 1977-09-28 1979-05-01 Silonics, Inc. Optical rotational encoder
GB8325921D0 (en) 1983-09-28 1983-11-02 Marconi Avionics Optical method of measuring displacement
JPS61132812A (ja) 1984-11-30 1986-06-20 Nippon Denso Co Ltd 変位検出装置
JPH0419454Y2 (de) * 1986-04-25 1992-05-01
JPS62174209A (ja) * 1986-11-29 1987-07-31 Satsuki Kitani 膨潤性物質の製造方法
JPH0599620A (ja) * 1991-10-14 1993-04-23 Olympus Optical Co Ltd エツジ検出装置
IL109860A0 (en) 1994-06-01 1994-10-07 Scitex Corp Ltd Compact disc encoder
KR970051196U (ko) * 1996-02-03 1997-09-08 레이저 프린터의 용지 감응센서 장치
US5844673A (en) * 1998-04-17 1998-12-01 Cambridge Technology, Inc. Axial led position detector for determining the angular position of a rotatable element
DE10114751C1 (de) * 2001-03-22 2002-11-21 Gerhard Kurz Drucksensor

Also Published As

Publication number Publication date
WO2001096816A1 (en) 2001-12-20
DE60009171T2 (de) 2004-10-14
EP1295090A1 (de) 2003-03-26
ATE262163T1 (de) 2004-04-15
EP1295090B1 (de) 2004-03-17
JP2004503762A (ja) 2004-02-05
US6921893B1 (en) 2005-07-26
JP3884707B2 (ja) 2007-02-21
AU2000250781A1 (en) 2001-12-24

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